VACUUMSOLUTIONEXPERT真空解决方案专家
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目录
杭州久铮技术有限公司HANGZHOU JIUZHENG TECHNOLOGY CO.,LTD
01 关于久铮 PAGE 03-08 ABOUT JUZTECH
·公司简介 COMPANYPROFILE·公司荣誉 COMPANY HONOR·应用领域 APPLICATIONS·发展历程 DEVELOPMENT HISTORY
02产品介绍 PAGE 09-24 PRODUCTINTRODUCTION
| ·SV系列干式等径变距螺杆单泵机组 | SVSERIES-EQUAL DIAMETERVARIABLEPITCHSINGLEDRYSCREWPUMPSET |
| ·SVR/SVH系列干式等径变距螺杆真空泵机组 | SVR/SVHSERIES-EQUALDIAMETERVARIABLEPITCHDRYSCREWVACUUMPUMPSET |
| ·SFR系列干式增强螺杆真空泵机组 | SFRSERIESENHANCEDDRYSCREWVACUUMPUMPSET |
| ·SCR系列干式复合爪式真空泵机组 | SCRSERIESCOMPOSITECLAWDRYVACUUMPUMP SET |
| ·SMR系列干式多级罗茨真空泵机组 | SMRSERIESMULTISTAGEROOTSDRYVACUUMPUMPSET |
| ·JSD系列干式双电机螺杆真空泵机组 | JSDSERIESDUALMOTORDRYSCREWVACUUMPUMPSET |
| ·SX系列干式变径变距螺杆单泵机组 | SXSERIESVARIABLEDIAMETERVARIABLEPITCHSINGLEDRYSCREWPUMPSET |
| ·SXH系列干式变径变距螺杆真空泵机组 | SXHSERIESVARIABLEDIAMETERVARIABLEPITCHDRYSCREWVACUUMPUMPSET |
| ·JSF系列干式轴冷双驱型螺杆真空泵机组 | JSFSERIESSHAFTCOOLEDDUALDRIVEDRYSCREWVACUUMPUMPSET |
| ·UJM系列超高真空复合分子泵 | UJMSERIESULTRA HIGHVACUUMCOMPOSITEMOLECULARPUMP |
| ·UCM系列磁悬浮复合分子泵 | UCMSERIESMAGNETICLEVITATIONCOMPOSITEMOLECULARPUMP |
ABOUT JUZTECH关于久铮
公司简介
COMPANYPROFILE
真空解决方案专家
杭州久铮技术有限公司(英文简称:Juztech)成立于2018年,位于风景秀丽的“人间天堂”一杭州,是一家集真空装备的研发设计、智能制造、销售服务、应用定制于一体的高新技术企业。秉持“节能环保,高效稳定"的产品与服务定位,久铮技术致力于成为全球领先的真空解决方案服务商。
公司产品专注于干式无油真空装备,广泛的应用于半导体,光伏,锂电新能源,医药&化工,科研实验室,航空航天等行业领域。公司拥有超30000平方米的生产基地,同时引入了世界领先的奥地利WFL加工中心、德国KAPP数控车床等先进的加工设备。久铮技术集聚了国内外各类专业人才,组成了高效的研发、销售和经营管理团队,目前共有发明及设计专利100余项。
HangZhouJuzhengTechnologyCo,D(referedtoas"Juztech")wasestablishedin2018,locatedinthebeautifulParadiseoEart" -Hangzhou.techisgchterprisetatitegatesR&Dtelgntaufactuingaleserisdplicatiotoi zationof vacuumequipmentAdheringtotheproductandservicepilosophyof"EnergySaving&Environmental,Eficientand Stable", Juztech is committed to becoming the world's leading vacuum solution provider.
Juztechproductsfocusondryol-freevacuumequipmentandarewidelyappliedinindustriessuchassemiconductors,photovoltaic, lithiumnewenergy,Pharmaceutical&Chemical,R&D,Aerospace,etc.Wehaveaproductionbaseofover3Osquaremeters, andhavealsointroducedadvancedproessingequipmentsuchastheworld'sleadingAustrianWFLmachiningcenterandGerman KAPPCNClathe.Wegathervariousprofessionaltalentsfrominternationalplatforms,forminganeficientR&D,salesandmanagement team.Currently,we own over 1oo invention and design patents.
