温度控制设备介绍 - 电子画册在线预览、各类电子画册在线制作-云展网平台

Refrigeration Type

Water-cooled Type Peltier Type

Rack Mount Type HRR

CONTENTS

Thermo-chiller Variations ……………………………………………………… p. 1

Peltier-type Thermo-con Variations ……………………………………… p. 3

Accessories List …………………………………………………………………… p. 5

SMC’s Unique Chiller Control: A Challenge to Downsizing…… p. 7

5 Advantages of SMC Thermo-chillers

zLightweight, Compact ……………………………………………………… p. 8

xEnergy Saving ………………………………………………………………… p. 9

cHeating Function ………………………………………………………… p. 10

vEasier Maintenance ……………………………………………………… p. 11

bGlobal Compatibility ……………………………………………………… p. 11

High-performance Type HRZ/HRZD/HRW Series ……………… p. 12

Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series …… p. 12

Peltier-type Thermo-con Lineup ………………………………………… p. 12

Applications According to Industry …………………………………… p. 13

Circulating Fluid/Facility Water Line Equipment ………………… p. 16

Chiller Selection Examples

Semiconductor ………………………………………………………………… p. 17

Laser ……………………………………………………………………………… p. 18

Machine Tools ………………………………………………………………… p. 19

Welding Machines …………………………………………………………… p. 20

Food Products/Packaging Machines ………………………………… p. 21

Global Maintenance Network …………………………………………… p. 22

Temperature Control Equipment

Thermo-chiller HRW

Thermo-chiller HRZ

Thermo-con HEC

Thermo-con HECR

Chemical Thermo-con HED

Dual Type HRL

Inverter Type/Thermo-chiller HRSH

Environmentally Resistant Type/

Thermo-chiller HRS-R

For lasers CH1: 9 to 26 kW CH2: 1 kW Cooling General purpose 1.3 capacity to 28 kW Cooling

capacity

Refrigerant-free 2 to 30 kW Cooling

capacity High precision 140 to 1200 W Cooling

capacity

Direct control of chemical

liquid temperature 300 to 750 W Cooling

capacity

High performance 1 to 10 kW Cooling

capacity

Thermo-chiller HRSE/HRS

P-E20-15

Thermo-chiller Variations

Series Features Cooling

method

Temperature

stability

Cooling capacity [kW] 0.1 0.2 0.3 0.4 0.5 0.6 0.8 1.0 1.2 1.8 2.4 3 4 5 6 9 10 15 20 25 28 30 Thermo-chiller

Standard type

HRS Series

¡With this chiller, cooling water can

be obtained anywhere it is required

because of easy installation and easy

operation.

¡For a wide range of applications, such

as laser machine tools, analytical

equipment, LCD manufacturing

equipment, mold temperature control,

etc.

¡Compact:

W 377 x H 615 x D 500 mm,

40 kg (HRS012/018/024)

¡Timer operation function, Low liquid

level protection, Power failure autorestart, Anti-freezing operation function,

etc.

¡Self-diagnosis function

¡No heater is required, as the circulating

fluid is heated using only the heat

exhausted by the refrigerating circuit.

¡Low-noise design: 70 dB(A)

(HRS100/150)

Air-cooled/

Water-cooled

refrigeration

±0.1°C V V V V V V V Thermo-chiller

Standard type

HRS-R Series

Air-cooled

refrigeration ±0.1°C V V V Thermo-chiller

Standard type

HRS090 Series Air-cooled/

Water-cooled

refrigeration

±0.5°C V Thermo-chiller

Standard type

HRS100/150 Series

±1.0°C V V Thermo-chiller

Standard type

HRS200 Series

Air-cooled

refrigeration ±1.0°C

20.5

Thermo-chiller

Inverter type

HRSH090 Series

¡Power consumption reduced by 53%

Complete with energy-saving triple

inverter!

¡Compact, Space saving: W 377 x

H 1080 x D 970 mm

¡Low-noise design: Max. 66 dB

¡Max. ambient temperature: 45°C

Air-cooled/

Water-cooled

refrigeration

±0.1°C V Thermo-chiller

Inverter type

HRSH Series

¡Complete with energy-saving triple

inverter!

¡Outdoor installation: IPX4

¡Max. ambient temperature: 45°C

¡Space saving and lightweight: 280 kg

(25 kW type)

Air-cooled/

Water-cooled

refrigeration

±0.1°C V V V V V Thermo-chiller

Basic type

HRSE Series

¡Simple function and performance

Thermo-chiller of the basic type

¡Complete with energy-saving triple control!

Reduces power consumption by 33%

¡Compact and lightweight: 32 kg (100 VAC)

¡Maintenance-free: Magnet pump

¡Low-noise design: 55 dB(A)

Air-cooled

refrigeration ±2.0°C

1.2

1.6

2.2

Thermo-chiller

Rack mount type

HRR Series

¡Mountable in a 19-inch rack

Space can be saved by mounting multiple

pieces of equipment together in a single rack.

¡Comes with a built-in bypass valve and

particle filter as standard

Built-in DI filter (option) specifications

¡Performance and functions: Equivalent to the HRS

Air-cooled/

Water-cooled

refrigeration

±0.1°C V V V V V V Dual Channel Refrigerated

Thermo-chiller for Lasers

HRL Series

¡Temperatures for 2 fluid channel systems

can be controlled individually by one chiller.

¡Space saving, Footprint 22% reduction

¡Reduced wiring, One power supply

system for 2 channels

¡Energy saving

Power consumption reduced by 30%

¡Touch panel

Air-cooled

refrigeration

CH1 ±0.1°C V

CH2 ±0.5 °C V Thermo-chiller

High-performance type

HRZ Series

Thermo-chiller

High-performance

inverter type

HRZ Series

¡Suitable for semiconductor processing equipment

with a wide variety of features, such as hightemperature stability, a wide temperature range,

failure diagnosis, external communication, etc.

¡Suited to the short innovation cycle of

semiconductor equipment, Capable of responding

flexibly to changes in the process conditions

¡Compliant with various safety standards

¡It is possible to select the inverter type.

Energy saving is achieved through use of

a DC inverter compressor.

