QARTZ
Feilihua
公司简介Corporate Introduction
湖北菲利华石英玻璃股份有限公司坐落在中国历史文化名城湖北省荆州市,公司主要从事高性能石英玻璃、石英纤维及复合材料的研发生产,主要服务于半导体、光通讯、光伏太阳能、高端光学及航空航天等高新技术领域,是中国率先通过集成电路芯片准入资格认证的石英材料供应商,也是全球少数几家具有石英纤维批量生产能力的企业。
公司始建于1966年,2014年在深圳证券交易所创业板挂牌上市,是中国石英行业第一家上市公司(股票代码300395),现拥有荆州、潜江、上海、合肥、泰州、济南六个生产基地以及荆州、武汉和上海三大研发平台。
公司坚守“专注诚信创新进取”的核心价值观,致力于为全球客户提供高性能石英产品的整体解决方案,成为石英科技创新的引领者。
公司已通过ISO9001、ISO14001和OHSAS18001体系认证,现为国家级企业技术中心、湖北省高性能石英玻璃及石英纤维工程技术研究中心、湖北省博士后产业基地、全国第五批创新型试点企业。
Beingcommitedtotheproductionandsalesof high-performancequartzmaterial,quartzfiberand fabricswhichismainlyusedforsemiconductoropticalcommunication,aviationandaerospaceoptics andotherfields,HubeiFeilihua QuartzGlassCo.,Ltdhasnowbecomemoreinfluentialandscale advantageasquartz glassmaterialand quartzfiber manufacturer bothat homeand abroad.
Foundedin1966,HubeiFeilihua QuartzGlassCo.,LtdwaslistedonGEM(GrowthEnterpriseMarket) onSeptember10th,2014,withstock code300395.Now ithassixmanufacturing bases in Jingzhou, Qianjiang,Shanghai,Hefe,Taixing,JinanaswellasShanghaiTechnicalResearch InstituteandWuhan ResearchandDevelopmentCenter.
Certifiedby ISO9001,ISO14001,OHSAS18001,Feilihuanow becomes thenational high-tech enterprise,memberof national technicalcommiteeof standardizationof industrial glassand special glass,enterprise technologycenterof Hubei province,technical researchcenterof Hubei highperformance quartz glassandquartz fiber project,postdoctoral industry base of Hubei province, national innovationpilotenterprise.
Feilihuastickstothecorevalueof“Absorption,Integrity,Innovation,Enterprising”andtakes“The riseof Chinese quartz”as its own mission,strives for the realization of corporate vision“Building Feilihuaascentury-oldbrand,tobeaworld-leadingenterprise”
eilihua
企业文化 Corporate Culture
核心价值观:
Company Core Value 专注诚信创新进取 Absorption Integrity Innovation Enterprising
使命:
致力于为全球客户提供高性能石英产品的整体解决方案, 成为石英科技创新的引领者。 Tobealeader inquartztechnology innovation,committedto provideoverall solutionsof highperformance quartz products forour global customers.
Mission
愿景:
理念:
Vision
打造百年菲利华品牌,做国际一流企业。
BuildingFeilihuaascentury-oldbrand,tobeaworld-leadingenterprise.
Concept 共创共享共赢 Co-create Sharing Win-win
股票代码:300395
Feilihua
企业管理方针Enterprise Management Policy
质量方针QualityPolicy
科学管理快速反应持续改善顾客满意Scientific Management Rapid Response Continuous lmprovement Customer Satisfaction
环境方针EnvironmentPolicy
以不断的技术进步和严格的管理提高产品品质和服务的同时,注重环保、节能的社会责任,始终坚持健康,持续的发展方向。
Wekeepon improving the qualityof products&services by constant technical progressand strict management,and inthemeanwhile takeoursocial responsibilitiesonenvironmental protectionand energysavingaimingathealthyandsustainabledevelopment.
职业健康方针Occupational HealthPolicy
以遵章守法为基础,坚持“安全第一、综合治理”的原则,持续改进职业健康安全工作,创建和谐企业。
Beingdisciplined&law-abiding,wedevoteon improving theconditions foroccupational safetyand healthandaharmoniousenterprisewiththeprincipleof"SafetyFirst,Comprehensive treatment".
一流的检测设备 完善的管理体系
First-classTestingEquipment Complete ManagementSystem
股票代码:300395
Feilihua 石英事业部简介 Quartz Business Unit Introduction
石英事业部主要从事半导体及光学用石英材料的研发、生产、销售和服务,致力于为全球客户提供满意的石英产品解决方案。主导产品为气炼、电熔法生产的天然与合成石英玻璃锭、筒、管、棒。近年来成功研制不透明、低羟基、高纯少气泡、低膨胀石英等多品类多应用领域的产品,全力满足高、低端市场需求。
在半导体领域,我们聚焦前端制程的高端石英材料的产品升级,推动刻蚀材料、火加工高纯、超高纯石英和无机非金属新材料的开发,突破了从天然石英到合成石英的技术壁垒,以技术迭代升级为客户提供可定制化的材料供应。我们是国内首家通过全球三大半导体设备供应商认证的企业,品质技术实力达到全球第一梯队。
在光学领域,我们围绕光掩膜基板领域产品升级,持续推进高性能(高均匀性、低膨胀)合成石英研发。我们突破TFT-LCD超大规格光掩膜基板材料(G10.5代)的生产制造技术,增强我国光电子平板显示产业可持续发展能力。
合成材料工厂Synthetic Material Factory电熔材料工厂Electric Material Factory
TheQuartzDivision ismainlyengaged intheresearchanddevelopment,production,salesandserviceof quartzmaterialsforsemiconductorsandoptics,and iscommitedtoprovidingsatisfactoryquartzproduct solutions for globalcustomers.Themainproductsarenatural quartzproducedbyflame fused orelectric fusedandsyntheticquartzingots,cylinders,tubesandrods.Inrecentyears,manykindsof productswith multi-application fieldssuchasopaque,low hydroxyl,high purity-lowbubbleand lowexpansionquartz have beensuccessfullydeveloped tomeet the needsof highand low-end market.