铮技术
公司荣誉
COMPANY HONOR
100+
国家专利
4大认证SEMIUL CERoHS
PRODUCTINTRODUCTION 产品介绍
真空解决方案专家
先进的干式真空技术ADVANCEDDRYVACUUMTECHNOLOGY
1高效的组合密封设计EFFICIENTCOMBINEDSEALDESIGN
根据客户的应用需求,量身定制先进的组合密封,使用寿命长,实现高效密封性能
·可以结合气体密封吹扫,防止齿轮和轴承受到污染,真空腔完全无油
·Accordingtodiferentapplicationrequirements,theadvancedcombinedsealcanbecustomizedtoachievelongservicelifeandhighefficiencysealingperformance
·Itcanbecombinedwithgassealpurgingtoprotect gearsand shaftsfromcontamination;and thevacuumenvironmentiscompletelyoil-free
2长寿命周期轴承和润滑设计 LONGLIFECYCLEBEARINGANDLUBRICATIONDESIGN
与世界一流的轴承品牌供应商紧密合作共同开发和设计轴承方案,提高轴承使用寿命和可靠性
齿轮和轴承采用高标准的真空设备专用油润滑,维护周期长,油品性能稳定
Cooperatecloselywithworld-leadingbearingbrandsupplierstojointlydevelopanddesign bearingsolutionstoimprovebearingservicelifeandreliability
Gearandbearingarelubricatedwithhighstandardvacuumpumpspecialoiltoensure long maintenanceintervalandstableoilperformance
3先进的温度和压力控制技术
ADVANCEDTEMPERATUREANDPRESSURECONTROLTECHNOLOGY拥有闭环水冷温控技术,可以有效改善设备温度控制拥有先进的内压可调技术,可以通过独特设计的旁通结构提高从粗真空到中高真空的全压力段适应性
·Withclosed-loopwatercoolingtemperaturecontroltechnology, itcaneffectivelycontrolandimprovethepumptemperature
·Withadvancedinternapressureadjustabletechnology,itcan improvetheadaptabilityofthefullpressuresectionfromrough vacuumtomedium-highvacuumthroughauniquedesignof bypassstructure
4高效低噪电机和驱动技术HIGH-EFFICIENCY&LOW-NOISEMOTORANDDRIVETECHNOLOGY配置高效的电机和驱动技术,优化不同工艺下的转矩性能,为客户节约使用成本
水冷式电机采用整体密封设计,提高设备的运行可靠性,降低运行噪音
·Withhigh-efficiencymotoranddrivetechnology,itcanoptimize torqueperformanceunderdifferentprocessestosavecostsfor users
·Thewater-cooledmotoradoptstheoverallsealingdesignto improvetherunningreliabilityofthepumpandreducethenoise leve
5先进的型线和结构设计
ADVANCEDPROFILEAND STRUCTUREDESIGN
·多样性的型线设计,为客户不同应用提供高性能、低噪音的转子型线解决方案。先进的等径变距、变径变距螺杆;增强螺杆;复合爪泵;多级罗茨泵以及立式螺杆泵均可实现
高精密加工制造和先进的工艺技术,帮助实现产品的可靠性和性能的一致性
可靠的支撑结构设计,产品具有很强的粉尘和液体处理能力适合苛刻工艺
·Diversified profile design canprovidehigh-performanceand low-noiserotorprofilesolutionsfordifferentprocessapplications. Advancedequal-diametervariablepitch,variablediameterand variablepitch,multi-stageRoots,compositescrewsandvertical screwscanallbeachieved
·High-precision machining& manufacturing and advanced technologycanhelptoachieveproductreliabilityandperformanceconsistency
·Withreliablesupport structuredesign,thepump hasstrong dust andliquidhandlingcapacity,anditissuitableforharshprocesses
SV系列干式等径变距螺杆单泵机组
SVSERIES-EQUALDIAMETERVARIABLEPITCHSINGLEDRYSCREWPUMPSET
常规干式螺杆真空泵的单泵机组;适合中小工艺腔直接抽真空的应用,包括锂电新能源、制药&化 工、钢铁冶炼等。抽速: 8 0 { ~ } 2 5 0 0 m ^ { 3 } / { h } :极限压力:≤1Paabs.。
Single-pumpunitsofconventionaldryscrew vacuumpumps;Itissuitable fordirect vacuumingof small and medium-sizedprocesschambers,includinglithiumbatterynewenergy,pharmaceuticals&chemicals,steel smelting,etc.Pumping speed: 80-2500 m/h Ultimate pressure: ≤1Paabs.
SVR/SVH系列干式等径变距螺杆真空泵机组
SVR/SVHSERIES-EQUALDIAMETERVARIABLEPITCHDRYSCREWVACUUMPUMPSET
SVR/H系列采用罗茨泵+干式螺杆真空泵的多段抽空机组,常见2段、3段式真空泵;应用适应性广,节能、粉尘和液体处理能力强。适用于常规抽空、拉晶、锂电新能源及部分ALD等应用。抽速:600\~7200m³/h;极限压力:≤0.1Paabs.。
TheSVR/H seriesadopts multi-stage vacuum pumping unitswith Roots pumpsanddry screwvacuum pumps. Commonlytwostageandteestagevacuumpumpsareused.Itsideapicationadaptabilityisga ing,andhasstrongcapabilitiesinndlingdustandliquids.Itisapplicabletoconventionalvacumingcrtal pulling,lithiumbattery newenergyand some ALDapplications.Pumpingspeed: 6 0 0 { - } 7 2 0 0 \ { ~ m ~ } ^ { 3 } \ / { h } Ultimate pressure: <=slant 0 . 1 \mathsf { P a } abs.
