Product Feature

·Flow thru design free of deadlegs or unswept zones
·316L secondary remelt
·Vacuum to 3,500 psig (241 bar)

TechnicalData

Dimensions (mm)

Ordering Information

| Product Feature

·Flow switch for high flow
·Available with horizontal orvertical main line
·Minimal pressure drop through device
·SS 316L material

TechnicalData

| Dimensions (mm)

IOrdering Information

VEFS2-S -H-FV8-MV8-225-P
Material ProcessSpecification
S: 316L SS P:VS001A Flow \*For details,please refer to theappendix.
Position N2 at 100 psig
H:Horizontal 1/2"-
V:Vertical 225:225 slpm 350:350 slpm
Inlet/Outlet 500:500 slpm B FV8: 1/2"VFS(F) 950: 950 sipm Horizontal Vertical TW8:1/2"tube weld 1100:1100 slpm
FV12:3/4"VFS(F) 1650:1650 slpm ！The flow rate specified in the standard is measure
Tw12:34y5ewed 20002000m "pg with nitrogen at an inlet pressure of 100 psig and a 2 0 ^ { \circ } \mathsf { C } letpressureof100 psig ai oi 4000:4000 slpm Please refer to Page117 for the conversion!

Conversion Formula

The test flow rate under standard specifications is the value of nitrogenatan inlet pressure of 100 psig and 2 0 ^ { \circ } \mathsf { C } . If deviating fromstandard operating conditions,conversion to theactual working flow rate isrequired.

1.Pressure Conversion Factor: \mathsf { F p } { = } sqrt { ( \mathsf { O P } / 1 1 4 . 7 ) } OP:Operating Pressure (Absolute Pressure) psia
2.Gas Conversion Factor: \mathsf { F } \mathsf { g } = sqrt { ( 2 8 / \mathsf { M } \mathsf { W } ) } MW: Molar Mass of the Gas Used, g/mol
3.Temperature Conversion Factor: \scriptstyle \mathsf { F t } = { sqrt { ( 2 9 3 / 0 \ T ) } } OT: Operating Temperature, ^ { \circ } C + 2 7 3

IConversion Example

If hydrogen (molecular weight 2) is used at a pressure of 72.5 psig (gauge pressure) and a temperature of 2 5 ^ { \circ } C , andaflowswitchwithastandardflowrateof500SPM(VEFS2-S---00)isselected,theconversionisasfollows:

1.Pressure Conversion Factor: \mathsf { F p } = sqrt { ( ( 7 2 . 5 + 1 4 . 5 ) / 1 1 4 . 7 ) } = 0 . 8 7 1
2．Gas Conversion Factor: { \sf F 9 } = sqrt { ( 2 8 / 2 ) } = 3 . 7 4 2
3．Temperature Conversion Factor: \mathsf { F t } = sqrt { ( 2 9 3 / 2 9 8 ) } = 0 . 9 9 2

The actual working flow rate is: 50o(L/min） x 0 . 8 7 1 x 3 . 7 4 2 x 0 . 9 9 2 = 1 6 1 6 . 6 (L/min)

Vacuum Generator VVG Series

IProduct Feature

·Max.vacuum pressure:-90kPa
·Stainless steel 316L construction
·MMHG (Torr) vacuum generators
·The product is fabricated in compliance with the VS001B process specification
·With a minimum source nitrogen pressure of 90 psig (6bar)
· 1 0 0 % helium leak test

IDimensions (mm)

I Vacuum and Flow Specification

Vacuum pressure Gas consumption 40 -0.1 (1.4)
CSU/ JITUSST SS 35 30 -0.2(2.8) -0.4 (5.8) Je SSSss ssss 25 -0.5 (7.2) 20 -0.6 (8.7) 15 -0.7 (10) -0.8 (11.6)
G 10 -0.9 (13) 5 -1.0 (14.5) 0 2 4 6 8 10 (29) (58) (87) (116) (145) INLET PRESSURE bar (psig)