Inthefieldofsemiconductors,we focusonthe productupgradeof high-end quartzmaterials inthe frontendprocess,promotethedevelopmentofetchingmaterials,fire-processed high-purity,ultra-high-purity quartzandinorganicnon-metallcnewmaterials,breakthroughthetechnicalbariersfromnaturalquartzto syntheticquartz,and providecustomerswithcustomizedmaterial supply throughtechnological iterative upgrades.Weare thefirst enterpriseinChina topassthecertificationof theworld'sthreemajor semiconductor equipment suppliers,and thequalityandtechnical strength has reached theworld'sfirst echelon.
Inthefieldofoptics,we continue topromote theresearchand developmentof high-performance(high uniformity,low expansion)synthetic quartz around the product upgrades in the field of photomask substrate.We break through the manufacturing technology of TFT-LCDsuper-large photomask substrate material(G10.5),andenhance thesustainabledevelopmentabilityof China'soptoelectronicflatpanel display industry.
Feilihua
半导体领域Semiconductorfield
股票代码:300395
| 工艺 Technology | 型号 | 材科白录 材质 Material Quality | Quartz Glass Material Content 特点 | |
| Flame Fused Quartz 气熔石英材料(锭、筒) | Type FLH311 | Features 天然石英锭,采用气炼工艺制造, Natural quartz ingotmadebyflame fusion process, | ||
| 气泡少,具有良好的透明度和几何尺寸, 材料利用率高。 | lessbubble,hightransparencyand good geometry,optimumrateof utilization. | |||
| FLH21 | 透明石英 | |||
| Transparent 几乎无气泡、超高纯、低碱低铝,几乎无包裹物、 | Almostbubblefree,ultra-highpurity,lowalkali and | |||
| FLH321HS | 耐高温性能强,是理想的视窗材料。 挪威砂材料,更高纯度,采用气炼工艺制造, | lowaluminum,almostnowrapping,stronghigh mmperatureresistanceitisanidealwindow Norwegiansandmaterial,madebyflamefusion | ||
| FLH321N | 气泡少,具有良好的透明度和几何尺寸, 材料利用率高。 不英 | process,lessbubble,hightransparencyandgood geometry,optimumrateofutiization. | ||
| FLHO321N | Big total surfacearea of bubbles per unit volume. | |||
| 电熔石英材料(键) 筒、 管、 棒) 8 | FLH621 | 透明石英 Transparent Quartz | 天然高石1定,采用电熔工艺, | i |
| FLH621S | 高纯石1电熔工艺,气泡少。 | |||
| FLH621H | 天1英在用高,H含量 | |||
| FLH620L | 采用电连熔工艺生产的更高纯度的石英管, 偏壁度0.3mm以内。OH含量少于30ppm。 | Thetubeisproducedbyelectric fusedcontinuous | ||
| FLH610L | 采用电连熔工艺生产,偏壁0.5mm以内。 | |||
| FSTQZ°W | 拥有高反射率,是一种理想的隔热材料, 可以有效地降低热损失, 并能延长加热部件的寿命。 | Withhigheflectivityitisanidealthermalinsulation materialtoeffectivelyreduceheat lossandextend | ||
| FSTQZ°B | 不透明石英 复 | 可同时拥有高光学吸收率、高发射率以及低热导率。 此外,相较于其他黑色陶瓷其加工性能更优。 | emissivityand lowthermalconductivity.Comparedwith otherblackceramics,itsprocessngperformanceis superior. | |
| FCMQZ | 高能度,面光洁度,耐高温良好的隔热保温 | |||
| 石 料 盛 | FLH301 | 透明石 | 有的,眼可见气泡, | reel |
| FLH331 | ,无 | Exeey | ||
| FLH631 | 高纯石2用合成砂电熔工艺熔制,气泡少。 | |||
Feilihua 气熔透明石英 Flame Fused Quartz FLH311 FLH321 FLH321N FLH321H FLH321HS
气泡少,具有良好的透明度和几何尺寸。
广泛应用于半导体、光纤、太阳能光伏、光学镀膜等领域。
Thematerialhasfewbubble initwithexcellent transparencyandgeometricdimension.Theyarewidely usedforsemiconductor,OpticalFiber,SolarEnergy& Photovoltaics,Optical Coating/Filming.
气熔高纯少气泡石英材料,具有气泡少、纯度高,几乎无包裹物、耐高温性能等特性,广泛的应用于半导体先进制程、光学、化学加工、紫外线和高温窗口等。
Thanks to the few bubbles,high purity,almost no inclusion,high temperature resistant performance and other characteristics,FLH321HS has been widely used in semiconductor advanced manufacturing,optical,chemical processing,UVand high temperature window.
