A PRODUCT LINE OF PIEZOELECTRIC MOTION

Piezoelectric Motion Unit

10mK

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

Content Pages

1 Motion Units

Products covers linear, rotary, tilting and scanning motion

1-40

1.1

“Linear” Series

X & Z direction Linear Motion Units

Linear16， Linear25 & Linear35 Series

3

1.2

“Rotator” Series

360 Rotary Motion Units

Rotator16, Rotator25 & Rotator35 Series

15

1.3

“Goniometer” Series

Tilt Motion Units

Goniometer25-theta, Goniometer25-phi, Goniometer35-theta

& Goniometer35-phi Series

19

1.4

“LS - Linear” Series

Long Stoke Linear Motion, from 30 mm to 200 mm

LS-Linear 30, LS-Linear 50, LS-Linear75, LS-Linear100 & LSLinear200 Series

25

1.5

“Scanner” Series

Piezo Stack Driven, Friction Free

Scanner16-xy, Scanner16-z, Scanner25-xy, Scanner25-z,

Scanner35-xy, Scanner35-z

33

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Content Pages

2 Motion & Scanner Controller

Controllers support Labview Programm Control by USB, RS232 communication

41-42

2.1 Positioner Controller

MC-NewtonLT.01 & MC-NewtonLT.06 41

2.2 Scanner Controller

MC-ArchimedesLT.03 42

3 Accessaries

Controllers support Labview Programm Control by USB, RS232 communication

43-51

3.1

Adapter Plate

Mounting Adapters of 16, 25, 35 series for vertical /

horizontal setup

47

3.2

Flexible Thermal Link

Used to keep sample cold when positioners work in vacuum

environment

50

3.3 ToolBox

Non-magnetic Screws, Connectors & Wires 51

Piezoelectric Motion - LT

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

2025

New

Piezoelectric Motion - LT

N1Specifications subject to change without notice.

“Closed-Loop Scanner Series“ — ScannerXX.Ultra

Scanners with sub-nanoscale resolution capacitive displacement sensors for closed-loop control

➡ Precision demands a sensor.

Closed-loop scanner with a displacement sensor actively compensates the negative effects such as

environment temperature drift, piezoelectric creep and self-heating, achieving unprecedented precision at

low temperatures, which ensures the sophisticated experiments survive at extreme low temperature.

➡ “25 mm” Series

• Scanner25-x.Ultra.HV

• Scanner25-x.Ultra.UHV

• Scanner25-x.Ultra.ULT

• Scanner25-x.Ultra.UHV.ULT

• Scanner25-z.Ultra.HV

• Scanner25-z.Ultra.UHV

• Scanner25-z.Ultra.ULT

• Scanner25-z.Ultra.UHV.ULT

➡ “35 mm” Series

• Scanner35-xy.Ultra.HV

• Scanner35-xy.Ultra.UHV

• Scanner35-xy.Ultra.ULT

• Scanner35-xy.Ultra.UHV.ULT

• Scanner35-z.Ultra.HV

• Scanner35-z.Ultra.UHV

• Scanner35-z.Ultra.ULT

• Scanner35-z.Ultra.UHV.ULT

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

Z direction ➠

Scanner35-z.Ultra

XY direction ➠

Scanner35-xy.Ultra

Figure 2, “35mm series”, XYZ 3-freedom scanning motion set,

1pcs Scanner35-xy.Ultra + 1pc Scanner35-z.Ultra

X direction ➠

Scanner25-x.Ultra

Z direction ➠

Scanner25-z.Ultra

Y direction ➠

Scanner25-x.Ultra

Figure 1, “25mm series”, XYZ 3-freedom scanning motion set, 2pcs

Scanner25-x.Ultra + 1pc Scanner25-z.Ultra

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

2025

New

Piezoelectric Motion - LT

N2Specifications subject to change without notice.

New Controller - MC-ArchimedesLT.03.Ultra

Multi-channels high-speed controller for closed-loop scanner control

Figure.1 Closed- loop scanner controller - MC-ArchimedesLT.03.Ultra.

Working together with Multifields® closed-loop scanner , each of three channels maintains synchronous and

individual closed-loop control with sub-nm resolution.

➡ Features

• Capacitive sensing: Sub-nm displacement resolution | Tunable analog bandwidth

• High-speed Data acquisition: 50 kSa/s sampling rate | Synchronous multi-channel sampling

• Real-time communication: SPI communication between master and slave | 50 kSa/s stable data

transmission | EtherCAT/ EtherNET/ USB3.0

• Closed-loop control: Sub-nm resolution at ultra-high speed | Synchronous multi-channel

closed-loop control

➡ Interface & Functions

Communications Drive terminals Sensing terminals

* EtherCAT * Analog in * Trigger out * Sensor input

* EtherNET * Analog out * Voltage Output * Tuning Knob

* USB 3.0 * Trigger in * Analog out

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

2025

New

Piezoelectric Motion - LT

N3Specifications subject to change without notice.

Tech. Note — Precision, Spacial Resolution & Repeatability

Some definitions and discussion of technical parameters

➡ Example, Spacial resolution of Scanner.Ultra motion

Scanner35-z.Ultra was operated at 4.2 K in a ultra low-vibration cryogenic platform (ColdTABLE) .

The data acquisition from the capacitive sensor showed the RMS noise (σ) during closed-loop control was

typically ~0.4 nm. We make scanner to move step by step with 1 nm distance. It is easy to distinguish steps.

➡ Precision, also known Standard Deviation ( ISO standard )

Precision is the closeness of agreement between independent test results obtained under stipulated conditions.

The measure of precision is usually expressed in terms of imprecision and computed as a standard deviation of

the test results. Less precision is reflected by a larger standard deviation. [SOURCE: ISO 3534-2:2006,3.3.4]

➡ Spacial Resolution, discussion about the criterion

Resolution is generally defined as the smallest detectable interval between measured values. For a physical

parameter whose measurement values follow a Gaussian distribution N (μ, σ2), a significant portion of people

equate the standard deviation σ directly with resolution, while others adopt a stricter criterion, such as 3σ.

When the measured values are adjacent, the percentage of overlapping area between their Gaussian

distributions determines the distinguishability of these two values, which is a critical factor in defining the

resolution.

σ = 0.377 nm

σ = 0.417 nm

σ = 0.394 nm

µ1-σ µ1 µ1+σ µ2-σ µ2 µ2+σ

f(x)

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Piezoelectric Motion - LT

N4Specifications subject to change without notice.

➡ Characterization of Repeatability

The bidirectional repeatability characterization was performed using a laser interferometer (resolution 0.1

nm, sampling rate 50 kHz) to monitor the displacement of scanner. The scanner was programmed to

execute bidirectional motion over a 30 um range with 3 um incremental steps, completing 10 full backand-forth cycles. The experiments was performed at 4.2 K in a ultra low-vibration cryogenic platform

(ColdTABLE) with a MC-ArchimedesLT.Ultra03 controller.

The positioning deviation were calculated as Eij = Pmeasure,ij — Pmean,i, where i denotes the target position

index and j denotes the cycle number. The lower-right plot quantitatively summarizes the positioning

repeatability across all target locations, displaying two key statistical parameters: standard deviation σi

and maximum deviation ΔPmax,i calculated for each position i.

