半导体设备选型册

行业合作创新与系统解决方案的领导者

固睿半导体设备，成立于2020年12月，公司以多名半导体研发、制造、零部件、设备等领域经验丰富的从业人员为核心，致力于成为领先的半导体领域核心工艺解决方案商。目前公司核心产品以晶圆段立/卧式氧化，退火，LPCVD，以及生产陶瓷基板钎焊炉，烧结炉为主，应用领域集中在半导体芯片和陶瓷基板相关生产制造。公司2025起在无锡和深圳设立双研发中心，拉动长三角和珠三角两地半导体资源协同发展，并在无锡新建2000平百级洁净间，提升公司面向半导体客户的基础能力，加速半导体提领域发展。

固睿半导体将秉承“客户至上、结果导向、持续创新、合作共赢、诚信正直”的经营理念，致力成为行业合作创新与系统解决方案的领导者。

G&DSemiconductorSystems,establishedinDecember 2020,isbuiltaroundacore teamof seasoned pro fessionalswithextensiveexperience insemiconductor R&D，manufacturing，components,andequipment. The company is dedicated to becoming a leading provider of core process solutions in the semiconductor field.Currently，thecompany'scoreproductsprimarilyinclude vertical/horizontaloxidation furnaces，annealing furnaces,andLPCVDequipmentforthewaferfabricationsegment,aswellasbrazingfurnacesand sintering furnaces for ceramic substrate production.Itsapplicationsare focused on themanufacturing processesrelatedtosemiconductorchipsandceramicsubstrates.Starting in2025,thecompanywillestablish dual R&Dcenters in Wuxi and Shenzhen.This initiative aims to leverage and synergize semiconductor resourcesacrosstheYangtzeRiverDeltaandthePearlRiverDelta.Concurrently，anew2,Ooo-square-meter Class100cleanroom is being builtin Wuxi to enhance thecompany'sfundamental capabilities inserving semiconductorclientsandaccelerate itsdevelopmentinthesemiconductorfield.

G&DSemiconductorupholdsthe business philosophyof "Customer First,Results-Oriented,Continuous Innovation,Mutualuccess,tegrityndonestystrivingtoecomealeaderiindustryobatiein novationandsystemsolutions.

LVD400 PindolaTMVacuumbrazing furnace 真空钎焊炉

设备稳定性高 Equipmenthashighstability

热场控制均匀Highuniformityforheatingcontrol

聚焦先进工艺 Focusonadvanced processes

客制化能力强 Strong customization capability

适用工艺ApplicableProcesses

陶瓷基板真空活性金属钎焊，金属热处理 (淬火、回火、退火) Vacuumactive metal brazing forceramic substrates, metalheattreatment(quenching，tempering,annealing)

设备尺寸 EquipmentDimension

5050\*3000\*5700 (W\*H\*L)mm (可定制customizable)

有效加热区 Effective Heating Zone

400×400×600 (WxH×L） mm (可定制customizable)

高温热处理炉为卧式、单室结构，其主体为双层水冷结构，用于金属材料带脱脂功能的高温真空钎焊，由炉体、加热器、风冷系统、真空系统、充气系统、水冷系统、电控及供电系统组成。

Thishigh-temperature heattreatment furnaceadoptsa horizontal single-chamber structurewitha double-layer water-cooled main body.It is used for high-temperature vacuum brazingof metallic materials with degreasing function,consistingof furnace body，heater,air cooling system，vacuum system，gas charging system，water cooling system,as well as electric control and power supplysystem.

HIP600 PindolaTM Pressure sintering furnace 压力烧结炉

设备配置丰富 Richequipmentconfiguration

热场控制均匀Highuniformityforheatingcontrol

高压控制技术High-voltage control technology

聚焦先进陶瓷 Focusonadvancedceramics

适用工艺ApplicableProcesses

真空烧结、压力烧结、气氛烧结 Applicable processes:Vacuum sintering, pressure sintering,atmosphere sintering

装料尺寸LoadingSize

600×600×1800(WxH×L)mm(多种尺寸可选multiple sizes available)

应用领域Applicationfields

功率半导体、材料热处理、科研
Powersemiconductors,materialheattreatment,scientific
research

压力范围涵盖Pressure rangecovers

1MPa，2MPa,6MPa,10MPa

压力烧结炉为卧式、单室结构，其主体为双层水冷结构，本设备应用于金属粉末的压力烧结成型、陶瓷基板的压力烧结与陶瓷结构件的烧结，由炉体、快冷系统、内胆、加热器、测温系统、真空系统、电控系统、气氛系统、冷却水系统等系统组成。

Thepressuresinteringfurnaceisahorizontal, single-chamberstructurewithadouble-layer water-cooled main body.This equipment isused for the pressure sintering and forming of metal powders, pressure sintering of ceramic substrates,and sintering of ceramic structural components. It consists of the furnace body，rapid coolingsystem,inner liner,heater,temperaturemeasurement system，vacuumsystem,electric control system,atmosphere system，coolingwater system,andothersystems.

低温焊炉（网带炉）

PindolaTM Low Temperature Brazing Furnace (Mesh Belt Furnace)

高效生产High-efficiencyproduction

控温均匀 Uniformtemperaturecontrol

氧含量在线分析Online oxygencontentanalysis

聚焦先进陶瓷 Suitableformultiplematerials

网带式连续作业Meshbeltcontinuousoperation

生产效率倍增，规模化生产首选 Doubles production efficiency, the top choice for large-scale production

工艺气体保护 Process gas protection

稳定气氛环境，焊接面光洁明亮 Stableatmosphereenvironment, resulting in brightand cleanwelded surfaces

宽度可定制Customizablewidth

标准网宽 5 0 0 { {mm } } ，灵活满足不同需求Standard mesh width of 5 0 0 { {mm } } flexiblymeetingdiverserequirements低温钎焊炉为网带结构连续式钎焊炉，本设备主要用于不锈钢、铝合金、陶瓷、可伐合金、低碳钢等材料，在工艺气体氛围中的高品质银钎焊处理。

The low-temperature brazing furnace isa continuousmesh-belt brazing furnace.This equipment is mainly used for high-quality silver brazing of materialssuch as stainless steel,aluminum alloy,ceramic, Kovaralloy，and low-carbon steel in a process gas atmosphere.

PindolaTM链带式烧结炉&氧化炉

PindolaTM Chain belt sintering furnace&oxidation furnace

温度控制均匀Uniformtemperaturecontrol

超生波在线清洗Ultrasoniconlinecleaning

工控机集成控制Industrialcomputerintegratedcontrol

高效生产 Efficient production

氧含量在线分析Online oxygen content analysis

自动化和环保 Automationandenvironmentalprotection

适用工艺 Applicable Processes

主要用于各类金属材料的预氧化、DBC陶瓷覆铜高温烧结等热处理设备。

Mainlyusedforheattreatmentequipmentsuchaspre-oxidationofvariousmetalmaterialsandhigh-temperaturesinteringof DBC ceramic copper cladding.

网带宽度范围Mesh Belt Width Range

恒温区ConstantTemperature Zones

2 0 0 \mathsf {mm } 4 0 0 \mathsf {mm } （可定制customizable)

8,10,16(可定制customizable)