股票代码:300395
化学纯度
Chemical Impurity
物理性能
Physical Property
| 机械性能MechanicalProperties | 电学性能Electrical Properties | 热学性能ThermalProperties | |||
| 密度(g/m²) | 2.2 | 介电etrcConstnt (10GHz) | 3.74 | 应变P(in=1014.5) °C | 1080 |
| 杨氏模量(GPa) Young's Modulus | 74 | 介电损耗 Loss Factor(10GHz) | 0.0002 | 退火点(n=10)°℃ Annealingpoint | 1180 |
| 泊松比 Poisson'sRation | 0.16 | 介电强度(V/m) Dislectric Strength | 3.7×10 | 软化点²(η=107)℃ Softening point | 1700 |
| 抗弯强度(MPa) Bending Strength | 65 | 电阻率(Ω) Resistivity (20℃) | 1× 1016 | 热导率(W/m·k)在20℃条件下 Thermal Conductivity (20℃) | 1.4 |
| 抗压强度"(MPa) Compressive Strength | 1100 | 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | |||
| 抗拉强度(MPa) Tensile Strength | 50 | 热膨胀系数(×10/k) Expansion Coefficient | 5.5 | ||
| 抗扭强度"(MPa) Torsional Strength | 30 | 弯曲和拉伸强度受表面条件的影响 2由外推法估计得到 | α:20℃~320°℃ | ||
| 莫氏硬Hardness | 6-7 | 注有另外说明的情况下,所有值均指在25℃以下 | |||
Feilihua
气熔不透明石英 Flame Opaque Quartz
FLHO321H
FLHO321N
化学性能
Chemical property
| 10%HF溶液,25℃,腐蚀3小时 Solution:HF10wt%,25℃,Etchingtime:3hours | 10%KOH溶液,20℃,腐蚀72小时 Solution:KOH10wt%,20℃,Etching time:72hours | ||
| 火焰抛光表面(um/min) Firepolished surface | 磨光表面(um/min) Ground surface | 火焰抛光表面(um/min) Firepolishedsurface | 磨光表面(um/min) Ground surface |
| 0.07 | 0.1 | 0.002 | 0.005 |
主要用途:
单位体积内气泡总表面积大,能增加热辐射线在石英玻璃内的散射,从而提高热辐射拦阻能力,广泛用于半导体、太阳能各种石英器件的隔热部位。
Mainapplication:
Thanksto the big total surface area of bubbles per unit volume,it can increase the reflection of heat rays in the quartz glass,which improves itsabilityto intercept heat rays.It is wildly used in heat insulation parts of various quartz devices such as semiconductors and solar energy.
股票代码:300395
化学纯度
Chemical Impurity
光学性能
Optical properties
气熔不透明石英FLHO321N反射率
物理性能
Physical Property
| FLHO321N | FLHO321H | |
| 机械性能Mechanical Properties | ||
| 密度(ρ)" Density(ρ) | 2.05g/cm² | 2.05 g/cm³ |
| 抗弯强度(MPa) Bending Strength | 60 | 60 |
| 维氏硬度(MPa) Vickers Hardness | 8900 | 8900 |
| 电学性能Electrical Properties | ||
| 介电 (10GHz) | 3.74 | 3.74 |
| 介电损耗(500MHz) Loss Factor | ||
| 热学性能ThermalProperties | ||
| 热导率(W/m·k)在20℃条件下 Thermal Conductivity (20°℃) | 1.24 | 1.24 |
| 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | 749 | 749 |
| 热扩散率(×10-7m/s)在20℃条件下 Diffusivity (20℃) | 8.4 | 8.4 |
| 粘度logn(平衡状态)在1200℃条件下 Viscosity (1200℃) | 11.72 | 11.72 |
| 软化点(℃) Softening point | 1670 | 1670 |
| 退火点(℃) Annealing point | 1150 | 1150 |
| 应变点(℃) Strain Point | 1070 | 1070 |
| 热膨胀系数(x10-/k) α:30°℃~600℃ Expansion Coefficient | 6.4 | 6.4 |
股票代码:300395
Feilihua 电熔石英 Electric Fused Quartz FLH621 FLH621H FLH620L FLH621S
电熔石英材料,具有羟基含量低、纯度高、耐高温性能强等特性。广泛应用于半导体行业作为半导体扩散炉及CVD炉元件的材料。
注:可根据客户要求,定制规格产品。Othersizesavailableuponrequests 电熔石英管 Electric Fused Quartz Tube
Electric fusedquartzmaterial hascharacteristicssuchaslow OH content,high purity,and strong high-temperature resistance. Itiswidelyusedas quartz parts fordiffusion processand CvD furnace in semiconductor industry.
电熔无气泡石英Low hydroxyl and low bubble quartz超低气泡含量的优势,在热学、光学性能方面表现优异,在半导体、光学等高端领域应用广泛。
Ultra-lowbubble content,excellent performance in thermal and optical properties,it is widely applied in the high-end field of semiconductor and optics.
物理性能
Physical Property
| 机械性能MechanicalProperties | 电学性能Electrical Properties | 热学性能Thermal Properties | |||
| 密度(g/m²) | 2.2 | 介电e常t ((10GHz) | 3.74 | 应点(t | 1150 |
| 杨氏模量(GPa) Young's Modulus | 75 | 介电损耗 LossFactor(500MHz) | 退火点(℃) Annealing point | 1215 | |
| 泊松比 Poisson'sRation | 0.17 | 电阻率(Ω·m) Resistivity(20℃) | 1 × 1016 | 软化点2(℃) Softening point | 1710 |
| 抗弯强度(MPa) Bending Strength | 65-95 | 热导率(W/m·k)在20℃条件下 ThermalConductivity(20℃) | 1.38 | ||
| 抗压强度(MPa) Compressive Strength | 1100 | 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | 749 | ||
| 抗拉s强度(MPa) 抗扭强度"(MPa) | 50 | 热膨胀系数(x107/k) α:20℃~320°℃ | 5.2~5.8 | ||
| Torsional Strength 莫氏硬度 | 30 | 弯曲和拉伸强度受表面条件的影响 2由外推法估计得到 注意: | |||
杂质含量
| 杂质元素含量 ImpurityTypicalValue | |||||||||||||||
| 元素 牌号 | AI | B | Ca | Co | Zr | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | OH |
| FLH620L | 13 | 0.1 | 0.6 | 0.1 | 1 | 0.05 | 0.3 | 0.2 | 0.4 | 0.05 | 0.05 | 0.2 | 0.05 | 1.30 | |
| FLH621 | 12.8 | 0.05 | 0.5 | 0.01 | 1 | 0.01 | 0.3 | 0.25 | 0.3 | 0.05 | 0.05 | 0.5 | 0.05 | 1.25 | ≤15 |
| FLH621H | 8.00 | 0.05 | 0.5 | 0.01 | 0.7 | 0.01 | 0.3 | 0.1 | 0.15 | 0.05 | 0.05 | 0.2 | 0.05 | 1.40 | ≤15 |
| FLH621S | 12 | 0.8 | 一 | 0.4 | 0.2 | 0.9 | 0.15 | 0.5 | 0.6 | ~10 | |||||
股票代码:300395
光学性能
Optical properties
紫外透过率曲线Ultraviolet Transmittance Curve
Feilihua
FSTQZW 电熔不透明石英 (白)
Sintered Fused Opaque Quartz电熔不透明石英玻璃拥有低透过率,高热反射率,可以有效地降低热损失,并能延长加热部件的寿命。该材料可以进行焊接、火抛光以及高精度光学抛光处理,拥有高密度,优异的机加光洁度,火抛后良好的光洁度,更长的使用寿命。适用于半导体热处理制程。
Electric fused opaque quartz glass has high reflectivity,which can effectively reduce heat loss and can extend the lifespan of heating parts. Thematerial can be welded,fire-polished,and high-precision optical polished,and can be used for semiconductor processes with its high purity.