Water-cooled

refrigeration ±0.1°C

V V

V Thermo-chiller

High-performance

inverter type

HRZD Series

¡Temperatures for 2 systems can be controlled separately by one chiller.

¡Double inverter type: Substantially more

energy is saved by using a DC inverter

refrigerator and inverter pump.

¡Space saving: Footprint reduced by 23%

¡Reduced wiring, piping, and labor: Single

power cable, Single facility-water piping system

Water-cooled

refrigeration ±0.1°C

9.5

2 ch

Water-cooled Thermo-chiller

High-performance type

HRW Series

Water-cooled Thermo-chiller

High-performance inverter type

HRW Series

¡Direct heat exchanger for in-plant circulating fluid

¡Can control the temperature over a wide

range since a compressor is not required.

¡Suitable for semiconductor processing equipment

with a wide variety of features, such as hightemperature stability, a wide temperature range,

failure diagnosis, external communication, etc.

¡It is possible to select the inverter type.

Watercooled

type

±0.3°C

V V Environmentally resistant type

Set temperature range [°C] Pump

capacity Pump type Power supply Circulating fluid Environment International

standards

L/min Magnet pump

(Mechanical seal

pump for highpressure pump

mounted type)

Single-phase 100 VAC

(50 Hz)

Single-phase 100 to 115 VAC

(60 Hz)

Single-phase 200 to 230 VAC

(50/60 Hz)

Tap water

Deionized water

Ethylene glycol

aqueous solution

(15%)

Indoor use

L/min

Single-phase

200 to 230 VAC

(50/60 Hz)

Tap water

Ethylene glycol

aqueous solution

(15%)

Indoor use

Electrical

box: IP54

L/min

Mechanical seal

pump

3-phase 200 VAC

(50 Hz)

3-phase 200 to 230 VAC

(60 Hz)

3-phase 380 to 415 VAC

(50/60 Hz)

Tap water

Deionized water

Ethylene glycol

aqueous solution

(15%)

Indoor use

L/min

Outdoor

installation

IPX4

130

L/min Immersion pump

3-phase 380 to 415 VAC

(50 Hz)

3-phase 460 to 480 VAC

(60 Hz)

Outdoor

installation

IPX4

L/min

Mechanical seal

pump

3-phase 200 VAC

(50 Hz)

3-phase 200 to 230 VAC

(60 Hz)

3-phase 380 to 415 VAC

(50/60 Hz)

Tap water

Deionized water

Ethylene glycol

aqueous solution

(15%)

Indoor use

180

L/min Immersion pump

3-phase 200 VAC (50 Hz)

3-phase 200 to 230 VAC

(60 Hz)

3-phase 380 to 415 VAC

(50/60 Hz)

3-phase 460 to 480 VAC

(60 Hz)

Tap water

Deionized water

Ethylene glycol

aqueous solution

(15%)

Outdoor

installation

IPX4

L/min Magnet pump

Single-phase 100 VAC

(50/60 Hz)

Single-phase 200 VAC

(50/60 Hz)

Single-phase 230 VAC

(50/60 Hz)

Tap water

Ethylene glycol

aqueous solution

(15%)

Indoor use

L/min

Magnet pump

(Mechanical seal

pump for highpressure pump

mounted type)

Single-phase 100 VAC

(50/60 Hz)

Single-phase 115 VAC

(60 Hz)

Single-phase 200 to 230 VAC

(50/60 Hz)

Tap water

Ethylene glycol

aqueous solution

(15%)

Indoor use

Air-cooled: Option U

Water-cooled: Standard

Pending for the HRR010/050

CH1:

180 L/min Immersion pump 3-phase 200 VAC (50 Hz)

3-phase 200 to 230 VAC

(60 Hz)

3-phase 380 to 415 VAC

(50/60 Hz)

3-phase 460 to 480 VAC

(60 Hz)

CH1: Tap water

Indoor use

(400 V as standard) CH2:

16 L/min Canned pump CH2: Tap water

Deionized water

L/min Immersion pump

3-phase 200 VAC

(50 Hz)

3-phase 200 to 208 VAC

(60 Hz)

Fluorinated fluid

Tap water

Deionized water

Ethylene glycol

aqueous solution

(60%)

Indoor use

L/min Immersion pump

3-phase 200 VAC

(50 Hz)

3-phase 200 to 208 VAC

(60 Hz)

Fluorinated fluid

Ethylene glycol

aqueous solution

(60%)

Indoor use

L/min Immersion pump

3-phase 200 VAC

(50 Hz)

3-phase 200 to 208 VAC

(60 Hz)

Fluorinated fluid

Tap water

Deionized water

Ethylene glycol

aqueous solution

(60%)

Indoor use

(Only 60 Hz)

(400 V as standard)

(400 V as standard, 200 V as an option)

(Only 200 V as an option)

(400 V as standard, 200 V as an option)

(Only 230 VAC type)

For details, refer to the Web Catalog.

(UL Standards)

0 60

−20 to 40°C

20 to 90°C

−30 90

10 to 60°C

−20 to 90°C

5 to 35°C

15 to 25°C

5 to 35°C

5 to 40°C

20 to 40°C

0 60 5 to 40°C

5 to 40°C

5 to 35°C

10 to 30°C

5 to 35°C

−30 to 90°C

−20 to 90°C

[Inverter type]

[High-performance type]

[CH1]

[CH2]

Peltier-type Thermo-con Variations

Series Features Cooling

method

Temperature

stability

Cooling capacity [kW] 0.1 0.2 0.3 0.4 0.5 0.6 0.8 1.0 1.2 Thermo-con

Rack mount type

HECR Series

¡Mountable in a 19-inch

rack

Saves space by allowing

multiple pieces of

equipment to be mounted

together in a rack.