2025

New

µ

Position (µm)

µ

➡ The sensor redefines the motion control at cryogenic temperature

Our proprietary capacitive

displacement sensor delivers subnanometer resolution in cryogenic

environments — the core reason why

our scanner achieves excellent

precision, resolution and repeatability.

Capacitive displacement sensor

C0.2.FLT.Cryo

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

2025

New

Piezoelectric Motion - LT

N5Specifications subject to change without notice.

➡ Features • Tiny structure

• Non-magnetic material

• Ultra-high vacuum & low

temperature compatible

• Closed-loop control

➡ Picture & dimensions

“Closed-Loop Scanner Series” — Scanner25-x.Ultra

Scanners with sub-nanoscale resolution capacitive displacement sensors for closed-loop control

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 mm × 10.5 mm

2 Weight 80 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires twisted paired wire & triax cable

8 Connectors 2 head pins + 1 triax connector (for each dimension)

9 Scanning Axis X

10 Travel range @300 K: 55 μm; @4 K: 30 μm

11 Drive Voltage Max. 75 V @300 K; Max. 150 V @4 K

12 Max. Load 250 g

13 Capacitance @300 K 7 uF

14 Sensor Capacitive displacement sensor

15 Resolution 0.5 nm

16 Linearity error Typical ~ 0.1 %

17 Repeatability < 5 nm

For detail drawing and 3D model please contact us.

11.50

11.50

7 × M2 Throughout

2 × 2.10 Throughout

4 × M1.6 Throughout

25.00

25.00

21.60

21.60 10.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光1.6

如有例外，mm默认尺寸第三视角投影

25.00

25.00

21.60

21.60 11.50

11.50

20.00

11.00

10 × M2 Throughout

4 × M1.6 Throughout

2 × 2.10 Throughout

10.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/3/1

编号#

加工等级 第三视角投影

比例

Scanner25-z.CL - web

王潇

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

2025

New

Piezoelectric Motion - LT

N6Specifications subject to change without notice.

➡ Features • Compact design

• High load & high force

• Long travel range

• Non-magnetic material

• Closed-loop control

➡ Picture & dimensions

“Closed-Loop Scanner Series” — Scanner25-z.Ultra

Scanners with sub-nanoscale resolution capacitive displacement sensors for closed-loop control

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 mm × 10.5 mm

2 Weight 80 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires twisted paired wire & triax cable

8 Connectors 2 head pins + 1 triax connector (for each dimension)

9 Scanning Axis Z

10 Travel range @300 K: 55 μm; @4 K: 30 μm

11 Drive Voltage Max. 75 V @300 K; Max. 150 V @4 K

12 Max. Load 250 g

13 Capacitance @300 K 7 uF

14 Sensor Capacitive displacement sensor

15 Resolution 0.5 nm

16 Linearity error Typical ~ 0.1 %

17 Repeatability < 5 nm

For detail drawing and 3D model please contact us.

11.50

11.50

7 × M2 Throughout

2 × 2.10 Throughout

4 × M1.6 Throughout

25.00

25.00

21.60

21.60 10.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独mm

默认尺寸单第三视角投影25.00

25.00

21.60

21.60 11.50

11.50

20.00

11.00

10 × M2 Throughout

4 × M1.6 Throughout

2 × 2.10 Throughout

10.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/3/1

编号#

加工等级 第三视角投影

比例

Scanner25-z.CL - web

王潇

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

2025

New

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 mm × 14.5 mm

2 Weight 110 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires twisted paired wire & triax cable

8 Connectors 2 head pins + 1 triax connector (for each dimension)

9 Scanning Axis X, Y

10 Travel range @300 K: 100*100 μm; @4 K: 60*60 μm

11 Drive Voltage Max. 75 V @300 K; Max. 150 V @4 K

12 Max. Load 500 g

13 Capacitance @300 K 7 uF

14 Sensor Capacitive displacement sensor

15 Resolution 0.5 nm

16 Linearity error Typical ~ 0.1 %

17 Repeatability < 5 nm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

N7Specifications subject to change without notice.

➡ Features • 优于5nm空间运动可重复性 • 拥有光学通孔设计

➡ Picture & dimensions

“Closed-Loop Scanner Series” — Scanner35-xy.Ultra

Scanners with sub-nanoscale resolution capacitive displacement sensors for closed-loop control 14.50 35.00

35.00

31.00

31.00 21.60

21.60 3.00 8.50 14.00

12× M2 Throughout

2 × 2.50 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/3/1

编号#

加工等级 版第三视角投影

比例

Scanner35xy_web

王潇

14.50

35.00

35.00

31.00

31.00 21.60

21.60 3.00 8.50 14.00

12× M2 Throughout

2 × 2.50 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

2025

New

Piezoelectric Motion - LT

N8

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 mm × 14.5 mm

2 Weight 110 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires twisted paired wire & triax cable

8 Connectors 2 head pins + 1 triax connector (for each dimension)

9 Scanning Axis Z

10 Travel range @300 K: 100 μm; @4 K: 60 μm

11 Drive Voltage Max. 75 V @300 K; Max. 150 V @4 K

12 Max. Load 500 g

13 Capacitance @300 K 7 uF

14 Sensor Capacitive displacement sensor

15 Resolution 0.5 nm

16 Linearity error Typical ~ 0.1 %

17 Repeatability < 5 nm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

➡ Features • Compact design

• High load & high force

• Long travel range

• Non-magnetic material

• Closed-loop control

➡ Picture & dimensions

“Closed-loop scanner series” — Scanner35-z.Ultra

Scanners with sub-nanoscale resolution capacitive displacement sensors for closed-loop control 14.50 35.00

35.00

31.00

31.00 21.60

21.60

3.00

16.00

12.00

12 × M2 Throughout

2 × 2.50 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/3/1

编号#

加工等级 第三视角投影

比例

Scanner35z_web

王潇

14.50

35.00

35.00

31.00

31.00 21.60

21.60

3.00

16.00

12.00

12 × M2 Throughout

2 × 2.50 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Table 1 - Product Matrix of Motion Units (work below 2 K)

“Linear” Series “Rotator” Series

16mm Series

(Footprint Size)

Linear16-x Linear16-z Rotator16

25mm Series

(Footprint Size)

Linear25-x Linear25-z Linear25-z-LR Rotator25 Rotator25-optic

35mm Series

(Footprint Size)

Linear35-x Linear35-z-optic Rotator35

Linear stage, 7 Products Rotator, 4 Products

Table 2 - Long Stroke Linear Motion Units (Work below 2 K)

Travel Range 30 mm 50 mm

Long Stroke Linear Motion

Unit

LS-Linear30 LS-Linear50

1Piezoelectric Motion - LT

Zolix Instruments Co.,Ltd.