Feilihua
FSTQZ?B 电熔不透明石英 (黑)
BlackQuartz
黑色石英玻璃材料同时具备高纯度、高光学吸收率、高发射率以及低热导率,因此可提高工艺环境的热均匀性,屏蔽过程中向外辐射热量,从而增加热管理的自由度。此外,较其他黑色陶瓷其加工性能更优。
Black quartz glass material has high purity,high optical absorption,highemissivity,and lowthermal conductivityatthe same time,so it can improve the thermal uniformity of the process environmentand shield the heatradiated outward during the process,thus increasing the freedomof thermal management.In addition,it has better processing properties than other black ceramics.
股票代码:300395
杂质含量
Chemical purity
物理 性能
Physical properties
| FSTQZW | FSTQZB | |
| 密度 (g/m³) | 2.15-2.18 | 2.19-2.20 |
| 孔隙率 Porosity | 1.3%-2.7% | 0.3%-0.8% |
| 孔径size | ||
| 线膨胀系数(0-900℃)108℃ | 0.45 | 0.60 |
| 比热i(/He)在20C条件下 | 0.75 | 0.73 |
| 最高工作温度的inuous℃C | 1100 | 1150 |
| 最高工作温度ture-short termC | 1300 | 1300 |
| 介电损耗角室温13.56MHz Dielectric loss (room temperature) | 2×10-4 | 90×10-4 |
| 热h率a(W/mu.kvi在20℃C条件下 | 1.39 | 1.65 |
光学性能
Optical properties
| FSTQZRW | FSTQZRB | |
| 透过率Transmission (400-2000nm) | ||
| 反4射率-220otivity | >70% | |
| 发射率Emissivity (10-20μm) | >80% |
股票代码:300395
Feilihua 复合石英 CompositeQuartzMaterial FCMQZ
中间层为FSTQZ°W高纯白色不透明石英材料,保留了其出色的隔热性能;
两侧为半导体级透明石英材料,高温区使用规避了乳白材料颗粒脱落的风险,稳定性更高;
复合层熔融结合,无空穴,具有出色的冷热加工性能,作为隔热和保温材料应用于晶圆制程中。
透明层可根据客户需求定制:FLH321、FLH321H、FLH621、FLH621H、FLH301等。
The middle layer is FSTQZ@W high purityopaque quartz material,which remains its excellent thermal insulation property.Both sidesare semiconductor grade transparent quartz material,which canavoid the risk of opaque material particle fallingoffat high temperature usage and provide higher stability.Thecomposite layersare fused togetherand void free,withexcelent cold and hot processing properties.It is usedas thermal insulation material in wafer fabrication process.The transparent layer can be customized according to customer requirements: FLH321,FLH321H,FLH621,FLH621H,FLH301,etc.
化学纯度
Chemical Impurity
| 牌号 Type | 杂质元素平均值 TypicalMeanValue | 单位Unit:ppm | |||||||||||||
| AI | Ca | Mg | Cu | Fe | Ni | Li | Na | K | Zr | Ti | Mn | B | Co | 合计 | |
| (FSTQZ) | 13 | 1.2 | 0.1 | 0.05 | 0.5 | 0.05 | 0.4 | 1.2 | 0.5 | 1.7 | 1.5 | 0.05 | 0.1 | 一 | 20.35 |
| 透明层 (FLH621) | 12.8 | 0.5 | 0.05 | 0.01 | 0.3 | 0.05 | 0.3 | 0.5 | 0.25 | 1.25 | 0.05 | 0.05 | 一 | 17.12 | |
光学性能
Optical properties
FCMQZ保留了FSTQZW 较低的红外透过率( < 0 . 5 % 和较高的红外反射率( > 7 0 % 0
FCMQZ material retains the low transmittanceand high reflectivity properties of FSTQZ?W material.