SFR系列干式增强螺杆真空泵机组SFRSERIESENHANCEDDRYSCREWVACUUMPUMPSET
采用罗茨泵 ^ + 增强型干式螺杆真空泵的机组;干泵处理粉尘能力较强,且热稳定性高、更加节能,适 合CVD、ALD等工艺腔工艺的应用。抽速: 6 0 0 { ~ } 5 4 0 0 \ m ^ { 3 } / { h } ;极限压力: \mathtt { s 0 . 1 P a } abs.。 Theunitadopting Roots pump+enhanced dry screw vacuum pump;Dry pumps haveastrong abilityto handle dust,highthermalstabilityandaremoreenergy-eficient,making themsuitableforapplicationsinprocess chambers such as CVD and ALD.Pumping speed: 600-5400 m ^ { 3 } / h Ultimate pressure: ≤0.1Pa abs.
SCR系列干式复合爪式真空泵机组SCRSERIESCOMPOSITECLAWDRYVACUUMPUMPSET
采用罗茨泵 ^ + 干式复合爪型真空泵的机组;具有较强的处理粉尘异物能力,适合CVD等应用。抽速: 600\~5400 m ^ { 3 } / h ;极限压力: <=slant 0 . 1 \mathsf { P a } abs..
The unitadopting Roots pump ^ + drycompositeclaw vacuum pump; It hasa strong ability to handledust and foreignobjectsandissuitableforapplicationssuchasCVD.Pumpingspeed:60o-540Om3/h Ultimate pressure:≤0.1Paabs.
SMR系列干式多级罗茨真空泵机组SMRSERIESMULTISTAGEROOTSDRYVACUUMPUMPSET
采用罗茨泵+多级罗茨干泵的机组;能耗小、过程温度可控、噪音低,适合实验室、镀膜、半导体等 应用。抽速: 6 0 0 { ~ } 5 4 0 0 \ m ^ { 3 } / { h } ;极限压力: <=slant 0 . 1 \mathsf { P a } abs.。
Aunitusing Rootspumpsand multi-stageRootsdrypumps;Itfeatureslowenergyconsumption,controllable processtemperatureandlownoise,makingitsuitableforapplicationsinlaboratories,coating,semiconductors, etc. Pumping speed: 6 0 0 - 5 4 0 0 m ^ { 3 } / \hslash Ultimate pressure: \mathtt { s 0 . 1 P a } abs.
JSD系列干式双电机螺杆真空泵机组JSDSERIESDUALMOTORDRYSCREWVACUUMPUMPSET
立式双电机直驱无油螺杆真空泵机组;采用立式结构,粉尘和液体通过性好;双转子直驱控制,去齿轮100%无油;转子轴心冷却,过程温度可控。适用于航空航天、制药&化工、实验室等应用。抽速:170\~1400 m ^ { 3 } / h ;极限压力:≤1Paabs.。
Verticaldual-motordirectdriveoil-freescrewvacuumpumpunitItadoptsaverticalstructure,withgood permeabilityofdustand liquid.Doublerotordirectdrivecontrol, 100 % oil-freewithoutgears;Rotorshaftcenter cooling,withcontrollableprocesstemperature.Itissuitableforapplicationsinaerospace,parmaceuticals& chemicals, laboratories,etc.Pumping speed: 1 7 0 - 1 4 0 0 m ^ { 3 } / \vert Ultimatepressure:≤1Paabs.
SXH系列干式变径变距螺杆真空泵机组
SXHSERIESVARIABLEDIAMETERVARIABLEPITCHDRYSCREWVACUUMPUMPSET
采用罗茨泵+变径变距的干式螺杆真空泵的多段抽空机组,常见单泵、2段式、3段式机组;更加节能、低噪和低排气温度,适用于锂电新能源、制药&化工、光伏、半导体等应用。抽速:1200-7200m³/h;极限压力: <=slant 0 . 1 \mathsf { P a } abs.。
Multi-stage vacuumpumpingunitsthatadopt Roots pumpsanddryscrewvacuumpumps withvariablediameter andvariablepitcharecommonlysingle-pump,two-stageandthree-stageunits.Itismoreenergy-efficient, quieterandhasalowerexhausttemperature,makingitsuitableforapplicationsinlithiumbatterynewenergy, pharmaceuticals&chemicals,photovoltaics,semiconductors,etc.Pumping speed:1200-720om³/h Ultimate pressure: <=slant 0 . 1 Paabs.