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Piezoelectric Motion - LT

“Goniometer” Series “Scanner” Series

NA 5 Products

Scanner16-xy Scanner16-z

9 Products

Goniometer25-phi Goniometer25-theta Scanner25-xy Scanner25-z

7 Products

Goniometer35-phi Goniometer35-theta Scanner35-xy Scanner35-z

Goniometer, 4 Products Scanner, 6 Products Total, 21

75 mm 100 mm 200 mm

5 Products

LS-Linear75 LS-Linear100 LS-Linear200

2

Zolix Instruments Co.,Ltd.

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Overview of “Linear Series” Piezoelectric Motion Unit

Low Temperature Piezoelectric Motion - Linear Series

Choose your suitable MultiFieldsⓇ “Linear Series” products

Piezoelectric Motion - LT

Linear16-x Linear16-z Linear25-x

Defined by size “16mm Series” “25mm Series”

1 Work Environment

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

2 Dimensions 16 × 16 × 10.5 mm 16 × 16 × 16 mm 25 × 25 × 9.5 mm

3 Travel Range 3 mm 3 mm 6 mm

4 Max. Load 50 g 250 g 500 g

5 Dynamic Drive Force 1.5 N 3 N 2 N

6 Position Sensor Resistive sensor

Sensor Range 3 mm 3 mm 6 mm

Sensor Resolution 150 nm

Sensor Repeatability 1 ～ 2 μm

7 Drive Voltage Max. 200 V

8 Fine Tune Resolution

@ 2 K* sub-nanometer @ 2 K

9 Step Size (min) @ 300 K* ~ 10 nm @ 300 K

10 Pins Number Drive - 2 pins

Sensor - 3 pins

Drive - 4 pins

Sensor - 3 pins

Drive - 2 pins

Sensor - 3 pins

11 Weight 10 g 12 g 24 g

Fine Tune Resolution @2 K—Fine tune mode is a unique analog motion driven method, where piezo units are controlled

by analog voltage signal, instead of continuous high frequency wave sequence. Because the resolution of the analog

signal is very high, the stage can achieve sub-nano meter positioning accuracy.

Step Size (min) @300 K—The open loop minimum increamental step size that the stage can move when it's doing stick-slip

motion, driven by continuous high frequency wave sequence.

3Specifications subject to change

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

Liear25-z Linear25-z-LR Linear35-x Linear35-z-Optic

“25mm Series” “35mm Series” Defined by size

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

Work Environment 1

25 × 25 × 19.6 mm 25 × 25 × 29.6 mm 35 × 35 × 10.5 mm 35 × 35 × 30 mm Dimensions 2

6 mm 16 mm 20 mm 8 mm Travel Range 3

300 g 300 g 2500 g 500 g Max. Load 4

3 N 3 N 3 N 5 N Dynamic Drive Force 5

Resistive sensor Position Sensor 6

6 mm 16 mm 20 mm 8 mm Sensor Range

150 nm Sensor Resolution

1 ～ 2 μm Sensor Repeatability

Max. 200 V Drive Voltage 7

sub-nanometer @ 2 K Fine Tune Resolution

@ 2 K* 8

~ 10 nm @ 300 K Step Size (min) @ 300 K* 9

Drive -4 pins

Sensor - 3 pins

Drive - 4 pins

Sensor - 3 pins

Drive - 2 pins

Sensor - 3 pins

Drive - 4 pins

Sensor - 3 pins

Pins Number 10

34g 62 g 54 g 118 g Weight 11

Fine Tune Resolution @2 K—Fine tune mode is a unique analog motion driven method, where piezo units are controlled

by analog voltage signal, instead of continuous high frequency wave sequence. Because the resolution of the analog

signal is very high, the stage can achieve sub-nano meter positioning accuracy.

Step Size (min) @300 K—The open loop minimum increamental step size that the stage can move when it's doing stick-slip

motion, driven by continuous high frequency wave sequence.

4Specifications subject to change without notice.

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 16 × 16 × 10.5 mm

2 Weight 10 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* sub - nm

11 Step Size (min) @300 K* ~ 10 nm

12 Travel range 3 mm

13 Max. Velocity @300 K ~ 2 mm/s

14 Max. Load 50 g

15 Dynamic force 1.5 N

16 Position encoder @2 K Resistive Sensor

17 Encoder range 3 mm

18 Sensor resolution ~ 150 nm

19 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • Miniature size

• Non-magnetic material

• 50g High load

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“16mm Series” — Linear16-x (closed-loop)

Smallest linear stage of x direction with 50g high load

16.00

16.00

11.50

11.50

4 × M1.6 Throughout

5.00

2.50

10.50

2 × 1.70 Throughout

11.50

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26 RE9

SHEET 1 OF 1

编号#

加工等级 版本

第三视角投影

比例

Linear16-X_web_2

王潇

16.00

16.00

11.50

11.50

4 × M1.6 Throughout

5.00

2.50

10.50

11.50

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

A3 正常打印尺寸

编号#

第三视角投影

比例

LZolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 16 × 16 × 16 mm

2 Weight 12 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 4 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* sub - nm

11 Step Size (min) @300 K* ~ 10 nm

12 Travel range 3 mm

13 Max. Velocity @300 K ~ 2 mm/s

14 Max. Load 250 g

15 Dynamic force 3 N

16 Position encoder Resistive Sensor

17 Encoder range 3 mm

18 Sensor resolution ~ 150 nm

19 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

➡ Features • Miniature size

• Non-magnetic material

• 250g high load

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“16mm Series” — Linear16-z (closed-loop)

Smallest linear stage of z direction with 250g super-high load

16.00

16.00

11.50

11.50

2 × M1.6 Throughout

2 × 2.60 Throughout

16.00

2 × 1.60 Throughout 11.50

2.25

9.00

3.20

2 × M1.6 3.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26 RE9

SHEET 1 OF 1

编号#

加工等级 版本

第三视角投影

比例

Linear16z-web

王潇

16.00

16.00

11.50

11.50

2 × M1.6 Throughout

2 × 2.60 Throughout

16.00

11.50

2.25

9.00

3.20

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26 编号#

第三视角投影

比例

Linear16z-web

王潇

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

7Specifications subject to change without notice.

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25.4 × 25.4 × 9.5 mm

2 Weight 24 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* sub - nm

11 Step Size (min) @300 K* ~ 10 nm

12 Travel range 6 mm

13 Max. Velocity @300 K ~ 3 mm/s

14 Max. Load 500 g

15 Dynamic force 2 N

16 Position encoder Resistive Sensor

17 Encoder range 6 mm

18 Sensor resolution ~ 150 nm

19 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

➡ Features • Compact design

• Non-magnetic material

• 500g high load

• Long travel range

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“25mm Series” — Linear25-x (closed-loop)

A stage with precise rails performs excellent linearity and high load

25.4

25.4

21.6

21.6

4 × M2 Throughout

4 × M1.6 Throughout 11

20

4 × M2 Throughout 11.5 11.5

9.5

21.6

21.6

3 × 2.1 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26 编号#

加工等级 版本

第三视角投影

比例

Linear25-x-web

王潇

25.4

25.4

21.6

21.6

4 × M2 Throughout

4 × M1.6 Throughout 11

20

4 × M2 Throughout 11.5 11.5

9.5

21.6

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

8

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 × 19.6 mm

2 Weight 34 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 4 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* sub - nm