单位Unit:mm
| 产品 Product | 类型 Type | 长度/直径 Length/OD | 宽度 Width | 高度/厚度 Height/Thickness |
| FSTQZ°W FSTQZ°B | 碗芯 | 460 | 30 | |
| 正方板 | 500 | 500 | 30 | |
| 长方条 | 800 | 250 | 60 | |
| 圆环 | 580 | 365 | 130 | |
| FCMQZ | 圆片 | 340 | 0.75+2+0.75 1+4+1 0.75+2+3.25 |
股票代码:300395
Feilihua
多孔石英
Porousquartz filterelement
FPQZ
多孔石英过滤芯,用于气体匀流、缓冲、半导体扩散。
具有孔隙率高、垂直度良好和规格尺寸多样化的优势。
在气体、液体过滤领域具有良好的应用。
The porous quartz filter element used for gas homogenization,buffering and semiconductor diffusion possesses high porosity, good perpendicularityand diversified specifications.With the aboveadvantages,it is widelyapplied in the field of gasand liquid filtration.
Feilihua
合成石英
Synthetic Quartz FLH301以四氯化硅( S i C l _ { 4 } . )为原料,采用化学气相沉积(CVD)工艺熔制的高纯合成石英玻璃经过二次电熔热改型及机械加工生产的外形为规则圆柱体的石英玻璃锭、石英玻璃筒/环及制品。广泛应用于半导体先进制程及精密光学领域
High purity synthetic quartz glass melted by chemical vapor deposition (CVD)processand silicon tetrachloride (SiCl)as rawmaterial,quartz glass ingot,quartz glasscylinder/ring and its products with regular shape are produced through secondary,electric melting heat modificationand mechanical processing.Widely used in advanced semiconductor processes and precision optics.
化学纯度
Chemical Impurity
| 杂质元素典型值 ImpurityTypical Value 单位Unit:ppm | |||||||||||||||
| 牌号 | Al | B | Ca | Co | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | Zr | 总量 |
| FLH301 | ≤0.02 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.01 | ≤0.02 | ≤0.01 | ≤0.01 | ≤0.01 | 1 |
外观指标
Appearance
| 项目 Item | 指标Index |
| 气泡 Bubble | (或100倍以上高倍镜检测无直径气泡度0.03mm以上气泡)。 No visible bubblestothe naked eye. |
| 200nm透过率 200nmTransmittance | ≥85% |
| 外观颜色 AppearanceColor | 外表面颜色均匀,无杂色;涂红油后内部无色透明。 Theoutersurfacecolorisuniform,withoutanyimpurities,andthe interior iscolorlessand transparentafterbeingcoatedwithredoil. |
| 表面污染物 Surface Contaminants | 无有毒有害残渣 Notoxic orharmful residues. |
股票代码:300395
紫外光谱透 过性能
UV spectral transmittance
公 泡及异物情况
Bubbles and inclusions
| 气泡及异物数量(100g玻璃中允许) Theallowablenumberofbubblesand foreignmatterper1oogof glass | ||||||||||
| 类别 Category | 气泡直径(mm)及个数 Thediameter(mm)andnumberof bubbles | 异物的直径(mm)及个数 Thediameter(mm)andnumberof transparent oropaque impurities | ||||||||
| 0.03~0.30 | 0.31~0.70 | >0.7 | 总数个 | 0.3~0.7 | 0.8~1.0 | 1.1~3.0 | 1.1~3.0 | |||
| 数量 Number | 0 | 0 | 0 | 0 | 0 | 0 | 0 | 0 | ||
Feilihua
电熔合成砂石英FLH631
Electrofusion High-Purity Low-Bubble Quartz
FLH631是由合成石英砂制成的电熔高纯少气泡石英产品,具有纯度高、少气泡、羟基含量低、耐高温等特性,可用于半导体、光学、化学加工、紫外线和高温窗口等。
FLH-631is an electro-melted high-purity, low-bubble quartz product made from synthetic silica sand.It features high purity, low bubble content,low hydroxyl content,andhigh-temperatureresistance,makingit suitable forapplications in semiconductors,optics, chemical processing,ultravioletand high-temperature windows,among others.
杂质含量
Chemical purity
| 杂质元素典型值ImpurityTypicalValue (ppm) | ||||||||||||||
| 牌号 | AI | B | Ca | Co | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | OH |
| FLH631 | 0.15 | 0.2 | 0.15 | 0.05 | 0.2 | 1-20 | ||||||||
光学性能
Optical properties
紫外透过率曲线Ultraviolet Transmittance Curve
股票代码:300395
物理性能
Physical Property
| 机械性能MechanicalProperties | 电学性能Electrical Properties | 热学性能ThermalProperties | |||
| 密度(g/m²) | 2.2 | Die电常tConstant (10GHz) | 3.7 | 应点P(n=10145) C | 1070 |
| 杨un模量(GPa) | 74 | 电s损ator (10GHz) | 0.0002 | 退火点(n=10°)℃ | 1150 |
| 泊松比 Poisson's Ration | 0.17 | 电阻率(Ω) Resistivity(20℃) | 1×1016 | 软化点²(n=107)℃ Softening point | 1670 |
| 抗弯强度"(MPa) Bending Strength | 65 | 热导率(W/m·k)在20℃条件下 Thermal Conductivity(20℃) | 1.24 | ||
| 抗压强度"(MPa) Compressive Strength | 1130 | 比热(J/kg·k)在20℃条件下 Specific Heat(20℃) | 749 | ||
| 抗拉强度"(MPa) Tensile Strength 抗扭强度(MPa) | 49 | 热扩散率(×10-7·m²/s) 在20℃条件下Diffusivity(20℃) | 7.5 | ||
| Torsional Strength 莫氏硬度 | 29 | 弯曲和拉伸强度受表面条件的影响 2由外推法估计得到 | 热膨胀系数(×107/k) ExpansionCoefficient α:20℃~320℃ | 5.2-5.8 | |
透 过 率曲线
Transmittance Curve
Feilihua
气熔合成砂石英FLH331
Flame Fused High-purityNo-bubble Quartz
FLH331是由合成砂制成的石英材料,具有纯度高、少气泡,无包裹体、透过率高、耐刻蚀、耐高温等特性,可运用于半导体先进制程、光学、化学加工、紫外线和高温窗口等。
FLH331isaquartz material made of syntheticsand.Thanks tothe highpurity,few bubbles,no inclusions,high transmittance,etching resistance,high temperature resistanceandother characteristics,FLH331could be used in advanced semiconductor manufacturing process,optics,chemical processing,ultraviolet and high temperature windows,etc.