SX系列干式变径变距螺杆单泵机组
SXSERIESVARIABLEDIAMETERVARIABLEPITCHSINGLEDRYSCREWPUMPSET
采用变径变距的干式螺杆真空泵的单泵机组,更加节能、低噪和低排气温度,适用于锂电新能源、制药&化工、光伏、半导体等应用。抽速: 1 6 0 - 8 0 0 m ^ { 3 } / h 极限压力:≤1Paabs.。
Thesingle-pumpunitwithadryscrew vacuum pumpfeaturing variablediameterand variabledistance ismore energy-ffcient,quieterandhasa lowerexhaust temperature.Itissuitableforapplicationsinlithiumbattery newenergy,pharmaceuticals&chemicals,photovoltaics,semiconductors,etc.Pumping speed:16O-800m/h Ultimate pressure: <=slant 1 \mathsf { P a } abs.
JSF系列干式轴冷双驱型螺杆真空泵机组 SFSERIESSHAFTCOOLEDDUALDRIVEDRYSCREWVACUUMPUMPSET
采用轴心冷却技术的干式螺杆真空泵的单泵机组,悬臂梁转子结构设计,方便维护,适用于光伏、半导体等应用。抽速: 6 5 0 m ^ { 3 } / h :极限压力:≤1Paabs。
Thesingle-pump unitof thedry screwvacuum pumpadoptingaxial cooling technology featuresacantilever beamrotor structuredesignwhich isconvenient formaintenanceand suitablefor applicationssuchas photovoltaicandsemiconductor.Pumpingspeed: 6 5 0 m ^ { 3 } / h Ultimatepressure: <=slant 1 Paabs.
UJM系列超高真空复合分子泵UJMSERIESULTRA HIGHVACUUMCOMPOSITEMOLECULARPUMP
抽速:2000\~4500L/S;极限压力:5x10-7Pa。Pumping speed: _2000\~4500L/SUltimate pressure:5x10-Pa.
UCM系列磁悬浮复合分子泵UCMSERIESMAGNETICLEVITATIONCOMPOSITEMOLECULARPUMP
抽速:1200\~4500L/S; 极限压力: 5 x 1 0 ^ { - 8 } \mathsf { p a } . 1 x 1 0 ^ { - 7 } \mathsf { p a } _ { \circ } Pumping speed: 1200\~4500L/S Ultimate pressure: 5 x 1 0 ^ { - 8 } p a ;1×10-7pa.
面
JUz
铮技术
SV系列干式等径变距螺杆单泵机组
适用行业场景 APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·干式螺杆真空泵,单泵机组变距转子型线设计,功耗更低。
·采用水冷电机 ^ { , + } 变频驱动,抽速调节范围宽,工况适应性更好;
·全套水冷却壳体设计,泵体和排气温度可控,噪音更低。
SVSERIES-EQUALDIAMETERVARIABLE PITCHSINGLEDRYSCREWPUMPSET
| 机型Model | 单位 | 80 | 180 | 200 | 300 | 380 | 450 | 580 | 680 | 950 | 1200 | 1500 | 2500 | |||
| Pumpingpeed | m³/h | 80 | 180 200 | 300 | 380 | 450 | 580 | 680 | 950 | 1200 | 1500 | 2500 | ||||
| Ut极限压力ure | Torr | ≤7.5×10-³ | ||||||||||||||
| mbar | ≤1×10-² | |||||||||||||||
| Pa | ≤1 | |||||||||||||||
| 电机 | 供电频n率 | Hz | 50 | |||||||||||||
| 电压 | V | 220~380 | ||||||||||||||
| 额定功率 | kw | 3 4.5 | 6 | 7.5 | 11 | 11 | 15 | 22 | 22 | 37 | 55 | |||||
| 接口 Connection | 进气口 | / | NW50 | IS063 | ISO100 | ISO160 | ||||||||||
| 排气 | / | NW40 | IS063 | IS080 | ISO100 | |||||||||||
| er | 流量 | L/min | 3~8 | 6~10 | 10~15 | 15~20 | 25~30 | |||||||||
| 压力 | bar | 2~4 | ||||||||||||||
| Tem温erature | ℃ | 18~30 1.5~2.0 | ||||||||||||||
| 氮气 N2 | 压力r | bar | ||||||||||||||
| 气镇流量 | ||||||||||||||||
| 密封量 | L/min | |||||||||||||||
| Co接ection | L/min / | |||||||||||||||
| 露率 | Swagelok 1/4" | |||||||||||||||
| Op室温操作范围ure | Pa·m³/s ℃ | 1x10-6 5~40 | ||||||||||||||