11 Step Size (min) @300 K* ~ 10 nm

12 Travel range 6 mm

13 Max. Velocity @300 K ~ 2 mm/s

14 Max. Load 300 g

15 Dynamic force 3 N

16 Position encoder Resistive Sensor

17 Encoder range 6 mm

18 Sensor resolution ~ 150 nm

19 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

➡ Features • Compact design

• Non-magnetic material

• High load & force

• Long travel range

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“25mm Series” — Linear25-z (closed-loop)

A top-of-the-line solution for low cross-talk motion in X&Y direction 19.60

25.00

25.00

21.60

21.60

20.00

11.00

11.00 20.00

4 × M2 Throughout

8 × M2 Throughout

21.60

21.60

4 × 2.00 ThTHIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26

编号#

加工等级 第三视角投影

比例

Linear25-Z_web

王潇

19.60

25.00

25.00

21.60

21.60

20.00

11.00

11.00 20.00

4 × M2 Throughout

8 × M2 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 × 29.6 mm

2 Weight 62 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 4 pins , Sensor - 3 pins

10 Fine Tune Resolution @2 K* sub - nm

11 Step Size (min) @300 K* ~ 10 nm

12 Travel range 16 mm

13 Max. Velocity @300 K ~ 2 mm/s

14 Max. Load 300 g

15 Dynamic force 3 N

16 Position encoder Resistive Sensor

17 Encoder range 16 mm

18 Sensor resolution ~ 150 nm

19 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • Compact design

• Non-magnetic material

• High load & force

• 16mm travel range

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“25mm Series” — Linear25-z.LR (closed-loop)

Larger motion range with low cross-talk in X&Y direction 29.60

25.00

21.60

25.00 21.60

11.00

20.00

11.00 20.00

4 × M2 Throughout

8 × M2 Throughout

21.60

21.60

4 × 2.00 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26

编号#

加工等级 版本

第三视角投影

比例

Linear25-Z-LR-web

王潇

29.60

25.00

21.60

25.00 21.60

11.00

20.00

11.00 20.00

4 × M2 Throughout

8 × M2 Throughout

2160THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

A3 正常打印尺寸

编号第三视角投影

比例

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 × 10.5 mm

2 Weight 54 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* sub - nm

11 Step Size (min) @300 K* ~ 10 nm

12 Travel range 20 mm

13 Max. Velocity @300 K ~ 2 mm/s

14 Max. Load 2500 g

15 Dynamic force 3 N

16 Position encoder Resistive Sensor

17 Encoder range 20 mm

18 Sensor resolution ~ 150 nm

19 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

➡ Features • 20mm travel range

• 2500g high load

• Closed-loop control

• Non-magnetic material

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“35mm Series” — Linear35-x (closed-loop)

High-load linear stage with ultra-long travel range10.50 35.00

35.00

31.00

31.00 21.60

21.60

10 × M2 Throughout

31.00

31.00 4 × 2.10 ThrougTHIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26

S编号#

加工等级 版本

第三视角投影

比例

Linear35x-web

王潇

10.50

35.00

35.00

31.00

31.00 21.60

21.60

10 × M2 Throughout

31.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

A3 正常打印尺寸

编号#

第三视角投影

比例

LZolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 × 30 mm

2 Weight 118 g

3 Clear Aperture 10 mm

4 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

5 Option1 - 30 mK ✓ ✓

6 Option2 - 2e-11 mbar ✓ ✓

7 Mainbody Pure Ti BeCu Pure Ti BeCu

8 Wires Phosphor Bronze Twisted Paired Wires, 20cm

9 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

10 Pins number Drive - 4 pins, Sensor - 3 pins

11 Fine Tune Resolution @2 K* sub - nm

12 Step Size (min) @300 K* ~ 10 nm

13 Travel range 8 mm

14 Max. Velocity @300 K ~ 2 mm/s

15 Max. Load 500 g

16 Dynamic force 5 N

17 Position encoder Resistive Sensor

18 Encoder range 8 mm

19 Sensor resolution ~ 150 nm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • 10-mm aperture

• Non-magnetic material

• High load & force

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“35mm Series” — Linear35-z-Optic (closed-loop)

∅10-mm throughout aperture along motion axis.30.00 35.00

35.00

31.00

31.00 21.60

21.60

8× M2 Throughout

10.00 Throughout

31.00

31.00

4 × 2.00 贯穿

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/26

SHE编号#

加工等级 版本

第三视角投影

比例

Linear35z-web

王潇

30.00

35.00

35.00

31.00

31.00 21.60

21.60

8× M2 Throughout

10.00 Throughout

31.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

A3 正常打印尺寸

编号#

第三视角投影

比例

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6Specifications subject to change without notice.

“25mm Series” — Linear25-x (closed-loop)

Linear stage combines compact size with excellent motion performance

The 25mm size positioning stages are interconnected to a six-degree-of-freedom module

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

Overview of “Rotator series” piezoelectric motion unit

Low Temperature · Piezoelectric Motion - Rotator Series

Choose your suitable MultiFieldsⓇ “Rotator Series” product

Rotator16 Rotator25

Series defined by size “16mm Series” “25mm Series”

1 Work Environment

Default: 1.4 K ~ 400 K;1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

2 Dimensions Dia 16 × 15.6 mm 25 × 25 × 16.5 mm

3 Travel Range 360 ° endless

4 Max. Load 100 g 250 g

5 Dynamic Torque 0.4 Ncm 1.5 Ncm

6 Max. Velocity @300 K 10 °/s 3 °/s

7 Encoder Resistive Sensor

Sensor Range 270 ° 320 °

Sensor Resolution 10 m°

Sensor Repeatability 50 m°

8 Fine Tune Resolution @ 2 K* 5 μ° 4 μ°

9 Step Size (min) @ 300 K* 0.5 m° 0.4 m°

10 Pins Drive - 2 pins

Sensor - 3 pins

11 Main Body Default: Pure Ti

ULT: BeCu

12 Weight 10 g 28 g

Fine Tune Resolution @2 K—Fine tune mode is a unique analog motion driven method, where piezo units are controlled

by analog voltage signal, instead of continuous high frequency wave sequence. Because the resolution of the analog

signal is very high, the stage can achieve sub-nano meter positioning accuracy.

Step Size (min) @300 K—The open loop minimum increamental step size that the stage can move when it's doing stick-slip

motion, driven by continuous high frequency wave sequence.

13

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Rotator25-optic Rotator35-Optic

Piezoelectric Motion - LT Piezoelectric Motion - RT

“25mm Series” “35mm Series” Series defined by size

Default: 1.4 K ~ 400 K;1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

Work Environment 1

30 × 23 × 14.5 mm 35 × 35 × 16.5 mm Dimensions 2

360 ° endless Travel Range 3

250 g 500 g Max. Load 4

1.5 Ncm 2.5 Ncm Dynamic Torque 5

3 °/s 10 °/s Max. Velocity @300 K 6

Resistive Sensor Encoder 7

320 ° Sensor Range

10 m° Sensor Resolution

50 m° Sensor Repeatability

4 μ° 3 μ° Fine Tune Resolution @ 2 K* 8

0.4 m° 0.3 m° Step Size (min) @ 300 K* 9

Drive - 2 pins

Sensor - 3 pins

Pins 10

Default: Pure Ti

ULT: BeCu Main Body 11

24 g 45 g Weight 12

Fine Tune Resolution @2 K—Fine tune mode is a unique analog motion driven method, where piezo units are controlled

by analog voltage signal, instead of continuous high frequency wave sequence. Because the resolution of the analog

signal is very high, the stage can achieve sub-nano meter positioning accuracy.