化学纯度
Chemical purity
| 杂质元素典型值 ImpurityTypicalValue (ppm) | ||||||||||||||
| 牌号 | AI | B | Ca | Co | Cu | Fe | K | Li | Mg | Mn | Na | Ni | Ti | OH |
| FLH331 | 0.1 | 0.2 | 0.2 | 0.03 | 0.2 | 150-300 | ||||||||
Feilihua
光学领域Optical field
股票代码:300395
Feilihua
有水合成石英 Synthetic Quartz (F-HUV)
以高纯度SiCI为原料,采用氢氧焰熔制而成,产品无气泡,具有良好的光学性能。广泛应用于高端光学领域。
The syntheticquartz,melted byhydrogenandoxygen flame withhighpuritySiCl4,hastheexcelentoptical properties and no bubble.It is widely used for advanced optics industry.
光学特性
Optical property
| 型号 | 条纹 | ( | Fure光性e | wvh | 气泡 | ||
| F-HUV1 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | 900-1300ppm | |
| F-HUV2 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV3 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV4 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV5 | 1D | ≤10nm/cm | None | 190-2100nm | 0级 | ||
| F-HUV6 | 1D | None | ≤10nm/cm | None | 190-2100nm | 0级 | |
| F-HUV7 | None | None | None | None | 190-2100nm | None |
透过率曲线
光学均匀性图谱
Transmittance Curve
检测设备:紫外、可见、近红外分光光度计
Test equipment: Ultraviolet、Visible light、Near infrared spectrphotometer
样品厚度:10mm
Sample thickness:10mm
Optical Homogeneity Spectrum
光学参数 Optical Parameters
光学性能
Optical Properties
| ptoan aracte | |||||||
| 折射率Refractive Index | 折射率Refractive Index | 阿贝数Abbe number | 色散Dispersion | ||||
| n1530 | λ(um) 1.53000 | 1.44426 | nd | 1.45849 | vd | 67.72 | nd-nc |
| n1064 | 1.06400 | 1.44964 | ne | 1.46011 Ve | 67.58 | nf'-nc' | 0.00677 0.00681 |
| nt | 1.01398 | 1.45024 | |||||
| ns | 0.85211 | 1.45246 | 典型的微量元素杂质含量TraceElementTypicalValue(PPM) | ||||
| n708 | 0.7082 | 1.45514 | 微量元素TraceElement 光学级Optical | ||||
| n691 | 0.69075 | 1.45554 | AI ≤0.05 ≤0.02 | ||||
| n672 | 0.67164 | 1.45600 | Na | ||||
| nc | 0.65627 | 1.45642 | Ca | ||||
| nc' | 0.64385 | 1.45678 | ≤0.02 K ≤0.01 | ||||
| nHe-Ne | 0.63299 | 1.45701 | Fe ≤0.005 | ||||
| n623 | 0.62344 | 1.45733 | Ti ≤0.01 | ||||
| nD | 0.58929 | 1.45841 | Cu ≤0.005 | ||||
| nd | 0.58773 | 1.45846 | Cr ≤0.005 | ||||
| n577 | 0.57696 | 1.45886 | Mn ≤0.005 | ||||
| ne | 0.54623 | 1.46007 | |||||
| n492 | 0.49161 | 1.46282 | |||||
| nF | 0.48613 | 1.46312 | |||||
| nF' | 0.47999 | 1.46353 | |||||
| ng | 0.43596 | 1.46669 | 部分色散Partialdispersion 部分色散比率Partialdispersionrate | ||||
| nh | 0.40477 | 1.46962 | nC-nt 0.00613 eC.t | ||||
| ni | 0.36512 | 1.47455 | nc-nA' 0.00248 OC.A' | ||||
| n334 | 0.33415 | 1.47979 | nd-nc 0.00209 0d.c | ||||
| n313 | 0.31266 | 1.48450 | ne-nc 0.00371 0e.C | ||||
| n289 | 0.28936 | 1.49105 | ng-nd 0.00824 θg.d | ||||
| n270 | 0.26988 | 1.49812 | ng-nF 0.00356 | ||||
| 0.25373 | 1.50554 | 0g.F nh-ng 0.00293 | |||||
| n254 | 1.50846 | ni -ng 0h.g ei.g | |||||
| n248 | 0.24800 | 0.00785 e,C.t' | |||||
| n229 | 0.22887 | 1.52121 | nc'-nt 0.00647 | ||||
| n215 | 0.21451 | 1.53378 | ne-nc' 0.00337 | ||||
| n194 | 0.19423 | 1.55896 | nF'-ne 0.00344 | ||||
| n185 | 0.18495 | 1.57511 | ni -nF 0.01104 | ||||
股票代码:300395
| 折射率Sellmeier色散公式 Refractive IndexSellmerierDispersion Formula | |||||||
| n²-1=A1χ²/(χ²-B²)+A2χ²/(²-B²)+Aχ²/(²-B²)) | |||||||
| Sellmeier色散公式因子 Constants of Sellmeier DiSperision Formula | |||||||
| A1 | 0.6961852 | B1 0.0685886 | |||||
| A² | 0.4079779 | 0.1162043 | |||||
| A3 | 0.8974798 | 9.8961609 | |||||
| 各种折射率温度系数 Various Refractive Index Temperature Constant | |||||||
| 温度范围 (℃) Temperature | 绝对dn/dT(x10/K) Absolute dn/dT | 相对dn/dT(x10/K) Relativedn/dT | |||||
| e g | h | i e | h | i | |||
| (546.1nm) | (435.8nm) | (404.7nm) | (360.0nm) | (546.1nm) | g (435.8nm) | (404.7nm) (360.0nm) | |
| -40~-20 | 7.8 | 8.2 | 8.4 | 8.7 | 9.8 | 10.2 10.5 | 10.8 |
| -20~0 | 8.2 | 8.6 | 8.9 | 9.2 | 9.9 | 10.4 10.7 | 11.0 |
| 0~20 | 8.7 | 9.1 | 9.4 | 9.7 | 10.1 | 10.6 10.9 | 11.2 |
| 20~40 | 9.1 | 9.5 | 9.8 | 10.2 | 10.6 | 10.8 11.1 | 11.5 |
| 40~60 | 9.5 | 9.9 | 10.2 | 10.6 | 10.6 11.1 | 11.4 | 11.7 |
Feilihua 低膨胀石英 Low Expansion Quartz (LEQZ°)
LEQZ超低膨胀石英玻璃口径超过1米,在室温区间下具有近零的热膨胀系数,零膨点温度区域可控。作为精密光路系统的反射镜、激光谐振腔体等部件应用于天基太空望远镜、半导体光刻设备用光学元件、原子钟等领域。
Ultra-lowexpansion quartz glass with a diameter of more than 1 meter,It hasanear-zerothermalexpansioncoefficient in theroom temperature range,and the zero expansion point temperature range iscontrollable.Asamirrorof precisionoptical system,laserresonant cavityand other components,itis usedinspace-based space telescopes,optical components for semiconductor lithography equipment,atomic clocksand other fields.
