2013

事业部成立

Establishment of

business division

真空事业部正式成

立，启动基础技术

研究

The Vacuum

Division was

officially

established and

initiated basic

technology

research

2015

设计研发

Design and research

完成变径变距螺杆

转子的设计与定型

Complete the

design and shaping

of variable

diameter and

variable pitch

screw rotors

2018

正式成立

Formally established

久铮技术成立,开始

独立运营

JUZTECH Was

established and

operation

independently

2019

第一代产品

First-generation

product

完成第一代工业级

产品批量生产

Complete the

mass production

of thef irst

generation of

industrial-grade

products

2021

市场开拓

Market development

规模化发展

Large-scale development

进军光伏行业，产品首次亮

相SNEC展会即斩获头部企

业大单

累计客户达100+

In 2020, the company

entered the photovoltaic

sector, securing major

orders from industry

leaders during its first

appearance at the SNEC

exhibition.

Accumulated

customers reached

100+

2023

成为光伏行业真空

设备的头部供应商

全面开启国际化战

略，产品规模进入

海外市场

To become the

leading supplier of

vacuum equipment

in the photovoltaic

industry

Fully open the

internation alization

strategy, product

scale into overseas

markets

2025

成为光伏行业真空

设备的领先供应商

规模导入半导体/锂

电行业

医药化工行业小规

模应用

Become a leading

supplier of vacuum

equipment in the

photovoltaic industry

Scale up to enter the

semiconductor/lithium battery industry

Small-scale application in the pharmaceutical and chemical

industries

2026

设备节能设计与绿色制造，

呼应全球碳中和目标

成为半导体/锂电行业头部供

应商

医药化工行业规模应用

Equipment

energy-saving design

and green manufacturing align with the

global goal of carbon

neutrality.

Become a leading

supplier in the

semiconductor/lithium battery industry

Application in the

pharmaceutical and

chemical industry

2027

全球市场销售额超过5亿

启动IPO上市

成为亚太区头部品牌

Global market sales

exceed 500 million.

Launch an IPO listing

Become a leading

brand in the

Asia-Pacific region

SV系列干式等径变距螺杆单泵机组

SV SERIES-EQUAL DIAMETER VARIABLE PITCH SINGLE DRY SCREW PUMP SET

SVR/SVH系列干式等径变距螺杆真空泵机组

SVR/SVH SERIES-EQUAL DIAMETER VARIABLE PITCH DRY SCREW VACUUM PUMP SET

常规干式螺杆真空泵的单泵机组;适合中小工艺腔直接抽真空的应用，包括锂电新能源、制药&化工、钢铁冶炼等。抽速：

80~2500m3/h；极限压力：1Pa abs.。

SVR/H系列采用罗茨泵+干式螺杆真空泵的多段抽空机组，常见2段、3段式真空泵；应用适应性广，节能、粉尘和液体处理

能力强。适用于常规抽空、拉晶、锂电新能源及部分ALD等应用。抽速：600~7200m3/h；极限压力：≤0.1Pa abs.。

Single-pump units of conventional dry screw vacuum pumps; It is suitable for direct vacuuming of small and medium-sized

process chambers, including lithium battery new energy, pharmaceuticals & chemicals, steel smelting, etc. Pumping

speed:80-2500 m3/h Ultimate pressure: ≤1 Pa abs.

The SVR/H series adopts multi-stage vacuum pumping units with Roots pumps and dry screw vacuum pumps.Commonly,two-stage and three-stage vacuum pumps are used.It has wide application adaptability, is energy-sav-ing, and has strong

capabilities in handlling dust and liquids. It is applicable to conventional vacuuming, crystalpulling, lithium battery new energy

and some ALD applications. Pumping speed: 600-7200m3/Ih Uitimatepressure:≤0.1 Pa abs.

SFR系列干式增强螺杆真空泵机组

SFR SERIES ENHANCED DRY SCREW VACUUM PUMP SET

采用罗茨泵+增强型干式螺杆真空泵的机组;干泵处理粉尘能力较强，且热稳定性高、更加节能，适合CVD、ALD等工艺腔工

艺的应用。抽速：600~5400 m3/h；极限压力：≤0.1 Pa abs.。

The unit adopting Roots pump + enhanced dry screw vacuum pump; Dry pumps have a strong ability to handledust, high thermal

stability and are more energy-efficient, making them suitable for applications in processchambers such as CVD and ALD.

Pumping speed: 600-5400 m 3 /h Ultimate pressure: ≤0.1 Pa abs.

SCR系列干式复合爪式真空泵机组

SCR SERIES COMPOSITE CLAW DRY VACUUM PUMP SET

采用罗茨泵+干式复合爪型真空泵的机组；具有较强的处理粉尘异物能力，适合CVD等应用。抽速：600~5400m3/h；极限

压力：≤0.1 Pa abs.。

The unit adopting Roots pump + dry composite claw vacuum pump; It has a strong ability to handle dust and foreign objects and

is suitable for applications such as CVD. Pumping speed: 600-5400 m 3 /h Ultimate pressure：≤0.1 Pa abs.

SMR系列干式多级罗茨真空泵机组

SMR SERIES MULTI STAGE ROOTS DRY VACUUM PUMP SET

采用罗茨泵+多级罗茨干泵的机组;能耗小、过程温度可控、噪音低，适合实验室、镀膜、半导体等应用。抽速

:600~5400m3/h；极限压力:≤0.1Pa abs.。

A unit using Roots pumps and multi-stage Roots dry pumps; It features low energy consumption, controllableprocess temperature

and low noise, making it suitable for applications in laboratories, coating, serniconductors,etc.Pumping speed: 600-5400 m 3/h

Ultimate pressure:≤0.1 Pa abs.