Step Size (min) @300 K—The open loop minimum increamental step size that the stage can move when it's doing stick-slip

motion, driven by continuous high frequency wave sequence.

14

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight Dia 16 × 15.6 mm

2 Weight 10 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* 5 μ°

11 Step Size (min) @300 K* 0.5 m°

12 Travel range 360 ° endless

13 Max. Velocity @300 K ~ 10 °/s

14 Max. Load 100 g

15 Dynamic torque 0.4 Ncm

16 Position encoder Resistive Sensor

17 Encoder range 270 °

18 Sensor resolution 10 m°

19 Repeatibility ~ 50 m°

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • Miniature size

• 360 ° endless travel range

• Closed-loop control

• Non-magnetic material

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“16mm Series” — Rotator16 (closed-loop)

Smallest rotary stage with closed-loop control

15.60

8.50

10.50

4 × 1.80 Throughout

16.00 13.00

13.00

4 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 版本

第三视角投影

比例

Rotator16 V1.0_web

王潇

15.60

8.50

10.50

4 × 1.80 Throughout

16.00 13.00

13.00

4 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

RESHEET 1 OF 1

编号#

加工等级 版本

第三视角投影

比例

Rotator16 V1.0_web

王潇

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 × 14.5 mm

2 Weight 28 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* 4 μ°

11 Step Size (min) @300 K* 0.4 m°

12 Travel range 360 ° endless

13 Max. Velocity @300 K ~ 3 °/s

14 Max. Load 250 g

15 Dynamic torque 1.5 Ncm

16 Position encoder Resistive Sensor

17 Encoder range 320 °

18 Sensor resolution 10 m°

19 Repeatibility ~ 50 m°

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

➡ Features • Compact disign

• 360 ° endless travel range

• Closed-loop control

• Non-magnetic material

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“25mm Series” — Rotator25 (closed-loop)

High-performance rotary stage with closed-loop control 25.00

25.00

21.60

21.60

15.00

15.00

11.50

11.50

5 × M2 Throughout

3 × M1.6 Throughout

14.50

4 × 2.00 Throughout

21.60

21.60

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 第三视角投影

比例

Rotator25_web-2

王潇

25.00

25.00

21.60

21.60

15.00

15.00

11.50

11.50

5 × M2 Throughout

3 × M1.6 Throughout

14.50

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 30 × 23 × 14.5 mm

2 Clear aperture 6mm

3 Weight 24 g

4 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

5 Option1 - 30 mK ✓ ✓

6 Option2 - 2e-11 mbar ✓ ✓

7 Mainbody Pure Ti BeCu Pure Ti BeCu

8 Wires Phosphor Bronze Twisted Paired Wires, 20cm

9 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

10 Pins number Drive - 2 pins, Sensor - 3 pins

11 Fine Tune Resolution @2 K* 4 μ°

12 Step Size (min) @300 K* 0.4 m°

13 Travel range 360 ° endless

14 Max. Velocity @300 K ~ 3 °/s

15 Max. Load 250 g

16 Dynamic torque 1.5 Ncm

17 Position encoder Resistive Sensor

18 Encoder range 320 °

19 Sensor resolution 10 m°

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • Compact disign

• 6-mm aperture

• 360 ° endless travel range

• Vertical mounting

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“25mm Series” — Rotator25-Optic (closed-loop)

∅6-mm throughout aperture along rotation axis.14.00

13.00 2 × M2 Throughout

30.00 22.00

24.00

23.00

R3.00

11.50

15.00 3 × M2 Throughout

3 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

RE9

SHEET 1 OF 1

编号#

加工等级 版本

第三视角投影

比例

Rotator25.optic.web-2

王潇

14.00

13.00 2 × M2 Throughout

30.00 22.00

24.00

23.00

R3.00

11.50

15.00 3 × M2 Throughout

3 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

第三视角投影

比例

Rotator25.optic.web-2

王潇

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 × 16.5 mm

2 Clear aperture 6mm

3 Weight 45 g

4 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

5 Option1 - 30 mK ✓ ✓

6 Option2 - 2e-11 mbar ✓ ✓

7 Mainbody Pure Ti BeCu Pure Ti BeCu

8 Wires Phosphor Bronze Twisted Paired Wires, 20cm

9 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

10 Pins number Drive - 2 pins, Sensor - 3 pins

11 Fine Tune Resolution @2 K* 3 μ°

12 Step Size (min) @300 K* 0.3 m°

13 Travel range 360 ° endless

14 Max. Velocity @300 K ~ 10 °/s

15 Max. Load 500 g

16 Dynamic torque 2.5 Ncm

17 Position encoder Resistive Sensor

18 Encoder range 320 °

19 Sensor resolution 10 m°

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

➡ Features • Compact disign

• 6-mm aperture

• 360 ° endless travel range

• High load & high torque

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“35mm Series” — Rotator35-Optic (closed-loop)

High-performance rotary stage with ∅6-mm throughout aperture

35.00

35.00 31.00

31.00

21.60

21.60

11.00

20.00

11.50

11.50

8 × M2 Throughout

4 × M1.6 Throughout

R3.00

16.00

31.00

31.00

4 × 2.10 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 版本

第三视角投影

比例

Rotator35 - Web

王潇

35.00

35.00 31.00

31.00

21.60

21.60

11.00

20.00

11.50

11.50

8 × M2 Throughout

4 × M1.6 Throughout

R3.00

16.00

31.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

A3 正常打印尺寸

编号#

第三视角投影

比例

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

5Specifications subject to change without notice.

Overview of “Goniometer series” piezoelectric motion unit

Low Temperature Piezoelectric Motion - Goniometer Series

Choose your suitable MultiFieldsⓇ “Goniometer Series” product

Goniometer25-theta Goniometer25-phi

Series defined by size “25mm Series”

1 Work Environment

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

2 Dimensions 25 × 25 × 12.5 mm 25 × 25 × 12.5 mm

3 Rotation Center To Top Plate 41 mm 53.5 mm

4 Travel Range 6.6 ° 6 °

5 Max. Load 200 g 200 g

6 Dynamic Force 2.2 N 2.2 N

7 Encoder Resistive Sensor

Sensor Range 6.6 ° 6 °

Sensor Resolution 0.2 m°

8 Fine Tune Resolution @ 2 K* 0.5 μ°

9 Step Size (min) @300 K* 50 μ°

10 Pins Driven - 2 pins; Sensor - 3 pins

11 Main Body Default: Pure Ti; ULT: BeCu

12 Weight 28 g 28 g

Fine Tune Resolution @2 K—Fine tune mode is a unique analog motion driven method, where piezo units are controlled

by analog voltage signal, instead of continuous high frequency wave sequence. Because the resolution of the analog

signal is very high, the stage can achieve sub-nano meter positioning accuracy.