SVR/SVH系列干式等径变距螺杆真空泵机组 PITCHDRYSCREWVACUUMPUMPSET SVR/SVHSERIES-EQUALDIAMETERVARIABLE
适用行业场景APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·优化两级配比,满足宽抽速范围、流量变化更加稳定可控;
·自主开发两级变频联动、工况自适应控制程序,满足不同工况抽速需求;
·采用一体化结构设计,结构紧凑,安装空间适应性更好。
| 机型Model | 单位 | 782 | 1382 | 1682 2202 | 4202 | 4952 | 6002 | 6302 | 7252 | ||||
| Pumpingpeed | m³/h | 600 | 1200 | 1500 | 2100 | 4200 | 4500 | 5400 | 6300 | 7200 | |||
| 极限压力 Ultimate Pressure | Torr | ||||||||||||
| mbar | |||||||||||||
| 电机 | 供电n率y | Pa | |||||||||||
| Hz | |||||||||||||
| 电压 | V | 220~380 | |||||||||||
| 接口 | 额定功率er | kw | 4.5+2 | 4.5+4.5 | 4.5+4.5 | 6+4.5 | 6+6 | 11+7.5 | 15+7.5 | 15+11 | 22+15 | ||
| 进气口 | / | IS0160 | ISO200 | ISO250 | |||||||||
| Connection | 排气口 Outlet | / | NW40 | ISO63 | |||||||||
| 流量 | L/min | 3~8 | 6~10 | 10~15 | 15~20 | ||||||||
| 压力re Temerature | bar | 2~4 | |||||||||||
| °℃ | 18~30 | ||||||||||||
| 氮气 N2 | 压力re | bar | 1.5~2.0 | ||||||||||
| 气镇流量 | L/min | ||||||||||||
| 密封量 | L/min | ||||||||||||
| Ccom接etion | / | Swagelok 1/4" | |||||||||||
| 泄露率 Leak Rate | Pa·m³/s | 1×10-5 | |||||||||||
| p室温操作范围ure | ℃ | ||||||||||||
Juz
铮技术
SFR系列干式增强螺杆真空泵机组
SFRSERIESENHANCEDDRYSCREWVACUUMPUMPSE
适用行业场景 APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·首创基于双头对称型线的增强型螺杆设计,结构更合理,运行更平稳、更节能;
·气体通路短,抗粉尘性能强,适用于镀膜工艺;
·泵体的温度可控,可以针对客户工艺进行定制化设计。
| 机型Model | 单位 Unit | 652 | 1252 | 1852 | 3052 | 4552 | 6052 | ||
| Pumpngped | m³/h | 600 | 1200 | 1800 | 3000 | 4500 | 5400 | ||
| 极限压力(关气镇) | Pa | ≤0.1 | |||||||
| 电机 | 供电率y | Hz | 50 | ||||||
| 电压 | V | 220~380 | |||||||
| 额定功率er | kw | 4.5+2 | 4.5+4.5 | 4.5+4.5 | 11+6 | 11+7.5 | 11+11 | ||
| 接口 Connection | 进气口 | / | ISO100 | IS0160 | ISO200 | ISO250 | |||
| 排气 | / | NW40 | |||||||
| 冷却水 Cooling Water | 流量 | L/min | 4~8 | 5~8 | 6~10 | 12~15 | |||
| 压力re | bar | 2~4 | |||||||
| Termerature | ℃ | 10~30 | 10~25 | ||||||
| co接e头ion | / | RC 3/8" | |||||||
| 氮气 | 压力re | bar | 1.5~2.0 | ||||||
| L/min | 50-65 | ||||||||
| co接头ton | / | Swagelok 1/4" | |||||||
| 露 Pa·m³/s | 1x10-5 | ||||||||
| Op室温操作范围ure | ℃ | 5~40 | |||||||
SCR系列干式复合爪式真空泵机组
适用行业场景 APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·复合爪式结构,负载多级分配,刮粉尘能力强;·采用全水冷二合一变频驱动,电控系统密封等级高,·防尘防水散热性好,驱动更节能。
| 机型Model | 单位 Unit | 610 | 1210 | 1820 | 3030 | 4550 | 6050 | |||
| pumpgpeed | m³/h | 600 | 1200 | 1800 | 3000 | 4500 | 5400 | |||
| 极限压力(关气镇) | Pa | ≤0.1 | ||||||||
| 电机 | 额定功率 | Hz | 50 | |||||||
| 电压 | V | |||||||||
| 额定功r | kW | 4.5+2 | 4.5+4.5 | 4.5+4.5 | 11+6 | 11+7.5 | 11+11 | |||
| 接口 Connection | 进气口 | / | IS0160 | ISO200 | ISO250 | |||||