¡Learning control function

¡Low vibration, Low noise

Air-cooled

Peltier-type

±0.01 to

0.03°C

V V V V V

Water-cooled

Peltier-type V V

Thermo-con

HEC Series ¡For applications

requiring high-precision

temperature control

¡High-precision,

refrigerant-free

temperature control

equipment that uses a

Peltier device

¡Simple structure and high

reliability

¡Can easily be built into

equipment due to its

compact and low-vibration

design

Air-cooled

Peltier-type

±0.01 to

0.03°C

V V Water-cooled

Peltier-type V V V V Thermoelectric Bath

HEB Series

¡High-precision

temperature control bath

with a Peltier device

¡Compact and low noise

¡Minimal up-down

temperature distribution

with a unique agitation

method

Round type

Peltier-type

water-cooled

±0.01°C

Square type

Peltier-type

water-cooled

±0.03°C

V V

Square type

Peltier-type

air-cooled

Chemical Thermo-con

HED Series ¡Heat exchanger for direct

temperature control that

uses a Peltier device

¡Compatible with a

wide range of chemical

liquids through the use

of a fluororesin heat

exchanger

Water-cooled

Peltier-type ±0.1°C V V V Made to Order

Set temperature range [°C] Pump capacity Pump type Power supply Circulating fluid Environment International

standards

6 L/min Magnet

pump

Single-phase

100 to 240 VAC

(50/60 Hz)

0.2 to 0.8 kW

Single-phase

200 to 240 VAC

(50/60 Hz)

1 kW, 1.2 kW

Tap water

Ethylene glycol

aqueous solution

(20%)

Indoor use

10 L/min

Magnet

pump

Single-phase

100 to 240 VAC

(50/60 Hz)

Tap water

Ethylene glycol

aqueous solution

(20%)

Indoor use

23 L/min

Single-phase

100 to 240 VAC

(50/60 Hz)

0.1 kW, 0.3 kW

Tap water

Ethylene glycol

aqueous solution

(20%)

Single-phase

200 to 220 VAC

(50/60 Hz)

0.6 kW, 1.2 kW

Fluorinated fluid

Tap water

Single-phase

100 to 240 VAC

(50/60 Hz) Fluorinated fluid

Tap water

Indoor use

Single-phase

200 to 220 VAC

(50/60 Hz)

Single-phase

100 to 240 VAC

(50/60 Hz)

Tap water

Ethylene glycol

aqueous solution

(50%) — —

Single-phase

200 to 220 VAC

(50/60 Hz)

Deionized water

Chemical liquid

Indoor use SEMI Standard

S2-0706, F47-0706

(Excluding HEC006, 012)

For details, refer to the Web Catalog.

−15 60

−15 to 60°C

0 60

10 to 60°C

0 60

10 to 60°C

0 60

10 to 60°C

Accessories List

Outline HRS HRS-R HRS090 HRS100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC

Temperature Control

PID control

The deviation value between the discharge temperature (PV value) and the circulating fluid set temperature

(SV value), the integral value, and the differential value are the minimum values for temperature control.

In general, the operation of the refrigeration circuit is complex, but it provides excellent temperature stability.

V V V V V V V V V V V V V V

ON/OFF control

When the discharge temperature (PV value) is higher than the circulating fluid set temperature (SV

value), the compressor turns ON (start). And when the discharge temperature (PV value) is lower

than the circulating fluid set temperature (SV value), the compressor turns OFF (stop). The

provided temperature stability is not excellent, but the operation of the refrigeration circuit is simple.

Thermoelectric

device

(Peltier device)

There may be a slight difference in temperature between the two sides of the

Peltier device (plate type) depending on the applied direct current voltage. By

controlling the applied voltage, high-precision heating and cooling temperature

control is possible.

V V

With heater This product comes equipped with a heater suitable for the

user’s manufacturing processes (temperature rising processes). V*1 V V

Energy SavingInverter compressor This compressor can be used to control the number of rotations

according to the heat load, resulting in energy savings. V V V V*1 V

Inverter fan This cooling fan (air-cooled type) can be used to control the number

of rotations according to the heat load, resulting in energy savings. V V V

Inverter pump This pump can be used to control the circulating fluid discharge pressure

according to the user’s piping resistance, resulting in energy savings. V V *2 V V V V

Maintenance

Alarm

This product is programmed with a more than sufficient number

of alarm codes and messages to be used for failure diagnosis.

Notifications are made before any major problems occur.

V V V V V V V V V V V V V V V

With level switch

Sufficient levels of circulating fluid are necessary for retaining a

stable temperature. The built-in level switch can be used to

detect the liquid level in the tank and inform you of refills.

V V V V V V V V V V V V V V/

With fluid fill port Water can be supplied from the external fluid fill port. V V V   V  V V V V V V V V

With automatic

water fill function

By opening the user’s stopcock (for water), water can be supplied

automatically via the built-in solenoid valve, ball tap, etc.    V V  V

Safety

Anti-quake

bracket

This bracket can be used to reduce product damage in the case of an earthquake. An

anchor bolt suitable for the flooring material should be prepared separately by the user.   V V V V  *3 V  

With earth leakage

breaker with handle

This product comes equipped with an earth leakage breaker with handle

which is compliant with international standards (safety standards). V  V V V V

Drain pan (With water

leakage sensor)

The housing of the standard model has a drain pan construction (with a water leakage

sensor). The large drain pan helps prevent the overflowing of fluid in the case of leakage. V V V

With earth

leakage breaker

This product comes with a leakage breaker which is able to safely and automatically

stop the supply power in the case of a short-circuit, over current, or electrical leakage.     V   V

Drain pan set

(With water

leakage sensor)

This drain pan can be used to detect leakage before it happens.

[For the HRS (1.1 to 9 kW) and HRSH (9 kW) types]

Be sure to install and wire in combination with the attached water leakage sensor.

  

Particle filter set This set can be used to filter foreign matter from the circulating fluid.

(Nominal filtration rating: 5 μm, 75 μm)         V V

Contaminant filter This filter (Filtration: 20 μm) can be used to eliminate any dust

which is contained in the circulating fluid circuit. 

Connector cover This product can be used for protecting the connector on the rear side. 

Relief valve set This product prevents abnormal rises in circulating fluid pressure. 

Convenient Functions

Heating function

When the circulating fluid temperature is set above room temperature, it

has a sufficient heating capacity. However, the heating capacity

depends on the temperature. Consider the radiation rate and heat

capacity of the user’s equipment and check beforehand whether the

required capacity can be provided by the product.

V V V V V V V V V V V V V

With flow sensor/

flow switch

Sufficient levels of circulating fluid are necessary for retaining a

stable temperature. The built-in flow sensor and flow switch can be

used to detect the flow rate, which is then displayed on the display

panel. Adjustments can be made after the value has been confirmed.