TechnicalData

IOrdering Information

Vacuum Generator VVGV1 Series

Product Feature

·Pneumatic actuator, normally closed
·Monoblock vacuum venturi, diaphragm valve and check valve
·Compact design
·Maximum vacuum:-88 KPa
·The product is fabricated in compliance with the VS001B process specification

Dimensions (mm)

I Vacuum and Flow Specification

Technical Data

IOrdering Information

|Ordering Example

Vacuum Generator VVGV2 Series

Product Feature

·Manual or pneumatic actuation
·Monoblock vacuum venturi, diaphragm valve and check valve
·Compact design
·Maximum vacuum:-88 KPa
·The product is fabricated in compliance with the VS001B process specification

Dimensions (mm)

I Vacuum and Flow Specification

Inlet pressure vacuum with no vacum flow ■nitrogen consumption 30 -100 28 -90 UINIs GIIISSNSS DST 26 -80 (GH U) JNNIUA 24 -70 22 -60 20 -50 18 -40 16 -30 14 -20 12 -10 10 1 70 80 90 100 110 (4.8) (5.5) (6.2) (6.8) (7.5) INLET PRESSURE psig (bar)

Technical Data

Metering Bellows Valve VBMVSeries

IProduct Feature

·Micrometer-style handle for precise and repeatable flow setting.
·Micrometer handle measures stem position in 0.001 in. ( 0 . 0 2 5 \mathsf {mm } ^ { \prime } increments. ·The product is fabricated in compliance with the VSo01B process specification ·Working pressure up to 700 psig (48.2 bar)
·Temperature up to 315 ℃ (600 F)
·316 stainless steel construction
· \mathsf { C v } = 0 . 0 1 9 with metering stem tip
· \mathsf { C v } = 0 . 3 0 with regulating stem tip

Technical Data

Flow Coefficient at Turns Open

Flow Dataat 2 0 ^ { \circ } C 0 . 7 0 ^ { \circ } \mathsf { F } ）

Dimensions (mm)

Ordering Information

|Product Features

·Low pressure metering valves
·Body materials:316
·Panel installation is possible
·The product is fabricated in compliance with the VSoo1B process specification
·Vernier handles options
·Straight and Angle flow patterns
·Working pressure:Max.2000psig (138bar)
·Straight-pattern flow coefficients (Cv) from 0.004 to 0.16

Technical Data

Flow Coefficient at Turns Open

Flow Dataat 7 0 ^ { \circ } \mathsf { F } ( 2 0 ^ { \circ } \mathsf { C } ) （20

A typeMeteringValves

BtypeMetering Valves

C typeMetering Valves

Dimensions

Dimensions

Options and Accessories

Vernier Handle

Product Features:

·Helps ensure repeatable flow adjustments. ·Provides readings accurate to 1/25 turn. ·Kits containall parts necessary to add a Vernier handle to an existing valve.

Ordering Example: SS-VMV-AL-02-Y

l Ordering Infomation

SS-VMV-B -02 -02-Y
Materials Handle
SS:316 None:standard Y:Vernier Handle
Series
A:A type (Straight Pattern) Inlet/Outlet
AL:A type (Angle Pattern)
B:B type (Straight Pattern) Tube fitings:See product size table for details
BL:B type (Angle Pattern) Male NPT: See product size table for details
C:C type (Straight Pattern) Female NPT: See product size table for details
CL:Ctype (AnglePattern) VFS Male:See product size table for details

All-WeldedCheckValve VUCV Series

Product Feature

·All-welded design body with minimal dead space
·Cracking pressure less than 2 psig (0.13bar)
·The product is fabricated in compliance with the VSoo1B process specification
·316L SS Materials for ultra-high purity grackle
·Strong durability as well as corrosion resistance for long cycle life
·Elgiloy@ spring material with free noise in the process of using

Technical Data

Dimensions (mm)

Ordering Information

Product Feature

·Compact check valve
·O-ring Materials:FKMstandard,EPDMorFFKMoptional
·Working pressure: Max. 6000 psig (413 bar)
·The product is fabricated in compliance with the VS001B process specification
·Opening pressure:1/3psi /1psi
·Inlet/outlet connection: VFS fiting

Dimensions (mm)

Typical Applications

·Designed for instrument panels and systems
·Hydrogen energy
·High-flow applications

Technical Data

Flowchart

The rating is based on fluorocarbon FKM seals.