| 排气 | / | NW40 | ||||||||
| 冷却水 Cooling Water | 流量 | L/min | 2~11 | |||||||
| 压力re | bar | 2~4 | ||||||||
| Termeature | ℃ | 15~25 | ||||||||
| Con接etion | / | RC 3/8" | ||||||||
| 氮气 | 压力re | bar | 2~4 | |||||||
| L/min | 50-10 | |||||||||
| co接头tion | / | Swagelok 1/4" | ||||||||
| Pa·m³/s | 1×10-5 | |||||||||
| Op室温操作范围ure | ℃ | 5~40 | ||||||||
jUz
铮技术
SMR系列干式多级罗茨真空泵机组
适用行业场景APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·多级罗茨设计,运行功耗更节能;
·采用全水冷二合一变频驱动,电控系统密封等级高,防尘防水散热性好,驱动更节能。
| 机型Model | 单位 Unit | 632 | 1232 | 1832 | 3032 | 4532 | 6032 | ||
| Pumpgpeed | m³/h | 600 | 1200 | 1800 | 3000 | 4500 | 5400 | ||
| 极限压力(关气镇) | Pa | ≤0.1 | |||||||
| 电机 | 供电频率 | Hz | 50 | ||||||
| 电压 | V | 220~380 | |||||||
| 额定功率er | kW | 4.5+2 | 4.5+4.5 | 4.5+4.5 | 7.5+4.5 | 7.5+4.5 | 11+4.5 | ||
| 接口 Connection | 进气口 Inlet | / | IS0160 | ISO250 | |||||
| 排气 | / | NW40 | |||||||
| 冷却水 Cooling Water | 流量 | L/min | 4~8 | 5~8 | 6~10 | 12~15 | |||
| 压力re | bar | 2~4 | |||||||
| Termerture | ℃ | 10~30 | |||||||
| Cone头tion | / | RC 3/8" | |||||||
| 氮气 | 压力re | bar | 2~6 | ||||||
| L/min | 50-1000 | ||||||||
| Sealing Flow | |||||||||
| Co接etion | / | Swagelok 1/4" | |||||||
| 泄露率 Leak Rate | Pa·m³/s | 1×10-5 | |||||||
| Op室温操作范围ure | ℃ | 5~40 | |||||||
JSD系列干式双电机螺杆真空泵机组
适用行业场景 APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·立式双电机直驱无油螺杆真空泵机组·采用立式结构,粉尘和液体通过性好;双转子直驱控制,去齿轮100%无油;转子轴心冷却,过程温度可控。适用于航空航天、化工医药、实验室等应用。
| 机型Model | 单位Unit | JSD170 | JSD630 | JSD1560 | ||
| pumpgped | m³/h | 170 | 650 | 1400 | ||
| Ut极限压力ure | Torr | ≤7.5×10-3 | ||||
| mbar | ≤1x10-² | |||||
| Pa | ≤1 | |||||
| 水冷密封 Watr caing Motor | 供电频n率 | Hz | 50 | |||
| 电压 | V | 380 | ||||
| R功率er | kw | 15 | 22 | 42 | ||
| 接口 Connection | 进气 | / | ISO100 | ISO160 | ||
| 排气 | 1 | ISO63 | IS080 | |||
| Cog水ter | 流量 | L/min | 6~10 | 10~15 | ||
| 压力 | bar | 2~4 | ||||
| Tem温eature | °℃ | 18~30 | ||||
| 氮气 N2 | 压力r | bar | 1.5~2.0 | |||
| 气镇流量 | L/min | 0~60 | ||||
| 密封量 | L/min | 0~20 | ||||
| Co接e头tion | / | Swagelok 1/4" | ||||
| 泄露率 Leak Rate | Pa·m³/s | 1×10-6 | ||||
| p室温操作范围ure | ℃ | 5~40 | ||||
JUz
铮技术
SX系列干式变径变距螺杆单泵机组
《
适用行业场景APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·采用先进的变径变距转子设计,内压比超过5.0
·更加节能、低噪和低排气温度,适用于锂电、化工医药、光伏、半导体等应用。
| 机型Model | 单位Unit | 160 | 300 | 500 | 800 | ||
| Pumpngpeed | m³/h | 160 | 300 | 500 | 800 | ||
| Ut极限压力ure | Torr | ≤7.5×10-3 | |||||
| mbar | ≤1x10-2 | ||||||
| Pa | ≤1 | ||||||
| 水冷密封 Watre cding Motor | 供电un率 | Hz | 50 | ||||
| 电 | v | 220~380 | |||||
| 额定功率r | kw | 4.5 | 6 | 11 | 22 | ||
| 接口 Connection | 进气 | IS063 | ISO100 | ||||