JSD系列干式双电机螺杆真空泵机组

JSD SERIES DUAL MOTOR DRY SCREW VACUUM PUMP SET

立式双电机直驱无油螺杆真空泵机组;采用立式结构，粉尘和液体通过性好；双转子直驱控制，去齿轮100%无油;转子

轴心冷却，过程温度可控。适用于航空航天、制药&化工、实验室等应用。抽速：170~1400m3/h；极限压力：≤1Pa

abs.。

Vertical dual-motor direct drive oil-free screw vacuum pump unit It adopts a vertical structure, with goodpermeability of

dust and liquid. Double rotor direct drive control,100% oi-free without gears; Rotor shaft centercooling, with controllable

process temperature. It is suitable for applications in aerospace, pharmaceuticals &chemicals, laboratories, etc. Pumping

speed: 170-1400 m 3/h Ultimate pressure：≤1 Pa abs.

SXH系列干式变径变距螺杆真空泵机组

SXH SERIES VARIABLE DIAMETER VARIABLE PITCH DRY SCREW VACUUM PUMP SET

采用罗茨泵+变径变距的干式螺杆真空泵的多段抽空机组，常见单泵、2段式、3段式机组;更加节能、低噪和低排气温度，

适用于锂电新能源、制药&化工、光伏、半导体等应用。抽速:1200-7200m3/h;极限压力:≤0.1Pa abs.。

Multi-stage vacuum pumping units that adopt Roots pumps and dry screw vacuum pumps with variable diameterand variable

pitch are commonly single-purp, two-stage and three-stage units. It is more energy-efficient.quieter and has a lower exhaust

temperature, making it suitable for applications in lithium battery new energy,pharmaceuticals & chemicals, photovoltaics,

semiconductors, etc. Pumping speed: 1200-7200m3/h Ultimatepressure: ≤0.1 Pa abs.

SX系列干式变径变距螺杆单泵机组

SX SERIES VARIABLE DIAMETER VARIABLE PITCH SINGLE DRY SCREW PUMP SET

采用变径变距的干式螺杆真空泵的单泵机组，更加节能、低噪和低排气温度，适用于锂电新能源、制药&化工、光伏、半

导体等应用。抽速:160-800m3/h;极限压力:≤1Pa abs.。

The single-pump unit with a dry screw vacuum pump featuring variable diameter and variable distance is moreenergy-efficient,

quieter and has a lower exhaust temperature. It is suitable for applications in lithium batterynew energy, pharmaceuticals &

chemicals, photovoltaics, semiconductors,etc. Pumping speed: 160-800m3/h Ultimnate pressure: ≤1 Pa abs.

JA小型风冷螺杆泵机组系列

COMPACT AIR-COOLED SCREW VACUUM PUMP SET

采用纯风冷设计，无需冷却水，静音节能，体积更小，安装方便，适用于半导体、锂电新能源、食品、科研实验等应用。

抽速：8-80m³/h；极限压力：≤1Pa abs。

It adopts a pure air-cooled design, requiring no cooling water, and is quiet, energy-efficient, compact in size, and easy to install.

It is suitable for applications in semiconductors, lithium battery new energy, food, scientific research, and laboratories,etc.Pumping speed:8-80m³/h；Ultimate pressure：≤1Pa abs.

UJM系列超高真空复合分子泵

UJM SERIES ULTRA HIGH VACUUM

COMPOSITEMOLECULAR PUMP

UCM系列磁悬浮复合分子泵

UCM SERIES MAGNETIC LEVITATION

COMPOSITE MOLECULAR PUMP

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JA小型风冷螺杆泵机组系列

半导体

SEMICONDUCTOR

锂电新能源

LITHIUM NEW

ENERGY

食品 科研实验

FOOD INDUSTRY RESEARCH

EXPERIMENT

纯风冷设计，无需冷却水

体积小、安装方便、静音节能

风冷电机

噪音

Air-cooled motor

Noise

最大泄漏率

Maximum leakage rate

室温操作范围

Room temperature operating range

8

8

20

20

30

30

40

40

60

60

80

80

≤7.5×10-3

≤1×10-2

≤1

≤2.25×10-2

≤3×10-2

≤3

50

220~380

KF25

KF16

KF40

KF25 KF40

1.1 1.1 1.1 1.5 1.5 2.2

1.5~2

30~40

4~10

6mm快插

≤65 ≤72

1×10-6

5~40

COMPACT AIR-COOLED SCREW VACUUM PUMP SET

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针对您应用的定制解决方案

CUSTOMIZED SOLUTIONS FOR YOUR APPLICATIONS

进气口和排气口可选附件

GAS INLET AND EXHAUST OPTIONAL ACCESSORIES

前级转接管可以安装仪表

The front adapter can be installed with instruments

采用聚酯或不锈钢滤网的进气过滤器

Inlet filter with polyester or stalnless steel soreen

排气单向阀

One-way exhaust valve

定制化进/排气法兰

Customlzed inlet/outlet flange

可清洗可冷却的排气消音器

Washable and coolable exhaust silencer

定制气液分离器

Customized gas-liquid separation solution

控制与监控附件

CONTROL AND MONITORING ACCESSORIE

便携式设备显示终端

Portable pump display terminal

水/氮气流量监控附件包

Water/nitrogen flow monitoring accessory package

可视压力变送器和温度变送器

Visual pressure gauge and temperature gauge

Modbus协议/数字接口模块

Modbus protocol/digital interface module

压力和温度传感器

Pressure and temperature sensor

可调阀控系统

Adjustable valve control system

如需了解真空定制系统详细建议和可行性,

请联系久铮技术并向销售工程师咨询。

For detalled suggestionsand feasibility of the vacuum customized system,

please contact Juztech professlonal engineer and expert.