V V V*4 V V V  

With casters The casters installed underneath the product allow for it to be easily moved to where cooling is required. V V V V V

With casters and

adjuster feet

This product comes with unfixed casters and adjuster feet.

It can be installed level even on slight inclines. / / /  V V V

Mountable in a

19-inch rack

Space saving can be realized as multiple chillers can be

mounted on a 19-inch rack (EIA Standards). V V

With feet and no rack

mounting brackets For use in locations other than racks  

Piping conversion fitting

(NPT thread or G thread)

This product can be used to exchange the Rc threads on the circulating fluid outlet

and return port as well as the facility water inlet/outlet to G threads or NPT threads. / / / / / / / /  

*1 Some models *2 Only HRR010 *3 Only when option Y is selected *4 Only CH2

V : Standard : Option : Optional accessories

Outline HRS HRS-R HRS090 HRS100/150 HRS200 HRSH090 HRSH HRSE HRR HRL HRZ HRZD HRW HECR HEC

Convenient Functions

NPT fitting An adapter is included to change the connection ports (Rc) of

circulating fluid piping and facility water piping to NPT threads.  

Circulating fluid

automatic recovery

The circulating fluid inside the piping of the user’s equipment can be recovered into a sub-tank of the thermo-chiller

by external communication or the operation display panel.

 

Power supply cable

An approximately 3 m long cable is available for users who

require a cable with a length longer than that of the standard

cable. Please use with a retaining clip (HRS-S0074).

   

Replaceable

dustproof filter set

The cleaning of a dirty (standard) dustproof filter is both

difficult and time-consuming. To eliminate the need for such

labor, disposable type filters can be used instead.

  

Communication Functions

RS-232C

The standard model can be used for one-on-one

communication with a PC, etc. Refer to the separate

Operation Manual (Communication function) for more details.

V V V V V V V V V V V

RS-485

The standard model can be used to communicate with the master

computer together with other terminal devices. Refer to the separate

Operation Manual (Communication function) for more details.

V V V V V V V V V V V V V V

Analog

communication

This is a method of communicating with external devices using voltage

output (0 to 10 V). This enables the output of PV values (measured

temperature, etc.) and the reception of SV values (set temperature), etc.

  V 

DeviceNet

communication

This product has a communication function (With DeviceNet

communication function) which allows for the use of open

networks owned by Open DeviceNet Vendor Association, Inc.

 

Digital I/O

(Contact input/output)

Input and output signals such as alarm signals, operation signals, etc.

can be retrieved by the user’s sequence control device. Refer to the

separate Operation Manual (Communication function) for more details.

V V V V V V V V V V V V V V

With external switch

inlet

This product comes equipped with an input terminal for the retrieval

of the user’s sequence control ON/OFF signals (external switch). V V V V V V V V V

For Special Applications

Applicable to

deionized water

piping

Easy-to-dissolve copper type materials are not used for the

wetted parts of the circulating fluid circuit.

Select this when using the deionized water with a

conductivity of 1 MΩ·cm or more (1 μs/cm or less).

    V*4 V

High-pressure pump

mounted

A built-in pump with a high lifting height (discharge pressure) is used.

Consider the piping resistance of the user’s equipment and check

beforehand whether the required flow can be provided by the product.

     

High-temperature

environment specification

This product makes use at ambient temperatures of up to

45°C possible. 

DI control kit/Electric

resistance control set

This product can be used to display, maintain, and control the

electric resistivity of the circulating fluid (deionized water).

The function differs according to the model. Refer to the

Operation Manual for details.

  

Electric resistance

sensor set 

Electric conductivity

control set

This set can be used to display and control the electric

conductivity of the circulating fluid.       V*4

DI filter set It is possible to retain the level of electric resistance by flowing

the circulating fluid through the ion replacement resin (DI filter).   V*4  

Insulating material for

DI filter

Insulating the DI filter helps prevent reduced cooling capacity due

to condensation and reduced heating capacity due to radiation.  

Bypass piping set

Sufficient levels of circulating fluid are necessary for

retaining a stable temperature. If the levels are insufficient,

open this bypass piping to secure the flow rate.

        V V   

Separately-installed

power transformer

Installing this transformer where the user’s power voltage

differs will allow for the conversion of the current.   

Snow protection hood

This is a stainless steel snow protection hood for air-cooled chillers.

According to the mounting direction of the snow protection hood, four

ventilation directions—front, rear, left, and right—can be selected.

  

4-port manifold 4-branching the circulating fluid allows for a maximum of 4

temperature controls with 1 thermo-chiller unit.  

Circulating Fluid60% ethylene glycol

aqueous solution

The ethylene glycol type circulating fluid can be used as is.

The fluid can be used even when diluted to 15%.              

Ethylene glycol

aqueous solution

concentration meter

This meter can be used to control the condensation of

ethylene glycol solution regularly.               

*4 Only CH2

Temperature stability ±0.1°C /

Compact

A precision temperature control method which utilizes

expansion valves and temperature sensors allowed for the

realization of a product with a high temperature stability of

±0.1°C and a small-size tank.

* The flow diagram shown

above is for standard

type HRS012 to 060.

MAir-cooled

HRSm-A-m

MWater-cooled

HRSm-W-m

Air-cooled

condenser

Ventilation

Fan

Pressure sensor

(For low-pressure refrigerant gas)

Pressure sensor

(For high-pressure refrigerant gas)

Compressor Temperature sensor

(For compressor intake)

Refrigeration circuit Circulating fluid circuit

Dryer

Level

switch

Pressure sensor

(For discharge)

Pump

Drain

port

Circulating

fluid outlet

Circulating fluid

return port

User’s equipment

(Heat source) Fluid level

indicator

Evaporator

Temperature sensor

(For return)

Temperature sensor

(For discharge)

Expansion valve B

Expansion valve A

Tank

Applicable models

Standard type/

HRS012 to 060

Standard type Environmentally resistant type /

HRS-R

Inverter type/

HRSH090

Inverter type/

HRSH100 to 300

SMC’s Unique Chiller Control

A Challenge to Downsizing

Facility water circuit

Facility

water

inlet

Facility

water

outlet Plug

Water-cooled

condenser

Water-regulating

valve

WPR

¡The compressor compresses the refrigerant gas and discharges hightemperature, high-pressure refrigerant gas.