| 排气 | / | NW40 | NW50 | ||||
| cog水ter | 流量 | L/min | 4~8 | 6~10 10~15 | |||
| 压力 | bar | 2~4 | |||||
| Tem温eatue | ℃ | 18~30 | |||||
| 氮气 N2 | 压力re | bar | 1.5~2.0 | ||||
| 气镇流量 | L/min | 0~60 | |||||
| 密封量 | L/min | 0~12 | |||||
| co接e头tion | / | Swagelok 1/4" | |||||
| 泄露率 Leak Rate | Pa·m³/s | 1x10-6 | |||||
| Op室温操作范围ure | ℃ | 5~40 | |||||
SXH系列干式变径变距螺杆真空泵机组
| 机型Model | 单位Unit | 1382 | 2202 | 3002 | 4202 | 6002 | 7202 | 4203 | 7203 | |
| Pumppeed | m^/h | 1200 | 2100 | 3000 | 4200 | 5400 | 7200 | 4200 | 7200 | |
| Ut极限压力ure | Torr | ≤7.5×10-4 | ||||||||
| mbar | ≤1x10-³ | |||||||||
| 水冷密封 | Pa | ≤0.1 | ||||||||
| 供电频率 | Hz | 50 | ||||||||
| 电压 | V | 220~380 | ||||||||
| motor 接口 Connection | 额定功r | kW | 4.5+4.5 | 6+4.5 | 6+6 | 6+7.5 | 15+7.5 | 22+11 | 4.5+4.5+7.5 | 6+7.5+11 |
| 进气 | / | ISO160 | ISO200 | ISO250 | ||||||
| c冷g ater | 排气 | / | NW40 | NW50 | NW40 | |||||
| 流量 | L/min | 3~8 | 8~12 | 10~15 | ||||||
| 压力 | bar | 2~4 | ||||||||
| 氮气 N2 | Tem温eature | ℃ | 18~30 | |||||||
| 压力 | bar | 1.5~2.0 | ||||||||
| 气镇流量 | L/min | 0~60 | ||||||||
| 密封流量 | L/min | 0~12 | ||||||||
| com接etion | / | Swagelok 1/4" | ||||||||
| 泄露率 Leak Rate | Pa·m³/s | 1×10-5 | ||||||||
| Op室温操作范围ure | ℃ | 5~40 | ||||||||
Juz
技术
JSF系列干式轴冷双驱型螺杆真空泵机组
适用行业场景APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·转子轴心冷却 ^ + 壳体冷却,介质内外温度平衡;
·悬臂梁转子结构设计,方便拆卸和维护;
·永磁同步双电机驱动,节能高效。
JSFSERIESSHAFTCOOLEDDUALDRIVE DRYSCREWVACUUMPUMPSET
| 机型Model | 单位 Unit | 650 | |
| Pumpngsped | m³/h | 650 | |
| Torr | ≤7.5×10-³ | ||
| Ut极限压力ure | mbar | ≤1×10-² | |
| Pa | ≤1 | ||
| 电机 | 供电频y | Hz | 50 |
| 电压 | V | 380 | |
| 额定功er | kW | 7.5+7.5 | |
| 接口 Connection | 进气 | / | IS0100 |
| 排气 | / | IS080 | |
| cter | 流量 | L/min | 6~10 |
| 压力e | bar | 2~4 | |
| Ter温e度ature | ℃ | 18~30 | |
| 氮气 N2 | 压力re | bar | 1.5~2.0 |
| 气镇流量 | L/min | 0~60 | |
| 密封流量 | L/min | 0~20 | |
| Conection | / | Swagelok 1/4" | |
| 泄露率 Leak Rate | Pa·m³/s | 1x10-6 | |
| Op室温操作范围ure | °℃ | 5~40 | |
UJM系列超高真空复合分子泵
适用行业场景 APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICALPERFORMANCE
·陶瓷球轴承+脂润滑不会产生电磁干扰
·整体型复合转子,并配备涡轮抽气级和螺旋槽筒式牵引级
·可耐受较高的前级压力
| 型号Model | UJM-2000 | UJM-4500 | |
| 法兰规格 Flange specification | 进气Inlet | ISO-250 | ISO-400 |
| 排气 Outtet | NW40 | NW40 | |
| Pumping speed | N2 | 2000L/S | 4500L/S |
| N2 | 1x108 | 1x108 | |
| 压缩比 Compression ratio Ut极限压力ure | H2 | 4x103 | 4x103 |
| 金属密封 | 5x10-7Pa | 5x10-7Pa | |
| Max最大出口(前级)压力sure | 2Torr | 2Torr | |
| 机转速 | 24000r/min | 21000r/min | |
| 启动&停止时间 | |||
| 冷却方式 | 水冷 Water cooling | 水冷Water cooling | |
| 冷却*ater | 接口尺寸 | ISO-Rc1/4 | ISO-Rc1/4 |