Step Size (min) @300 K—The open loop minimum increamental step size that the stage can move when it's doing stick-slip

motion, driven by continuous high frequency wave sequence.

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6Specifications subject to change without notice.

Goniometer35-theta Goniometer35-phi

“35mm Series” Series defined by size

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

Work Environment 1

35 × 35 × 16 mm 35 × 35 × 16 mm Dimensions 2

50 mm 66 mm Rotation Center To Top Plate 3

12 ° 10 ° Travel Range 4

500 g 500 g Max. Load 5

3 N 3 N Dynamic Force 6

Resistive Sensor Encoder 7

12 ° 10 ° Sensor Range

0.5 m° Sensor Resolution

0.5 μ° Fine Tune Resolution @ 2 K* 8

50 μ° Step Size (min) @300 K* 9

Driven - 2 pins; Sensor - 3 pins Pins 10

Default: Pure Ti; ULT: BeCu Main Body 11

70 g 70 g Weight 12

Fine Tune Resolution @2 K—Fine tune mode is a unique analog motion driven method, where piezo units are controlled

by analog voltage signal, instead of continuous high frequency wave sequence. Because the resolution of the analog

signal is very high, the stage can achieve sub-nano meter positioning accuracy.

Step Size (min) @300 K—The open loop minimum increamental step size that the stage can move when it's doing stick-slip

motion, driven by continuous high frequency wave sequence.

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 × 12.5 mm

2 Weight 28 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* 0.5 μ°

11 Step Size (min) @300 K* 50 μ°

12 Travel range ~ 6.6 °

13 Max. Velocity @300 K ~ 1 °/s

14 Max. Load 200 g

15 Dynamic force 2.2 N

16 Rotation center to top plate 41 mm

17 Position encoder Resistive Sensor

18 Encoder range 6.6 °

19 Sensor resolution 0.2 m°

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • Compact design

• Long travel range

• Common pivot with

Goniometer25-phi for stacking

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“25mm Series” — Goniometer25-theta (closed-loop)

Goniometer stage with closed-loop control

12.50

25.00

25.00

21.60

21.60 11.00 20.00

20.00

11.00

11.50

11.50

4 × M2 Throughout

8 × M2 Throughout

4 × M1.6 Throughout

21.60

21.60

4 × 2.10 ThrougTHIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 版本

第三视角投影

比例

Goniometer25-theta_EndUser

王潇

12.50

25.00

25.00

21.60

21.60 11.00 20.00

20.00

11.00

11.50

11.50

4 × M2 Throughout

8 × M2 Throughout

4 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 × 12.5 mm

2 Weight 28 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* 0.5 μ°

11 Step Size (min) @300 K* 50 μ°

12 Travel range ~ 6 °

13 Max. Velocity @300 K ~ 1 °/s

14 Max. Load 200 g

15 Dynamic force 2.2 N

16 Rotation center to top plate 53.5 mm

17 Position encoder Resistive Sensor

18 Encoder range 6 °

19 Sensor resolution 0.2 m°

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

“25mm Series” — Goniometer25-phi (closed-loop)

Goniometer stage with closed-loop control

12.50

25.00

25.00

21.60

21.60 11.00 20.00

20.00

11.00

11.50

11.50

4 × M2 Throughout

8 × M2 Throughout

4 × M1.6 Throughout

2160THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

12.50

25.00

25.00

21.60

21.60 11.00 20.00

20.00

11.00

11.50

11.50

4 × M2 Throughout

8 × M2 Throughout

4 × M1.6 Throughout

21.60

21.60

4 × 2.10 TTHIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 版本

第三视角投影

比例

Goniometer25-phi_EndUser

王潇

➡ Features • Compact design

• Long travel range

• Common pivot with

Goniometer25-theta for stacking

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 × 16 mm

2 Weight 70 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Driven - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* 0.5 μ°

11 Step Size (min) @300 K* 50 μ°

12 Travel range ~ 12 °

13 Max. Velocity @300 K ~ 1 °/s

14 Max. Load 500 g

15 Dynamic force 3 N

16 Rotation center to top plate 50 mm

17 Position encoder Resistive Sensor

18 Encoder range 12 °

19 Sensor resolution 0.5 m°

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

“35mm Series” — Goniometer35-theta (closed-loop)

Goniometer stage with closed-loop control

16.00

35.00

35.00 31.00

31.00

11.50 21.60

21.60

11.50

8 × M2 Throughout

4 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

➡ Features • High load

• Long travel range

• Common pivot with

Goniometer35-phi for stacking

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

16.00

35.00

35.00 31.00

31.00

11.50 21.60

21.60

11.50

8 × M2 Throughout

4 × M1.6 Throughout

35.00

35.00

4 × 2.20 THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 版本

第三视角投影

比例

Goniometer35-theta_web

王潇

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 × 16 mm

2 Weight 70 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Driven - 2 pins, Sensor - 3 pins

10 Fine Tune Resolution @2 K* 0.5 μ°

11 Step Size (min) @300 K* 50 μ°

12 Travel range ~ 10 °

13 Max. Velocity @300 K ~ 1 °/s

14 Max. Load 500 g

15 Dynamic force 3 N

16 Rotation center to top plate 66 mm

17 Position encoder Resistive Sensor

18 Encoder range 12 °

19 Sensor resolution 0.5 m°

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

“35mm Series” — Goniometer35-phi (closed-loop)