¡In the case of air-cooled refrigeration, the high-temperature, highpressure refrigerant gas is cooled down by fan ventilation in the aircooled condenser, where it is then liquefied. In the case of water-cooled

refrigeration, the refrigerant gas is cooled by the facility water in the

facility water circuit in the water-cooled condenser, where it is then

liquefied.

¡The liquefied high-pressure refrigerant gas expands and its temperature

lowers when it passes through expansion valve A, where it vaporizes

after receiving heat from the circulating fluid in the evaporator.

¡The vaporized refrigerant gas is sucked into the compressor and

compressed again.

¡When heating the circulating fluid, the high-pressure, high-temperature

refrigerant gas is bypassed into the evaporator by expansion valve B to

heat the circulating fluid.

¡After the circulating fluid discharged from the pump is heated or cooled

by the user’s equipment, it returns to the thermo-chiller.

¡The circulating fluid is controlled to remain at a set temperature by the

refrigeration circuit. It will then be discharged to the user’s equipment

side again by the thermo-chiller.

Refrigeration circuit Circulating fluid circuit

For water-cooled refrigeration HRSm-W-m

¡The water-regulating valve opens and closes to keep the refrigerant gas

pressure consistent. The facility water flow rate is controlled by the

water-regulating valve.

Facility water circuit

Point Since the refrigeration circuit is controlled by the signals from

2 temperature sensors (for return and discharge) , precise

temperature control of the circulating fluid can be achieved.

Therefore, there is no need for a tank with a large capacity to

absorb the circulating fluid temperature difference, as high

temperature stability can be achieved even with a small-size

tank . This also contributes to space saving.

Point The combination of the precise control of expansion valve A

for cooling and expansion valve B for heating allows for high

temperature stability.

Model Size [mm] Weight Cooling capacity (60 Hz)

40 kg

47 kg

53 kg

69 kg

73 kg

136 kg

Same width for all models: 377 mm

HRS012

HRS018

HRS024

HRS030

HRS040

HRS050

HRS060

HRS090

W 377 x H 615 x D 500

W 377 x H 660 x D 500

W 377 x H 676 x D 592

W 377 x H 976 x D 592

W 377 x H 1080 x D 970

1300 W

1900 W

2400 W

3200 W

4200 W

5100 W

5900 W

9000 W

 Height: 305 mm shorter  Volume:

28% reduction HRS012

HRR012 HRS012 HRR012

615 mm

310 mm

5 Advantages of SMC Thermo-chillers

HRS/HRSH/HRR Series

HRS012/018/024 HRS030 HRS040

HRS050/HRS060

HRS090

Rack Mount Type HRR Series

1 Lightweight, Compact Applicable models

Standard type/

HRS012 to 060

Standard type

Environmentally resistant type /

HRS-R

Inverter type/

HRSH090

Inverter type/

HRSH100 to 300

Rack mount type/

HRR

Standard type/

HRS090

Triple inverter

Inverter pump

Power reducing effect of the inverter pump

Tank

Non-inverter pump Inverter pump

55 L/min

55 L/min 35 L/min

35 L/min

20 L/min

35 L/min

0.3 MPa

35 L/min

0.3 MPa

Tank

User’s

equipment

User’s

equipment

Circulating fluid pressure adjustable

0.6 kW

Power consumption

(Pump only)

* Immersion pump is used for the inverter type

HRSH100 to 300.

1.1 kW

Power consumption

(Pump only)

Applicable models

Inverter type/

HRSH090

Inverter type/

HRSH100 to 300

Inverter type/

HRSH090

Inverter type/

HRSH100 to 300

The inverter respectively controls the number of

motor rotations of the compressor, fan and pump

depending on the load from the user’s equipment.

Pump/1.1kW

Pump/0.6 kW

Compressor + Fan + Others/4 kW

Compressor + Fan + Others/2.0 kW

Compressor + Fan + Others/1.8 kW

Non-inverter

Inverter

Power

consumption

5.1kW

Reduced by 39%

with compressor and fan inverters

Power consumption 3.1kW

Reduced by 53%

with the additional pump inverter

Power consumption 2.4 kW

Discharge pressure of the circulating fluid can

be set with the operation panel. The inverter

pump automatically controls the discharge

pressure to the set pressure without adjusting

the bypass piping*1 under various piping

conditions. Power consumption can be

reduced by this control.

(Operation to the set pump operating frequency is also possible.)

*1 Bypass piping is required depending on the flow rate. Operation display panel

(Circulating fluid discharge pressure setup screen)

User’s

equipment B

User’s

equipment A

Automatically

controls the

discharge

pressure to be

stable.

When the product is used with the flow path switched for maintenance, the pressure adjusting function controls the discharge pressure to be stable. (Secure the specified minimum flow for each branch circuit.)

The pump is operated at the rated output all

the time. With the excess power consumption,

the circuit needs to bypass 20 L/min.

The motor rotation rate is controlled

to a suitable level, for the required

pressure, by the inverter pump.

Existing model Inverter pump

HRSH090

compressor

fan pump

DC inverter

DC inverter Inverter

(For the air-cooled type)

With the inverter, it is possible to operate with the same performance even with the power supply of 50 Hz.

compared with a non-inverter (HRS090)

Power

consumption reduced by 53%

Operating ratio: Ratio of 9.5 kW (with heat load) to 0 kW (without heat load) Operating ratio: 50%, with heat load of 9.5 kW all the time

Common conditions for non-inverter and triple inverter:

¡Ambient temperature: 32°C ¡Circulating fluid temperature: 20°C ¡Circulating fluid flow rate: 35 L/min at 0.3 MPa (60 Hz) ¡Heat load: 9.5 kW

Conditions for non-inverter chiller: Continuous operation of the compressor which can cool down 9.5 kW at 60 Hz. The pump shall be same as that of the HRSH. Conditions

pump

Inverter

Non-inverter

chiller

Double inverter

chiller

HRSH090

Triple inverter

2 Energy Saving

5 Advantages of SMC Thermo-chillers

Circulating fluid can be heated

without a heater.