股票代码:300395
热 膨胀系数
Coefficient of Thermal Expansion
热膨胀系数低
Near-zero thermal expansion coefficient
可控的零膨点区间
Controllable zero expansion point interval
CTE均匀性
CTE Homogeneity
①OD660×50mmCTE均匀性(PV)OD660×50mmCTE homogeneity(PV)
②OD950×65mm CTE均匀性 (PV)OD950×65mm CTEhomogeneity(PV)
物理性能
Physical Property
| 项目 | Name of Indicator | LEQZ? |
| 平均线膨胀系数5-30℃(α) | Average LinearCoefficient of Thermal Expansion 5°Cto 35°C(α) | 0 - ±30ppb/℃ |
| 导热系数(K) | Thermal Conductivity (K) | 1.31w/(m· ℃) [1.13 kcal/(m·h· ℃)] |
| 热扩散率(D) | Thermal Diffusivity (D) | 0.0079 cm²/s |
| 体积热阻率200°C,100Hz(R) | D.C.Volume Resistivity, 200° C 100Hz(R) | 1011'ä ohm · cm |
| 平均比热(Cp) | Mean Specific Heat (Cp) | 767 J/(kg·C) [0.183 cal/(g· ℃)] |
| 应变点 | Strain Point | 890℃[1634°F] |
| 退火点 | Annealing Point | 1000 ℃ [1832° F] |
| 软化点 | Softening Point (estimated) | 1490℃ [2714°F] |
| 泊松比(v) | Poisson's Ratio (v) | 0.15 |
| 极限拉伸应力(MOR) | Ultimate Tensile Stress (MOR) | 36.53 MPa [7220 psi] |
| 努氏硬度,200g载荷 | Knoop Hardness,200g load | 518 kg/mm² |
| 密度(p) | Density(p) | 2.21g/cm² [0.079 Ib/in] |
| 比刚度(E/p) | Specific Stiffness (E/ p) | 3.12× 10°m [1.23× 10° in] |
| 剪切模量(G) | Shear Modulus (G) | 28.74 GPa [4.20x 106 psi] |
| 体积模量(K) | Bulk Modulus (K) | 30.71 GPa [4.95 × 106 psi] |
| 弹性模量(E) | Elastic Modulus(E) | 65.6 GPa [9.80 × 106 psi] |
| 应力光学系数 | Stress Optical Coefficient | 5-20 (nm/cm)/(kg/cm²) |
| 折射率(标称CTE材料) | RnomintiveCTE Material) | |
| 阿贝数 | Abb é Number(Vd) | 53.1 |
股票代码:300395
Feilihua 无水合成石英 Anhydrous Synthetic Quartz (F-HIR)
F-HIR材料,可用作高稳定超薄弹性元件、精密异形元件、抗激光损伤窗口等,是高精度惯性加速度计、半球谐振陀螺仪、强激光透镜(窗口)等器件的优选材料。
F-HIR,can be used as high stabilityultra-thin elastic element,precision special-shaped element,anti laserdamagewindow,etc.Itisapreferredmaterial for high precision inertial accelerometer, hemispherical resonator gyroscope,strong laser lens (window)and otherdevices.