| 流量 | 3L/min | 3L/min | |
| Wate temperature | |||
| 吹扫 (选配) Purging (optional) | Pipe eter | NW10 | |
| 流量 | 40±10sccm | NW10 40±10sccm | |
| 通信接口 Communication interface | I/ORemoteRS232/RS485 | I/ORemoteRS232/RS485 | |
| 电压 Voltage | 220V±10% | 220V±10% | |
| 最大功率 Maximum power | 1KVA | 1KVA | |
| 重量 Weight | 43.2KG | 80KG | |
| 润滑油量Lubricating oil quantity | 无油 Oil-free | 无油 Oil-free | |
| 涂层选配 Coating selection and configuration | 特殊涂层 Special coating | 特殊涂层 Special coating | |
| 安装方式 Installation method | 任意角度 Any Angle | 任意角度Any Angle | |
| 应用 Application | PVD/真空镀膜/实验室应用等 PVD/vacuum coating/laboratory applications, etc | ||
JUz
铮技术
UCM系列磁悬浮复合分子泵
适用行业场景 APPLICABLE INDUSTRY SCENARIOS
技术性能 TECHNICAL PERFORMANCE
·磁悬浮轴承、工作寿命更长;
·无油脂、无接触摩擦,更节能;
·任意角度安装,便于系统集成、紧凑型结构。
UCMSERIESMAGNETICLEVITATIONCOMPOSITEMOLECULARPUMP
| 型号Model | UCM-1200 | UCM-2700 | UCM-3300 | UCM-4500 | |
| 法兰规格 进气 Inlet | ISO-200 | ISO-250 | ISO-320 | ISO-400 | |
| Flange specification 排气Outtet | NW40 | NW40 | NW40 | NW40 | |
| pumppeed N2 | 1200L/S | 2700L/S | 3300L/S | 4500L/S | |
| 压缩比 N2 Compression | >1x109 | >1x108 | >1x108 | >1x108 | |
| ratio H2 | >1x103 | >1x103 | >1x103 | >1x103 | |
| Ut极限压力ure | 5x10-8pa | 1x10-7Pa | 1x10-7Pa | 1x10-7Pa | |
| 最大出口(前级)压力 | 1.5Torr | 2torr | 2Torr | 2Torr | |
| Mot转eed | 36000rpm | 27000rpm | 27000rpm | 24000rpm | |
| 启动时间 | |||||
| 停止时间 | |||||
| Ins安装方od | 任意角度Any Angle | 任意角度Any Angle | 任意角度Any Angle | 任意角度Any Angle | |
| 冷方 | 水冷 Water cooling | 水冷Water cooling | 水冷 Water cooling | 水冷 Water cooling | |
| 冷却水 water | 接口尺寸 | ISO-Rc1/4 | ISO-Rc1/4 | ISO-Rc1/4 | ISO-Rc1/4 |
| 流量 | 3L/min | 3L/min | 3L/min | 3L/min | |
| Wat r speraure | 16-25°℃ | 16-25℃ | 16-25°C | 16-25°C | |
| 吹扫 Purging | Pipeeter | NW16 | NW10 | NW10 | NW10 |
| 流量 | 30±10sccm | 40±10sccm | 40±10sccm | 40±10sccm | |
| 通信接口 Communication | I/ORemoteRS232/RS485 | I/ORemoteRS232/RS485 | I/ORemoteRS232/RS485 | I/O Remote RS232/RS485 | |
| 电压 Voltage | 220V±10% | 220V±10% | 220V±10% | 220V±10% | |
| 涂层 (选配) Coatinag) | 特殊涂层Soeciag | 特殊涂层Special | 特殊涂层Specag | 特殊涂层Speciag | |
| 重量 Weight | 38.5KG 0.75KVA | 85KG 1.8KVA | 80KG 1.8KVA | 85KG | |
| 最大功率Maximumpower 应用 Application | 1.8KVA 离子注入/半导体成膜/刻蚀等 lon implantation/semiconductorfilm formation/etching,etc | ||||
涂层防护
COATINGPROTECTION
针对各种特殊制程应用,可定制相对应的涂层,以达到良好的防护效果
FOR VARIOUS SPECIAL PROCESS APPLICATIONS,THECORRESPONDING COATINGS CAN BECUSTOMIZED TOACHIEVEGOODPROTECTIONEFFECT
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提供自主及进口真空泵保养、维修及售后服务。
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