Power supply (24 VDC)

available

Protection of the

electrical unit: IP54

Outdoor installation IPX4

Applicable models

Inverter type/

HRSH090

Inverter type/

HRSH100 to 300

Rack mount type/

HRR

Standard type/

HRS012 to 060

Standard type Environmentally resistant type /

HRS-R

Standard type/

HRS100/150

Standard type/

HRS200

Standard type/

HRS090

Applicable models

Standard type/

HRS012 to 060

Standard type/

HRS100/150

Inverter type/

HRSH090

Standard type/

HRS090

Standard type Environmentally resistant type /

HRS-R

Standard type/

HRS200

Inverter type/

HRSH100 to 300

Applicable models

Standard type/

HRS100/150

Inverter type/

HRSH100 to 300

Standard type/

HRS200

Applicable models

Standard type Environmentally resistant type /

HRS-R

Power can be supplied from the terminal block

on the rear side to external switches, etc.

The board and electric parts are located

inside the electrical box, where they can

be protected from dust particles and

water splashing.

Flow switch

Refer to the Web Catalog for details.

The heating method, which uses discharged heat, makes a

heater unnecessary.

* This is just an example diagram.

Circulating fluid Circulating fluid Compressor Compressor

Hot discharged gas

from refrigerant Cool fluid

from refrigerant

Heater

Circulating fluid Circulating fluid Compressor Compressor

Hot discharged gas

from refrigerant Cool fluid

from refrigerant

Heater

¡Ambient temperature: 5°C

¡Power supply: 200 V 60 Hz

¡Circulating fluid flow rate:

125 L/min at 0.5 MPa Conditions

¡External piping: Bypass piping

Circulating fluid temperature [°C] 10

0 10 20

Temperature increase with the

heating function∗1

Minute [Time]

30 40

*1 For HRSH250-A-20

A heater is not

required even when

the ambient

temperature is low.

IP (International Protection) is the industrial standard for

“Degrees of protection provided by outer defensive enclosures

of electric equipment (IP Code)” according to IEC 60529 and

JIS C 0920.

IPX4: No harmful influence by water splash is acceptable from every direction.

3 Heating Function

HRSH

Existing model

User’s equipment

Cable entry

IP67

Electrical box

IP54

5 Advantages of SMC Thermo-chillers

Easy maintenance with the check

display of the operation panel

Reduced maintenance hours

for the pump

No transformers required

Conforming to

international standards

4 Easier Maintenance

5 Global Compatibility

Applicable models

Standard type/

HRS012 to 060

Standard type/

HRS100/150

Inverter type/

HRSH090

Standard type/

HRS090

Basic type/

HRSE

Rack mount type/

HRR

Inverter type/

HRSH100 to 300

Standard type Environmentally resistant type /

HRS-R

Standard type/

HRS200

* Refer to the variations table.

Applicable models

Standard type/

HRS012 to 060

Standard type Environmentally resistant type /

HRS-R

Standard type/

HRS100/150

Standard type/

HRS200

Inverter type/

HRSH090

Standard type/

HRS090

Inverter type/

HRSH100 to 300

Applicable models

Inverter type/

HRSH100 to 300

Standard type/

HRS200

Mechanical seal

pump

Tank · Periodic circulating fluid leakage

check and the seal replacement

are necessary.

· Circulating fluid needs to be

exhausted when replacing the

pump.

(Europe, Asia, Oceania, Central and South America)

Power

supply

Transformers are not required even when used overseas.

Applicable to 200 to 230 VAC,

or 380 to 415 VAC

Existing model

HRSH

Step-down transformer

not required

380 VAC

380 to 415 VAC

200 VAC

fi ff

Flashing

Accumulated time

Displayed item

Alarm codes can be used for the notification

of upcoming recommended maintenance.

The codes notify you when it’s time to check the

pump and fan. Helpful for facility maintenance

Check display

The internal temperature, pressure, and operating

time of the product are displayed.

Displayed item

Circulating fluid outlet temperature

Circulating fluid return temperature

Compressor gas temperature

Circulating fluid flow rate∗1

Circulating fluid outlet pressure

Compressor gas discharge pressure

Compressor gas return pressure

Accumulated operating time

Accumulated operating time of pump

Accumulated operating time of fan∗2

Accumulated operating time of compressor

Accumulated operation time of dustproof filter∗2

Temperature Pressure

Flow rate

Operating

time

Ex. AL01 “Low level in tank” Ex. drv. “Accumulated operating time”

As the pump has no external

leakage of the circulating fluid, a

periodic check of the pump leakage

and replacement of the mechanical

seal are not necessary. There is no

need to exhaust the circulating fluid

when removing the pump.

A mechanical sealless

immersion pump is used. HRSH

Tank

Immersion pump

Existing model

*1 This is not measurement value. Use it for reference.

(Excluding standard type HRS012 to 060)

*2 These are displayed only for air-cooled refrigeration.

SEMATECH

S2-93, S8-95

SEMI Standard

S2-0703, S8-0701, F47-0200

5 Advantages of SMC Thermo-chillers

¡Dual Thermo-chiller can control

temperature for two systems

separately by one chiller. Energy

saving thanks to reduced wiring,

piping and labor, and double inverter

type.

Temperature control of

chamber electrode

CH1

CH2

Footprint reduced by 23%

HRZ010

845

0.66 m2

0.51 m2

Dual Thermo-chiller

1 unit

2 units

760

870

600

0.15 m2

reduction

HRZ

HRW

Space saving

Dual

¡Temperature stability ±0.1°C, temperature Thermo-chiller

range from –20°C to +90°C. Full array of

features and equipment.

¡A double inverter type is also available, saving

energy more effectively through use of a DC

inverter compressor and an inverter pump.

¡Circulating fluid: Fluorinated fluid, Ethylene

glycol aqueous solution 60%, Tap water/Deionized

water

¡Water-cooled type: Refrigerant-free and energy

saving type using no compressor (HRW)

¡Temperature stability:

±0.01 to 0.03°C

¡A fluororesin heat exchanger allows for the direct temperature control of

chemical liquids.