| 型号 Type | 羟基含量 Hydroxyl content (ppm) | 光学 均匀性" Optical △n(x10°) | 应力” Stress | 条纹 Streak | 荧光 Fluorescence | 氢浓度 Hydrogen concentration | 适用于 Applicable |
| F-HIR1 | ≤50 | ≤5、≤2、≤1 | 可定制 | 3D | None | / | 光学透镜 |
| F-HIR1L | ≤50 | ≤5、≤2、≤1 | ≤10 可定制 | 3D | None | 5x1016~5x1018 可定制 | 照明光学部件, 耐辐照透镜 |
| F-HIR2 | ≤1 | ≤5、≤2、≤1 | 可定制 | 3D | None | 高精率光部件 | |
| F-HIR2L | ≤1 | ≤5、≤2、≤1 | ≤10 可定制 | 3D | None | 5x101~5×1018 可定制 | KrF、ArF基板、 高功率激光部件 |
| 金属杂质总含量 ImpurityContent | |
| 羟基含量 Hydroxyl content | |
| 温升 Temperature rise | 1.71℃(8000w,150s) |
| 内部透过率 Internal-transmittancerate | 99.93%/cm@193nm 、 99.99%/cm@248nm |
| 外部透过率 External-transmittance rate | ≥90.2%/6.35mm@193nm |
| 弱吸收 Weakabsorption | 0.83ppm@1064nm |
| 热膨胀系数 Coefficientof thermal expansion | |
| 耐辐照性能Laserdurability@193nm: 透过率变化DegradationofTransmission |
透过率曲线
Transmittance Curve
红外透过率曲线 Infrared Transmittance Curve
股票代码:300395
光学均匀性
Optical Homogeneity
气泡及异物情况
Bubbles and inclusions
| 适用于 Bubble Level | 气泡横截面积总和 Sumofcross-sectionalareasofbubbles | 最大气泡直径 Maximunbubblediameter |
| 1级 | None | None |
| 2级 | ≤0.002mm/100cm? | ≤0.03 |
| 3级 | ≤0.01mm²/100cm³ | ≤0.063 |
| 4级 | ≤0.03mm²/100cm³ | ≤0.1 |
Feilihua
无氯合成石英 Chlorine-free Synthetic Quartz (FNCL)
以有机硅为原料的合成石英玻璃新工艺,较传统合成石英材料,氯离子含量极低,在应用于紫外波段时能够延长其使用寿命
Feilihua has developed a new process of synthetic quartz glass using organic siliconas raw material, whichis chlorine-free and canextend its service life whenapplied in the uv band.
透 过 率
Transmittance spectral curve
| 金purtyC含量 | |
| 氯含量 Chlorine content | |
| 羟基含量 Hydroxylcontent | 800-1200 ppm |
| 温升 Temperaturerise | 3℃(8000W,1200Hz,150s) |
| 激光损伤阈值(体损伤,355nm) | 16.033J/cm² |
| 量热法弱吸收 Calorimetricweakabsorptioncoefficients | 0.3%-0.5%(193nm) |
股票代码:300395
单位Unit:mm
| 类型 Type | 规格 erance |
| 第4代、第5代 | 520×610/520×800 |
| 第6代 | 800×920/800×960 |
| 第7代 | 850×1200/850×1400 |
| 第8代 | 1220×1400 |
| 第10代 | 1620×1780 |
Feilihua
石英玻璃产品使用说明 Instructions for quartz usage
1.石英玻璃为易碎品,在搬运、安放过程中应注意轻拿轻放。
2.石英玻璃具有极低的热膨胀性。当与具有不同的热膨胀系数材料接触、被固定或夹住时温度的快速变化会使石英玻璃破裂。
3.石英玻璃受到污染后,高温下容易析晶。对于需高温使用的非免清洗的石英玻璃制品,在使用之前,应进行清洗,清洗应采用这样的方式:将石英玻璃产品放入加去脂剂的去离子水或蒸馏水中擦洗,擦洗干净后迅速用去离子水冲洗干净产品,接着将产品用 5 % (体积比)的氢氟酸浸泡5分钟或5 % 的氟化铵浸泡10分钟,然后用去离子水冲洗干净,并将产品迅速干燥。
4.不提倡石英玻璃在高温下间歇使用。这主要是由于石英玻璃的热膨胀系数和比重同析晶产物β-方石英相近。所以在高温下连续使用时,尽管析晶区不断扩大,但体积变化不明显,仍可满意地继续使用。当析晶产物冷却到 8 0 0 ^ { \circ } \mathsf { C } 时,则出现细小的龟裂网络。继续冷却到200\~275C时,则出现方石英从高温型到低温型(即β-方石英到a-方石英)的结构变化,并伴随着发生了体积聚变。如果析晶层很深,则石英玻璃也会随之破裂。
5.氢氟酸和 2 0 0 ^ { \circ } \mathsf { C } 热磷酸会明显的腐蚀石英玻璃。
1.Quartz glass is fragileand shouldbe handled withcarewhen transportedand emplaced.
2.Quartz glass is amaterial with anextremely low thermal expansion.A prouduct can crack if arapic temperaturechangeoccurewhileacomponentwithadifferentcoefficientofthermalexpansionisattached fastened,orclamped to it.
3.Devitrificationcaneasilyoccuratelevated temperature whenquartz glass iscontaminated.To those products thatarenot readyfor usein hightemperature,cleaning isneeded beforeuse.Todo this,it is recommendedtowashtheproductindeionizedordistilledwaterwithadegreasingagentadded tothe water.afterthiswashing,theproductshouldbeimmediatelyflushedwithdeionizedwaterandthenplacedin a5vol % solution of hydrofluoricacidfor5minutes,or placed ina5vol%solutionof NH4Ffor10minutes, andthenflushedagainwithdeionizedwaterand dried immediately.
4.Itisnotrecommendedtousequartzproductsatelevatedtemperatureatintervals.Thisisbecausethe expansioncoefficientanddensityofquartzglassareveryclosedtothatof β -cristobalite, the outcomeof devitrificationwhenquartzglassisusedatanelevatedtemperaturecontinuously,itcanperformwellasits cubagedoesnotchangeverymuchevenifadevirficationareaenlarges.Whentheoutcomeoff devitrificationis cooleddownto 8 0 0 ^ { \circ } { ~ C ~ } finecracknetswouldappear.When thetem-perature further decreasesto200\~275°C.thecristobalitawiththecubagechangegreatly,andinthiscase,ifadevitrification layeronaproductisverydeep,itmaybreak.
5.Hydrofluoricacidand hot phosphoricacidat 2 0 0 ^ { \circ } C erode quartz glass obviously