\*The pressure rating may be limited by the end connection.

Ordering Information

Adjustable Check Valve VCA Series

IProduct Feature

·Check Valvewith Adjustable Pressure ·Set the opening pressure via the adjusting screw ·The locking screw keeps the setting ·The product is fabricated in compliance with the VS001B process specification ·316 stainless steel and brass materials

Typical Applications

·Used for overpressuredischargeafter the pressure regulatingvalve of thespecial gas equipment. ·Scenarios of one-way circulation that require pressure setting

Flowchart

ITechnical Data

IDimensions (mm)

IOrdering Information

Product Feature

·TheVFHSeriesisanIn-Linefiltrationdevice
·Filter material: 316L
·The product is fabricated incompliancewith the VS001B process specification
·Compact size and lightweight
·Outstanding chemical compatibility
·Tested for use with oxygen

Technical Data

IDimensions (mm)

Ordering Information

Product Feature

·The VUF series is an in-line gas filter designed fol ultra-high purity gas filtrationapplications
·Filtermaterial:PTFE,Shellmaterial:316L
·High particle removal efficiency
·Excellent chemical compatibility
·The product is fabricated in compliance with the VS001B process specification
·Filtration accuracy: 0 . 0 0 3 \mu { m } （204号
·High temperature and high pressure working environment
·Compact and easy to install
· 1 0 0 % helium leak test

Vacuum and Flow Specification

Pressure Drop vs. Gas Flow Rate BJPp PPR PHRe RPsd 90 080 70 (0.7) 2.07bar InletPressure 60 (0.6) 50 (0.5) ? 40 (0.4) 4.14ba InletPressure 30 (0.3) 20 (0.2) 10 (0.1) 0 10 20 30 40 50 60 FLOW RATE (slpm nitrogen) 1/4" VFS

Pressure Drop vs. Gas Flow Rate JrPPPe rgRneessd 90 (0.9) 80 (0.8) 70 (0.7) 2.07bar InletPressupe 60 (0.6) 50 (0.5) 40 (0.4) 6.21bar InletPressure 30 (0.3) 20 (0.2) 10 (0.1) 0 20 40 60 80 100 120 FLOW RATE (slpm nitrogen) 1/4° VFS

Pressure Drop vs. Gas Flow Rate BJPp PPr Rr Reesd 100 (1) 80 (0.8) 2.07barInlet Pressure 60 (0.6) ? 40 (0.4) 4.14bar inletPressure 20 (0.2) 0 100 200 300 400 500 FLOW RATE (slpm nitrogen) 1/4" VFS

Pressure Drop vs. Gas Flow Rate ePp ePerenesre 100 (1) 80 (0.8) 2.07barlnletPressure 60 (0.6) A ? 40 (0.4) 4.14barinletPressure 20 (0.2) 0 200 400 600 800 1000 FLOW RATE (slpm nitrogen) 1/2" VFS

Dimensions (mm)

| Ordering Information

| Product Feature

·All-metal filter
·Comrpact design
·Protect sensitive gas componers from particle damage
·Zntegrate into the gas system with out adding length
·Retain particles down to 0 . 3 \mu { m } （204号
·The product is fabricated in compliance with the VS001B process specification
· Filtration accuracy: 0 . 0 0 3 \mu { m } （204号
·Dired with high purity nitragen
·Fits in place of standard 1/4",1/2"VFS Gasket

FlowRata

Dimensions (mm)

TOrdering Information