¡Industry-leading withstand pressure: 0.35 MPa

This equipment precisely controls the temperature of the

fluid in the constant temperature tank.

Users can control the temperature by placing a container in

the tank.

Chemical Thermo-con HED Series

¡Accurately controls the temperature of liquid in the

bath.

¡Temperature stability: ±0.01°C

¡Temperature distribution in the bath: ±0.02°C

High-performance Type HRZ/HRZD/HRW Series

Dual Channel Refrigerated Thermo-chiller for Lasers HRL Series

Peltier-type Thermo-con Lineup

Thermo-con HECR/HEC Series

Rack mount type HECR Series HEC Series

Thermoelectric Bath

HEB Series

Made to Order

INR

¡Temperatures for 2 fluid channel systems can be controlled individually by one chiller.

Optical system

Oscillator

CH2

CH1

Laser optical system

Laser oscillator

CH1

CH2

Dual

Thermo-chiller

HEC

HECR

HRZ

HRW

HEC

HECR

HRZ

HRW

HEC

HECR

HED

HRZ

HRW

HRZ

HRS

HRSH

HRS

HRW

HRSH

HRZ

HRR

HEC

HED

HRS

HRSH

HECR

Applications

Testers

CMP

Cooling of vacuum pumps

Cleaning machines

(Hydrocarbon-based)

Coater/Developer

Etching

Gas cylinder cabinets

Cleaning machines

Temperature control of cleaning solution

Temperature control of chamber electrode

Semiconductor

Temperature Control Equipment: Applications According to Industry

HRS

HRSH

HRR

HEC

HECR

HRS

HRR

HEC

HECR

HRS

HRR

HRS

HRSH

HRR

HEC

HRS

HRR

HRS

HRSH

HRR

HRS

HRSH

HEC

HECR

HRS

HRSH

HRL HRR

HRL

HRS-R

HRR

HRS

HRSH

HRS-R

HRR

Applications

Laser beam machines/Laser welding machines

Cooling of the laser oscillation part and power source

Laser oscillator

Ultrasonic wave

inspection machine

Machining centers

Cooling of the spindle

Laser marker

Cooling of the laser

irradiated part

Secondary battery

manufacturing processes

Laser welding

3D metal printers

Injection molding

Transmission cable

connector for fiber laser

Machine Tools

Laser

Temperature Control Equipment: Applications According to Industry

Light sensing part

X-ray tube

Cooling water

Workpiece

HEC

HECR

HEBC

HRS

HRSH

HRR

HEC

HECR

HRS

HRR

HRS

HRSH

HRR

HRS

HRR

HEC

HECR

HRS

HRSH

HRR

HRS

HRS-R

HRSH

HRR

HRS

HRSH

HRR

HRS

HRSH

HRR

X-ray (digital) instrument

Temperature control of the X-ray tube

and X-ray light sensing part

MRI

Temperature control of adhesive

and paint materials

Printing machines

Temperature control of the roller

Packaging lines (sealing of film and paper package)

Cooling of workpieces for bonding

Atomizing devices (food and cosmetics)

Temperature control of sample and device

Medical

Physical and Chemical Printing

Applications

Highfrequency

inverter

Arc welding machines

Cooling of the torch

Resistance welding machines

(spot welding)

Cooling of the welding head electrodes,

transformers and transistors (thyristors)

High-frequency induction heating equipment

Cooling of the heating coils,

high-frequency power source

and around inverters Heating coil

Welding Machines

Food Products/Packaging Machines

HRS

HRR

Temperature Control Equipment: Applications According to Industry

Pressure Switch: Monitors the pressure of the circulating fluid and facility water

3-Color Display

Digital Flow Switch

for Water

PF3W

Pressure Sensor for General Fluids PSE56fi

Pressure Sensor Controller

PSE200A, 300A, 300AC

S Coupler

Series

TLM

Material

Nylon

Polyurethane

FEP (Fluoropolymer)

Modified PTFE

(Soft fluoropolymer)

Super PFA

PFA

Tubing T fi

Stainless Steel 316

One-touch Fittings

KQG2

Stainless Steel 316

Insert Fittings

KFG2

Fluoropolymer

Fittings

S Coupler/Stainless Steel

(Stainless Steel 304)

KKA

Metal One-touch

Fittings

KQB2

Particle Filter

Flow Switch: Monitors the flow rate and temperature of the circulating fluid and facility water

Fittings

Digital Flow Switch for Deionized Water

and Chemical Liquids PF2D

4-Channel Flow Monitor PF2fi200

PVC piping

Circulating fluid

outlet

Y-strainer

User’s

equipment

User’s

equipment

Pressure Switch

Flow Switch

Valve

Circulating fluid

return port

Facility water

outlet

Facility water

inlet

Facility Water Line (Water-cooled)

Circulating Fluid Line

Pressure Switch

Particle Filter

Fittings and Tubing

For the control of pressure and flow rate:

The digital display makes these aspects visible.

Terminal block

Terminal block Power supply

(24 VDC) available

Power supply (24 VDC) available

Bypass valve

Return

Supply

Cooling area Cooling area Cooling area

User’s 3-Color Display equipment

Electromagnetic

Digital Flow Switch

LFE

Manifold

3-Screen Display High-Precision

Digital Pressure Switch

for General Fluids

ISE20C(H)

Circulating Fluid/Facility Water Line Equipment

Chiller Selection Examples Semiconductor

Series Number of

channels

Cooling

capacity*1 Set temperature Pump

capacity*1

Temperature

accuracy

Circulating

fluid

Safety

standards

Actual

equipment

HRZD

2 9.5 kW 40 L/min ±0.1°C

Fluorinated fluid

Ethylene glycol

aqueous solution

(60%) SEMI

•Etching

HRZ

1 10 kW

−20 100

−20 to 90°C

40 L/min ±0.1°C

Fluorinated fluid

Tap water

Deionized water

Ethylene glycol

aqueous solution

(60%)

SEMI

•Etching

•CMP

•CVD (MO)

•PVD

HRS

1 5.9 kW

−20 100

5 to 40°C

42 L/min ±0.1°C

Tap water

Deionized water

Ethylene glycol

aqueous solution

(15%)

(Only 60 Hz)

•Dicer

•Implant

HEC

0.6 kW

(Air-cooled)

1.2 kW

(Water-cooled) −20 100

10 to 60°C

10 L/min

(Air-cooled)

23 L/min

(Water-cooled)

±0.01°C

Tap water

Ethylene glycol

aqueous solution

(20%)

Fluorinated fluid (Only air-cooled type)

•Coater/

Developer

•CMP

•Dicer

•Cleaning

•Exposure

HED

1 0.75 kW

−20 100

10 to 60°C

– ±0.1°C

Deionized water

Chemical liquid SEMI

•CMP

•Cleaning

HRW

1 30 kW

−20 100

20 to 90°C

40 L/min ±0.3°C

Fluorinated fluid

Tap water

Deionized water

Ethylene glycol

aqueous solution

(60%)

SEMI

•Etching

•CVD

•PVD

*1 The maximum capacity is displayed.