Goniometer stage with closed-loop control

16.00

35.00

35.00

31.00

31.00 21.60

21.60

11.50

11.50

8 × M2 Throughout

4 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

➡ Features • High load

• Long travel range

• Common pivot with

Goniometer35-theta for stacking

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

16.00

35.00

35.00

31.00

31.00 21.60

21.60

11.50

11.50

8 × M2 Throughout

4 × M1.6 Throughout

31.00

31.00

4 × 2.2THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 版本

第三视角投影

比例

Goniometer35-phi_web

王潇

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

5

Overview of “LS-Linear Series” Piezoelectric Motion Unit

Low Temperature Piezoelectric Motion - Scanner Series

Choose your suitable MultiFieldsⓇ “LS-linear Series” product

LS-Linear30 LS-Linear50 LS-Linear75

Series defined by size

1 Work Environment

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

2 Motion Axies X Axis

3 Dimensions 60 × 32 × 19.5 mm 90 × 32 × 19.5 mm 135 × 32 × 19.5 mm

4 Travel Range 30 mm 50 mm 75 mm

5 Max. Load 0.75 kg 1.5 kg

6 Positioner Sensor Resistive sensor

Sensor Range 30 mm 50 mm 75 mm

Sensor Resolution 150 nm

Sensor

Repeatability 1 ～ 2 μm

7 Drive Voltage Max.200 V

8 Pins Drive - 2 pins, Sensor - 3 pins

9 Main Body Default: Pure Ti; ULT: BeCu

10 Weight 120 g 150 g 200 g

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

LS-Linear100 LS-Linear200

Series defined by size

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

Work Environment 1

X Axis Motion Axies 2

180 × 32 × 19.5 mm 320 × 32 × 19.5 mm Dimensions 3

100 mm 200 mm Travel Range 4

1.5 kg 2 kg Max. Load 5

Resistive sensor Positioner Sensor 6

100 mm 200 mm Sensor Range

150 nm Sensor Resolution

1 ～ 2 μm Sensor

Repeatability

Max.200 V Drive Voltage 7

Drive - 2 pins, Sensor - 3 pins Pins 8

Default: Pure Ti; ULT: BeCu Main Body 9

300 g 600 g Weight 10

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 60 × 32 × 19.5 mm

2 Weight 120 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Travel range 30 mm

11 Max. Velocity @300 K ~ 3 mm/s

12 Drive voltage Max. 200 V

13 Max. Load 750 g

14 Dynamic force 3 N

15 Position encoder Resistive Sensor

16 Encoder range 30 mm

17 Sensor resolution ~ 150 nm

18 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • High load & force

• 30 mm travel range

• Non-magnetic material

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“LS-Linear Series” — LS-Linear30 (closed-loop)

Linear motion stage with long travel range of 30 mm at cryogenic temperature

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 90 × 32 × 19.5 mm

2 Weight 150 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Travel range 50 mm

11 Max. Velocity @300 K ~ 3 mm/s

12 Drive voltage Max. 200 V

13 Max. Load 750 g

14 Dynamic force 3 N

15 Position encoder Resistive Sensor

16 Encoder range 50 mm

17 Sensor resolution ~ 150 nm

18 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

“LS-Linear Series” — LS-Linear50 (closed-loop)

Linear motion stage with long travel range of 50 mm at cryogenic temperature

➡ Features • High load & force

• 50 mm travel range

• Non-magnetic material

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 135 × 32 × 19.5 mm

2 Weight 200 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Travel range 75 mm

11 Max. Velocity @300 K ~ 3 mm/s

12 Drive voltage Max. 200 V

13 Max. Load 1000 g

14 Dynamic force 3 N

15 Position encoder Resistive Sensor

16 Encoder range 75 mm

17 Sensor resolution ~ 150 nm

18 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

“LS-Linear Series” — LS-Linear75 (closed-loop)

Linear motion stage with long travel range of 75 mm at cryogenic temperature

➡ Features • High load & force

• 75 mm travel range

• Non-magnetic material

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 180 × 32 × 19.5 mm

2 Weight 300 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Travel range 100 mm

11 Max. Velocity @300 K ~ 3 mm/s

12 Drive voltage Max. 200 V

13 Max. Load 1000 g

14 Dynamic force 3 N

15 Position encoder Resistive Sensor

16 Encoder range 100 mm

17 Sensor resolution ~ 150 nm

18 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

“LS-Linear Series” — LS-Linear100 (closed-loop)

Linear motion stage with long travel range of 100 mm at cryogenic temperature

➡ Features • High load & force

• 100 mm travel range

• Non-magnetic material

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 320 × 32 × 19.5 mm

2 Weight 600 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number Drive - 2 pins, Sensor - 3 pins

10 Travel range 200 mm

11 Max. Velocity @300 K ~ 3 mm/s

12 Drive voltage Max. 200 V

13 Max. Load 1500 g

14 Dynamic force 3 N

15 Position encoder Resistive Sensor

16 Encoder range 320 mm

17 Sensor resolution ~ 150 nm

18 Repeatibility 1 - 2 μm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

“LS-Linear Series” — LS-Linear200 (closed-loop)

Linear motion stage with long travel range of 100 mm at cryogenic temperature

➡ Features • High load & force

• 200 mm travel range

• Non-magnetic material

• Closed-loop control

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6Specifications subject to change without notice.

Working principle

How piezo positioning stages ＆ position sensors work

The Multifields® piezo positioning stage works on the ”stick-slip” mode. The mover of the stage is

pushed forward by the deformation of piezoelectric ceramics. When the piezoelectric ceramic is slowly

deformed, the stage follows the piezoelectric ceramic to move. When piezoelectric ceramics deform

rapidly, the stage remains stationary due to its inertia. Using the ”slow-fast” periodic action of

piezoelectric ceramics, the stage can be driven to achieve a continuous ”stick-slip” step movement, and

the process in one cycle is shown in Figure 1

Mover

Mover

Mover

Piezo

Initial position

“stick” phase

Piezo deform slowly, push the mover forward

“slip”phase

Piezo deform rapidly, mover keep static

The principle of the resistive position sensor is similar to that of a sliding rheostat. A brush is connected

on the moving platform of the stage, so that the brush contacts the resistance strip. one end of the

resistance strip is grounded, and the other end is applied with a fixed voltage of 2.5V.

Note: Voltage measurement is used in cryogenic piezo positioning stage controllers instead of

resistance measurement, so the changes in resistance of the stripe due to temperature variation do not

affect the final output of the sensor.

resistance strip

2.5 V 0 V

Brush

Voltage output

How piezo positioning stages work

How position sensors work

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

5Specifications subject to change without notice.

Overview of “Scanner Series” Piezoelectric Motion Unit

Low Temperature Piezoelectric Motion - Scanner Series

Choose your suitable MultiFieldsⓇ “Scanner Series” product

Scanner16-xy Scanner16-z Scanner25-xy

Series defined by size “16mm Series” “25mm Series”

1 Work Environment

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

2 Scanning Axies X, Y Z X, Y

3 Dimensions 16 × 16 × 9 mm 16 × 16 × 6 mm 25 × 25 × 13.5 mm

4 Travel Range 30 × 30 μm 30 μm 55 × 55um

5 Max. Load 100 g 100 g 200 g

6 Repeatability < 10 nm

7 Drive Voltage Max. 75 V @300K；Max. 180 V @4K

8 Resolution 0.5 nm 0.5 nm 0.8 nm

9 Pins 4 pins 2 pins 4 pins

10 Main Body Default: Pure Ti; ULT: BeCu

11 Weight 8 g 7g 23 g

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6Specifications subject to change without notice.