Semiconductor Thermo-chiller Variations

−30 100

−30 to 90°C

Chiller Selection Examples Laser

Industrial High-power Laser

Laser Chiller

Laser output

[kW]

Chiller cooling

capacity [W] SMC chiller model

Up to 1,200

HRR010(-MT1)

HRS012(-MT)

HRR012(-MT)

Industrial High-power Laser

Laser Chiller

Laser output

[kW]

Energy conversion

efficiency [%]

Required cooling

capacity [W]*1

Chiller cooling

capacity [W] SMC chiller model

1 30 2,880 3,500 HRS050

40 1,800 3,500 HRS050

2 30 5,640 6,000 HRS090

40 3,600 6,000 HRS090

3 30 8,400 11,000 HRSH100

40 5,400 6,000 HRSH090

4 30 11,400 18,000 HRSH250

40 7,200 11,000 HRS150

30 14,400 15,000 HRSH200

40 9,000 11,000 HRS150

6 30 16,800 18,000 HRSH250

40 10,800 11,000 HRS150

30 19,800 24,000 HRSH300

40 12,600 24,000 HRSH300

8 30 22,800 24,000 HRSH300

40 14,400 15,000 HRSH200

9 40 16,200 18,000 HRSH250

10 40 18,000 18,000 HRSH250

Conditions: Circulating fluid temperature 20°C, Ambient temperature 40°C

*1 Required cooling capacity = (Laser output/Energy conversion efficiency –

Laser output) x 1.2

HRSH HRS HRL HRR HRS

Cooling location Oscillator Cooling location Fiber connector

Machine tools main shaft Chiller

Main shaft output [W] Motor efficiency [%] Required cooling

capacity [W]*1

Chiller cooling

capacity [W] SMC chiller model

22,500

4,764 4,800 HRS050 HRS-R (60 Hz)

20,000 4,235 4,300 HRS050 HRS050-R

15,000 3,176 3,200 HRS040-T HRS050-R

10,000 2,118 2,200 HRS040-T HRS050-R

7,000 1,482 1,500 HRS030-T HRS030-T-R

5,000 1,059 1,100 HRS030-T HRS030-T-R

Conditions: Circulating fluid temperature 20°C, Ambient temperature 25°C -T: High-pressure pump mounted

*1 Required cooling capacity = [(Main shaft output/Motor efficiency) − Main shaft output] x 1.2

Chiller Selection Examples Machine Tools

HRS HRS-R

Cooling location Main shaft

Chiller Selection Examples Welding Machines

Resistance welding machine (Spot welding) Chiller

Max. welding

current value [A]

Allowable utilization rate

[%]

Required cooling

capacity [W]*1

Chiller cooling

capacity [W] SMC chiller model

6,000

3 1,500 3,500 HRS050

5 1,944 3,500 HRS050

7 2,292 3,500 HRS050

10 2,736 3,500 HRS050

9,000

3 2,256 3,500 HRS050

5 2,904 3,500 HRS050

7 3,432 3,500 HRS050

10 4,104 5,200 HRS090

12,000

3 3,000 3,500 HRS050

5 3,864 5,200 HRS090

7 4,572 5,200 HRS090

10 5,472 6,000 HRSH090

16,000

3 3,996 5,200 HRS090

5 5,160 5,200 HRS090

7 6,096 7,000 HRSH100

10 7,296 11,000 HRS150

18,000

3 4,500 5,200 HRS090

5 5,796 6,000 HRSH090

7 6,864 7,000 HRSH100

10 8,208 11,000 HRS150

20,000

3 4,992 5,200 HRS090

5 6,444 7,000 HRSH100

7 7,620 11,000 HRS150

10 9,108 11,000 HRS150

Conditions: Circulating fluid temperature 25°C, Ambient temperature 40°C

*1 Required cooling capacity = Max. welding current value x Utilization rate x 1.2

HRSH HRS

Cooling location Transformer/Electrode

Chiller Selection Examples Food Products/Packaging Machines

Package sealing machine Chiller

Maximum current [A] Power supply voltage [V] Required cooling

capacity [W]*1

Chiller cooling

capacity [W] SMC chiller model

200

720 1,500 HRS030-T

5 1,200 1,500 HRS030-T

7 1,680 3,500 HRS050

10 2,400 3,500 HRS050

14 3,360 3,500 HRS050

25 6,000 6,000 HRSH090

Conditions: Circulating fluid temperature 20°C, Ambient temperature 40°C -T: High-pressure pump mounted

*1 Required cooling capacity = Maximum current x Power supply voltage

HRS HRS-R

Workpiece

Cooling water

Cooling location Sealing machine

Global Maintenance Network

* The names of countries and regions listed in each area are alphabetically indexed.

Americas Europe Asia

Brazil

Mexico

U.S.A.

Austria

France

Germany

Italy

Netherlands

Russia

Spain/Portugal

Turkey

U.K.

Bangladesh

China

(Beijing/Shanghai/Guangzhou Area)

Hong Kong

India

Indonesia

Japan

Malaysia

Philippines

Singapore

South Korea

Taiwan

Thailand

Quick, careful response to customers’ needs is possible thanks to a solid inventory of maintenance parts

and an experienced chiller support team capable of conducting repairs and replacements.

As SMC’s high-quality services are available to customers all over the world, you can rest assured that

you’ll have our continued support long after purchase.

Temperature Control Equipment

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