Scanner25-z Scanner35-xy-Optic Scanner35-z-Optic

“25mm Series” “35mm Series” Series defined by size

Default: 1.4 K ~ 400 K; 1e-7 mbar; 35 Tesla

Option1 - .ULT, lowest use temperature 30 mK;

Option2 - .UHV, highest vacuum environment 2E-11 mbar;

Work Environment 1

Z X, Y Z Scanning Axies 2

25 × 25 × 12 mm 35 × 35 × 14.5 mm 35 × 35 × 14.5 mm Dimensions 3

55 μm 100 × 100 μm 100 μm Travel Range 4

200 g 500 g 500 g Max. Load 5

< 10 nm Repeatability 6

Max. 75 V @300K；Max. 180 V @4K Drive Voltage 7

0.8 nm 2 nm 2 nm Resolution 8

2 pins 4 pins 2 pins Pins 9

Default: Pure Ti; ULT: BeCu Main Body 10

20 g 65 g 65 g Weight 11

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 16 × 16 × 7 mm

2 Weight 8 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number 2 pins for each axis

10 Scanning Axies X, Y

11 Travel range @300 K 30 × 30 μm

12 Drive voltage Max. 75 V @300 K, Max. 180 V @4 K

13 Max. Load 100 g

14 Capacitance @300 K 1 uF

15 Resolution 0.5 nm

16 Repeatability < 10 nm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

➡ Features • Miniature size

• Sub-nm resolution

• 30 × 30 um travel range

at room temperature

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

“16mm Series” — Scanner16-xy

Smallest scanning stage of x & y direction

16.00

16.00

11.50

11.50

5.50

2.25 8.00

2.25

3 × M1.6 Throughout

1.60 Throughout

1.60 Throughout

7.00 3.50

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

RE9

SHEET 1 OF 1

编号#

加工等级 版本

第三视角投影

比例

Scanner16_xy_web-2

王潇

16.00

16.00

11.50

11.50

5.50

2.25 8.00

2.25

3 × M1.6 Throughout

1.60 Throughout

1.60 Throughout

7.00 3.50

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图A3 正常打印尺寸

2025/2/27

编号#

第三视角投影

比例

Scanner16_xy_web-2

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 16 × 16 × 6 mm

2 Weight 7g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number 2 pins

10 Scanning Axies Z

11 Travel range @300 K 30 μm

12 Drive voltage Max. 75 V @300 K, Max. 180 V @4 K

13 Max. Load 100 g

14 Capacitance @300 K 0.8 uF

15 Resolution 0.5 nm

16 Repeatability < 10 nm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

“16mm Series” — Scanner16-z

Smallest scanning stage of Z direction

➡ Features • Miniature size

• Sub-nm resolution

• 30 um travel range at

room temperature

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

16.00

6.00

16.00

1.50 2.25

8.00

5.50

11.50

8.00

5.50

2 × 1.60 Throughout

2 × 2.80 1.50

2 × M2 Throughout

6.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 第三视角投影

比例

Scanner16-z_web

王潇

16.00

6.00

16.00

1.50 2.25

8.00

5.50

11.50

8.00

5.50

2 × 1.60 Throughout

2 × 2.80 1.50

2 × M2 Throughout

6.00

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独mm

默认尺寸单位A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 × 10 mm

2 Weight 23 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number 2 pins for each axis

10 Scanning Axies X, Y

11 Travel range @300 K 55 × 55 μm

12 Drive voltage Max. 75 V @300 K, Max. 180 V @4 K

13 Max. Load 200 g

14 Capacitance @300 K 4 uF

15 Resolution 0.8 nm

16 Repeatability < 10 nm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

“25mm Series” — Scanner25-xy

High-load scanning stage of x & y direction with long travel range

➡ Features • Compact design

• Sub-nm resolution

• 55 × 55 um travel range

at room temperature

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

10.00

25.00

25.00

21.60

21.60 20.00

11.00

20.00

11.00

6.00

2.00 Throughout

2.00 Throughout

10 × M2 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/2/27

编号#

加工等级 版本

第三视角投影

比例

Scanner25_xy_web

王潇

10.00

25.00

25.00

21.60

21.60 20.00

11.00

20.00

11.00

6.00

2.00 Throughout

2.00 Throughout

10 × M2 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

A3 正常打印尺寸

编号第三视角投影

比例

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT

6

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 25 × 25 × 8.5 mm

2 Weight 20 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number 2 pins

10 Scanning Axies Z

11 Travel range @300 K 55 μm

12 Drive voltage Max. 75 V @300 K, Max. 180 V @4 K

13 Max. Load 200 g

14 Capacitance @300 K 4.2 uF

15 Resolution 0.8 nm

16 Repeatability < 10 nm

For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

“25mm Series” — Scanner25-z

High-load scanning stage of Z direction with long travel range

➡ Features • Compact design

• Sub-nm resolution

• 55 um travel range at

room temperature

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

8.50

25.00

25.00

21.60

21.60 11.50

11.50

13.00

13.00

2.50

11.00

2 × 2.10 Throughout

8 × M2 Throughout

4 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/3/1

编号#

加工等级 版本

第三视角投影

比例

Scanner25_z_web

王潇

8.50

25.00

25.00

21.60

21.60 11.50

11.50

13.00

13.00

2.50

11.00

2 × 2.10 Throughout

8 × M2 Throughout

4 × M1.6 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称A3 正常打印尺寸

编第三视角投影

比例Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specifications

Optional Versions ⇨ .HV (default) .ULT .UHV .ULT.UHV

.HV version, compatible with 1E-7 mbar

.ULT version, used at He3 or dilution cryogenics systems

.UHV version, compatible with 2E-11 mbar

1 Footprint × hight 35 × 35 × 14.5 mm

2 Weight 65 g

3 Work environment Temperature range: 1.4 ~ 400 K, Max. Magnetic field: 35 Tesla

4 Option1 - 30 mK ✓ ✓

5 Option2 - 2e-11 mbar ✓ ✓

6 Mainbody Pure Ti BeCu Pure Ti BeCu

7 Wires Phosphor Bronze Twisted Paired Wires, 20cm

8 Pin materials Polyster (glass fiber filled), BeCu Peek, BeCu

9 Pins number 2 pins for each axis

10 Scanning Axies X, Y

11 Travel range @300 K 100 × 100 μm

12 Drive voltage Max. 75 V @300 K, Max. 180 V @4 K

13 Max. Load 500 g

14 Capacitance @300 K 8 uF

15 Resolution 2 nm

16 Repeatability < 10 nm

For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT

5Specifications subject to change without notice.

“35mm Series” — Scanner35-xy-Optic

High-performance scanning stage of x & y direction with long travel range

➡ Features • Compact design

• Sub-nm resolution

• 100 × 100 um travel range

at room temperature

• Ultra-high vacuum & low

temperature compatible

➡ Picture & dimensions

14.50

35.00

35.00

31.00

31.00 21.60

21.60 3.00 8.50 14.00

12× M2 Throughout

2 × 2.50 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标出

mm

默认尺寸单位

名称

日期 制图人

A3 正常打印尺寸

2025/3/1

编号#

加工等级 版第三视角投影

比例

Scanner35xy_web

王潇

14.50

35.00

35.00

31.00

31.00 21.60

21.60 3.00 8.50 14.00

12× M2 Throughout

2 × 2.50 Throughout

THIS DRAWING BELONGS TO MULTI-FIELD TECHNOLOGIES

AND IS ISSUED ON CONDITION THAT IT IS NOT COPIED,

REPRINTED OR DISCLOSED EITHER WHOLLY OR IN PART TO

A THIRD PARTY WITHOUT PRIOR CONSENT IN WRITING FROM：

Multi-Field Technologies

禁止通过测量图纸来

确定未标识的尺寸,

只能询问负责人

去掉所有锋利的毛刺

和边角

默认位置公差，

如有例外单独标出

X ± 0.1 mm

X.X ± 0.05 mm

角度 ± 0°15'

表面光洁度

1.6

如有例外，单独标mm

默认尺寸单位

A3 正常打印尺寸

第三视角投影

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn