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Selection chart:

Model TBR60N TBR60L TBR100 TBR200 TBRF60L TBRF75L

Mechanical specifications

Angle range(°) 360

Table diameter(mm) φ60 φ59 φ102 φ196 φ60 φ75 φ75

Transmission mechanism worm gear and worm

Worm Gear Ratio 110: 1 180: 1 60: 1

Worm gear material Durable tin bronze worm gear

Worm material and process

technology Steel, high frequency quenched

Guide mechanism Crossed-roller ring Angular contact ball

bearing Crossed-roller ring

Main body material, surface

treatment Black anodized aluminum alloy

Weight(Kg) 0.8 0.7 2 7 1.1 1.4

Shaft coupling(OD - OD1-

OD2)(mm) 19-04-05 19-04-05 20-05-05 25-6.35-6.35 19-05-05 19-05-05

Accuracy specifications

Step/half step resolution(°) ≈0.016/0.008 0.01/0.005 0.03/0.015 0.03/0.015

Highest speed(°/s)* 32.7 20 60

Repositioning accuracy(°) ≤±0.01 ≤±0.005 ≤士0.015

Backlash(°) ≤0.05 ≤0.01 ≤0.005 ≤0.005 ≤0.02

Static parallelism(mm) ≤0.1 ≤0.08 ≤0.1 ≤0.1 ≤0.08

Static clearance(µm) ≤26 ≤8 ≤6 ≤12 ≤20 ≤25

End jump(Axial runout)(µm) ≤40

Radial runout(µm) ≤25 ≤30 ≤45 ≤25

Electrical specifications

Motor brand(specification) Shinano(28

stepping motor)

Jigocheng(28

stepping motor)

Jigocheng(42

stepping motor)

Jigocheng(57

stepping motor)

Shinano(28

stepping motor)

Shinano(42

stepping motor)

Model of motor

STP28D3003-1210,

two-phase

28BYG003-C, twophase

42M-1.8D-C-10,

two-phase

57M-1.8D-C,

two-phase

STP28D3003-1210,

two-phase

SST43D2126-10,

two-phase

Step angle(°) 1.8

Insulation resistance Over 100MΩ /Min

Insulation strength 500V AC 1 minute. None abnormal

Insulation level ULB Level

Weight(Kg) 0.11 0.14 0.28 0.6 0.11 0.29

Voltage(V) 2.93 3.3 2.8 2.88 2.93 2.8

Current 1.3A/phase 1.0A/phase 1.7A/phase 2.4A/phase 1.3A/phase 1.7A/phase

Resistance 2.25±10%Ω/

phase 3.3±10%Ω/phase 1.5±10%Ω/phase 1.2±10%Ω/

phase

2.25±10%Ω/

phase 1.65±10%Ω/phase

Electrical inductance 1.25mH/phase 2.5±20%mH/phase 3.2mH/phase 4.0mH/phase 1.25mH/phase 3.6mH/phase

Holding torque 0.156N.m 0.1N.m 0.43N.m 1.0N.m 0.156N.m 0.456N.m

Braking torque 0.0032N.m

(reference value)

0.005N.m (reference

value)

0.0018N.m

(reference value)

0.04N.m

(reference value)

0.0032N.m

(reference value )

0.005N.m (reference

value)

Rotor inertia 17g.cm² 11g.cm² 57g.cm² 260g.cm 17g.cm² 56g.cm²

Operation temperature 0~+50℃ -10~+50℃ -20~+50℃ 0~+50℃

Motor operating temperature

range

80℃ Max

Driver brand and

model(optional) Moons, SR2 Moons, SR4 Moons, SR2

Electrical specifications

Type of plug for stage DB9(pin)

Type of cable for stage High flexibility cable

Length of connection cable(m) 0.2

Position-limit sensors(built-in) None

Origin-point sensors(built-in) 1×GP1S09xHCPI(Japan SHARP) 1×PM-L25(SUNX, Japan) 1×GP1S09xHCPI(Japan SHARP)

Sensor voltage DC5-24V±10%

Current consumption(mA) <60(total) <15(total) <60(total)

Control output

NMOS open

leakage electrode

outputDC5-24V

8mA or less.

NPN open controller

output

DC5～24V 50mA or

less

NPN open controller output

DC5～24V 50mA or less

NPN open

controller output

DC5～24V 50mA

or less

NMOS open

leakage electrode

outputDC5-

24V 8mA or less.

Residual voltage

0.3V or less(when

load current is 2mA)

Status of output ports DC5～24V 50mA

or less

NPN open controller

output DC5～24V

50mA or less

Output ON when

sensor is blocked

Output ON when

sensor is blocked

Output ON when

sensor is blocked

Output ON when

sensor is blocked

Maximum load capacity

Horizontal direction(Kg) 5 20 40 10 15

Vertical direction(kg) 2 5 10 4 5

Inverted direction(Kg) 5 10 4 5

*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.

51

TBR60N TBR60L

TBR100 TBR200

Dimensions:

Scale: 0° ~ 360° Scale: 0° ~ 360° Zero position Zero position

Zero position

Scale: 0° ~ 360°

Zero position

Scale: 0° ~ 360°

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TBRF60L TBRF75L

Scale: 0° ~ 360° Zero position

Scale: 0° ~ 360° Zero position

53

SIN Series Sinusoidal Mechanism Motorized Rotation Stage

Description:

SIN series is designed to meet special demand like small size,

small backlash and high repeatability frequency, which consists of

precision sinusoidal, ball screw(1mm lead), precision linear slider

guide and high rigidity aluminum alloy. The series of products are

very suitable for integration in the space, size, weight requirements of

high automation equipment, precision instruments and equipment,

but also suitable for use in small range of motion, high frequency of

reciprocating industrial production lines.

Features:

•Sinusoidal Rotating Mechanism: Designed to meet high

precision and high reciprocation requirements within a

small angle range frequency usage.

•Ultimate Small Pitch Ball Screws: to ensure higher

resolution and positioning accuracy.

•High Precision Linear-Slider Guides: Incorporates highintensity materials for greater load capacity and enhanced

durability.

•Precision Machined Surface: Provides high motion

accuracy through advanced precision machining

technology on the guide surface.

Naming rules:

Linear Slide Guide

SIN 12-60 (-ST528)

Series code：

SIN: sinusoidal rotating

mechanism, high

precision, aluminum alloy,

linear-slider guides

Angle

range：

12:±6°

18:±9°

Motor type：

None (default): two-phase

stepping motors

ST528: five-phase 28 stepping

motors

Stage surface

size:

40:φ39mm

60:φ60mm

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Selection chart:

Model SIN18-40 SIN12-60

Mechanical

specifications

Angle range(°) ±9 ±6

Table diameter(mm) φ39 φ60

Table thickness(mm) 35±0.1

Transmission mechanism Ball screws, φ6×1

Guide Mechanism(guide rail, bearing)

Translational movement: precise linear-slider guides.

Rotary movement: a pair of angular contact ball bearing

Black anodized aluminum alloy

Main body material, surface treatment Black anodized aluminum alloy

Weight(Kg) 0.35 0.5

Shaft coupling(OD - OD1- OD2)(mm) 16-3-5

Accuracy

specifications

Step/half-step resolution(°) ≈0.0179/0.009 ≈0.011/0.0055

Resolution under 20 subdivision(°) ≈0.0009 ≈0.00055

Minimum incremental motion(°) ≤0.0179 ≤0.011

Highest speed(°/s)* 35.8 22

Repositioning accuracy(°) ≤±0.005

Static clearance(°) ≤0.01

Backlash(°) ≤0.08

Axial runout(µm) ≤5

Radial runout(µm) ≤10

Electrical

specifications

Motor and its stepping angle(°) Two-phase 28 stepping, 1.8

Working current(A) 1.3

Holding torque(N.m) 78.5

Brand and model number of motor Shinano, STP-28D1003-08

Brand and model number of stepping driver(optional) Moons, SR2

Type of plug for stage DB9( pin )

Type of cable for stage High flexibility cable(Helukabel, Germany)

Length of connection cable(m) 0.2

Origin-point sensors(built-in) None

Position-limit sensors(built-in) 2×GP1S09xHCPI(Japan SHARP)

Sensor voltage DC5～24V±10%

Control output

NPN open controller output

DC5～24V 8mA or less

Residual voltage 0.3V or less(when load current is 2mA)

Status of output ports Output ON when sensor is blocked

Maximum load

capacity Horizontal direction(Kg) 4 6

*Note: Highest speed is measured with the conditions of zero-load and motors being worked at 600rpm.

55

Dimensions:

SIN18-40 SIN12-60

Zero position

Zero position

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Motorized Goniometers

GONX Series Motorized Goniometers

Description:

GONX is a precise goniometer designed for small size and high frequency use.

The main material of this series of products is hard aluminum alloy with black

anodized surface, good wear resistance and beautiful appearance. The guide

rail adopts arc crossed-roller guide, and surface is treated by Zolix unique

precision machining technology, which can guarantee high strength, strong

load capacity, good durability. The driving mechanism is driven by ball screw

and standard two-phase stepper motor, which can provide high resolution and

positioning accuracy. It's a good option for integration in the space, size, weight

requirements of high automation equipment, precision instruments.

Features:

•Equipped with durable ball screw mechanism,

it can meet the needs of high precision and

highfrequency use

•The arc crossed-roller guide is used to

cooperate with the linear guide to effectively

control the position deviation of the space

rotation centerduring swing

•With two-phase stepper motor, stable

andreliable

Naming rules:

Linear Slide Guide Curved Cross

Roller Guide

PSAG Series

TBG Series

GONX Series Small size

Small size

Middle/Big

Motorized goniometers

Ball screws

Worm gear

and worm

Worm gear and

worm

Arc crossed-roller guide

Arc crossed-roller guide or

Arc ball screw guide

Arc V-shaped guide

High precision, sinusoidal

mechanism

High precision, high rigidity, high

durability

High rigidity, high load

GONX 100-80 (-ST528)

Series code:

GONX: sinusoidal mechanism,

high precision, aluminum alloy,

Arc crossed-roller guide

Motor type:

None (default): standard

twophase stepping motors

ST528:optional five-phase 28

stepping motors

Designed

height at

center：

100:100mm

140:140mm

Table dimension：

80:80mm×80mm

57

Selection chart:

Model GONX100-80 GONX140-80

Mechanical

specifications

Designed height at center(mm) 100 140

Stage surface size(mm) 80×80

Swing angle range(°) ±4 ±3

Transmission mechanism Ball screws, φ6×1

Guide mechanism Arc crossed-roller guide+linear-slider guides

Material Black anodized aluminum alloy

Weight(Kg) 0.9 0.9

Shaft coupling(OD - OD1- OD2)(mm) 16-3-5

Accuracy

specifications

Step resolution(°) 0.0025 0.0018

8-fine-subdivision resolution(°) ≈0.0003 ≈0.0002

Highest speed(°/s)* ≈5.03 ≈3.72

Repositioning accuracy(°) ≤±0.001

Static clearance(°) ≤0.004 ≤0.003

Backlash(°) ≤0.004 ≤0.003

Swing accuracy at rotation center(mm) ≤0.01

Electrical

specifications

Motor and its stepping angle(°) Two-phase 28 stepping motor, 1.8

Model of motor STP-28D1003-08

Working current(A) 1.3

Torque of motor(N-m) 0.079

Brand and model number of stepping driver(optional) Moons, SR2

Type of plug for stage DB9(pin)

Type of cable for stage High flexibility cable(Helukabel, Germany)

Length of connection cable(m) 0.2

Position-limit sensors(built-in) 2×GP1S09xHCPI(Japan SHARP)

Origin-point sensors(built-in) 1×GP1S09xHCPI(Japan SHARP)

Sensor voltage(V) DC5~24V±10%

Current consumption(mA) <60(total)

Control output

NPN open controller output

DC5～24V 8mA or less

Residual voltage 0.3V or less(when load current is 2mA)

Status of output ports Output ON when sensor is blocked

Maximum load

capacity

Horizontal direction(Kg) 4 5

Inverted direction(Kg) 1.5

Vertical direction(Kg) 2

*Note: Highest speed is measured with the conditions of zero-load and motors being worked at 600rpm.

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GONX100-80 GONX140-80

Dimensions:

59

Description:

Zolix's TBG series motorized goniometers are designed for the applications which

small size and high operation rate are needed. Hard black anodized aluminumalloy are employed as main body material to present good wear-resistance and

excellent appearance. It is arc V-shaped ball guides that provide higher strength,

higher load capability and longer-term durability. Worm, tin-bronze-made worm

gear and standard two-phase stepping motors are used in driving mechanism to

offer higher resolution and positioning accuracy. This series of rotation stages

are suitable for being integrated in automation equipment and instruments in

which there are strict requirements of space, dimension and weight. Another

suitable application scenario is industrial production lines which limited motion

space and high repetition rate.

TBG Series Motorized Goniometers

Features:

•The driving mechanism utilizes a finely

ground worm and worm gear. The worm

gears, made from tin-bronze, offer

enhanced long-term durability.

•Smooth operation is ensured by the use of

an arc crossed-roller guide.

Naming rules:

Worm and Gear Curved Ball Guide

TBG 100-80 （-ST542）

Series code:

TBG:wear-resistant tin

bronze-made worm gears,

precise, aluminum alloy, arc

V-shaped ball guide.

Designed height

at center：

45:45mm

80:80mm

100:100mm

Dimension of table：

60:60mm×60mm

80:80mm×80mm

Motor type：None (default):

standard two phase stepping

motorsST542: optional fivephase 42 stepping motor

60 www.zolix.com.cn 56370168 10 86 Tel: +

Selection chart:

Model TBG45-60 TBG80-60 TBGX100-80 TBGX140-80

Mechanical

specifications

Designed height at center(mm) 45 80 100 140

Stage surface size(mm) 60×60 80×80

Angle range(°) ±10 ±8 ±8 ±6

Worm gear/worm transmission ratio 159: 1 247: 1 299: 1 399: 1

Guide mechanism Arc V shaped ball guide Arc crossed-roller guide

Worm gear material Wear-resistant tin bronze

Material and process technology of worm Steel, high-frequency quench

Main body material, surface treatment Black anodized aluminum alloy

Weight(Kg) 0.9 1.2

Shaft coupling(OD - OD1- OD2)(mm) 16-5-5 19-5-5

Accuracy

specifications

Step resolution(°) ≈0.011 ≈0.007 ≈0.006 ≈0.0045

8-fine-subdivision resolution(°) ≈0.001 ≈0.0009 ≈0.0007 ≈0.0005

Highest speed(°/s)* ≈22 ≈14 ≈12 ≈9

Repositioning accuracy(°) ≤±0.005

Static clearance(µm) ≤7 ≤10 ≤12 ≤15

Backlash(°) ≤0.01

Thickness(mm) 35 40

Swing accuracy at rotation center(mm) ≤0.01

Electrical

specifications

Stepping motor and its stepping angle(°) Two-phase 42 stepping motor, 1.8

Working current(A) 1.7

Torque of motor(N-m) 0.456

Model of motor SST43D2126-10

Brand and model number of stepping

driver(optional) Moons, SR2

Type of plug for stage DB9(pin)

Type of cable for stage High flexibility cable(Helukabel, Germany)

Length of connection cable(m) 0.2

Position-limit sensors(built-in) 2×GP1S092HCPI(Japan SHARP)

Origin-point sensors(built-in) 1×GP1S092HCPI(Japan SHARP)

Voltage of power supply for DC5~24V±10%

sensors(V) <60(total)

Current consumption(mA) NPN open controller output, DC5～24V 8mA or less

Residual voltage 0.3V or less(when load current is 2mA)

Control output Output ON when sensor is blocked

Maximum load

capacity

4 5 4 5

1.

Horizontal direction(Kg)

Vertical direction(Kg) 5 2.5 1.5 2.5

2 3 2 3

*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.

Inverted direction(Kg)

61

Dimensions:

TBG45-60

TBGX100-80

TBG80-60

TBGX140-80

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Description:

PSAG series motorized goniometers are made of hard black

anodized aluminum alloy which presents excellent appearance.

High precise worm gear/worm and arc V-shaped guides are key

parts of guiding mechanism. This combination guarantees higher

strength, higher load capability and better durability.

PSAG Series Motorized Goniometers

Features:

•Fine grinding worm gear/worm offers higher positioning

accuracy.

•Arc V-shaped ball guide offers higher loading capability.

•Standard two-phase stepping motors are stable and reliable,

with self-lock function.

Naming rules:

Worm and Gear Curved Ball Guide

PSAG 15-130

Series code：

PSAG: worm gear and

worm, standard precision,

arc V-shapped ball guide

Designed height at center:

130:130mm

195:195mm

250:250mm

370:370mm

Swing angle

range:

15:±15°

63

Selection chart:

Model PSAG15-130 PSAG15-195 PSAG15-250 PSAG15-370

Mechanical

specifications

Stage surface size(mm) 120×130 120×180 250×250 250×340

Swing angle range:(°) ±15

Overall height(mm) 65±0.1 65±0.1 110±0.1 155±0.1

Worm gear/worm

transmission ratio 320: 1 450: 1 610: 1 870: 1

Guide mechanism Arc V-shaped ball guide

Worm gear material Brass

Material and process

technology of worm Steel, high-frequency quench

Main body material,

surface treatment Black anodized aluminum alloy

Weight(Kg) 3.5 4.3 14.8 30

Shaft coupling(OD -

OD1- OD2)(mm) 20-5-8 30-6.35-10

Accuracy

specifications

Step resolution(\") 20.25 14.4 10.62 7.45

8-fine-subdivision

resolution(\") ≈2.5 ≈1.8 ≈1.32 ≈0.93

Highest speed(°/s)* 11.25 8 ≈5.9 ≈4.1

Electrical

specifications

Motor and its stepping

angle(°) 2-phase 42 stepping motor, 1.8 2-phase 57 stepping motor, 1.8

Model of motor 42M-1.8D 57BYG250CIl

Working current(A) 1.7 2.4

Torque of motor(N-m) 0.42 1.72

Brand and model

number of stepping

driver(optional)

Moons, SR2 Moons, SR4

Type of plug for stage DB9( pin )

Position-limit

sensors(built-in) 2×KX-EE-SX672 2×KX-SS-5GL2

Origin-point

sensors(built-in) 1×PIITR8104 /

Voltage of power supply

for sensors(V) DC5~24V±10%

Current

consumption(mA) <60(total)

Control output

Position-limit sensors(built-in): dry-contact

output;

Originpoint sensor: NPN open controller output,

DC5～24V 8mA or less. Residual voltage 0.3V or

less(when load current is 2mA)

Position-limit sensors(built-in): dry-contact

output

Status of output ports

Position-limit sensors(built-in): output ON when

sensor is triggered; Origin-point sensor: output

OFF when sensor is blocked

Position-limit sensors(built-in): output ON when

sensor is triggered

Maximum load

capacity Horizontal direction(Kg) 20 30

*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.

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Dimensions:

PSAG15-250 PSAG15-370

PSAG15-130 PSAG15-195

65

2D- or 3D Motorized Alignment Stages

Motorized XY Series All-In-One Two-Axis Stages

Description:

XY series products are the two-dimensional integral alignment

platform developed by Zolix to meet the requirements of highprecision and high use frequency scanning of workpieces on

industrial production lines. XY series has completely replaced

the old TSAW and MScope series products. XY series adopts

cross roller guide rail, ball screw drive, integral design, which can

effectively improve the orthogonality and motion accuracy. The

center is designed with a light hole, and the light hole can also

be equipped with glass or aluminum alloy cover plate to realize

transmission and reflection scanning or positioning requirements.

Features:

•Using ball screws to meet the requirement of high precision

and high repetition operations.

•Better motion accuracy is guaranteed by employing

crossed-roller guide

•It features a rectangular light-through hole, with optional

glass or aluminum alloy cover

•Equipped with standard two-phase stepping motor, fivephase stepping motor or servo motor are optional

Naming rules:

XY 120 120(-NH)(-ST528)

X-axis travel

range:

50:50mm

120:120mm

Motor type:

None (default):standard two-phase

stepping motors

ST5xx:Optional five-phase stepping

motors.xx refers to model number of

motors

ASPx: Optional Panasonic servo

motors. x refers to power code of servo

motors Note: partial products can not

employ servo motors

Series code：

XY: All-in-one XY

two-axis stages

Y-axis travel range：

50:50mm

120:120mm

XYR 200 230 (S)(-CH)(-ST528)

Dimension of table：

150:150mm×150mm

200:200mm×200mm

Type of motors:

None (default):standard two-phase

stepping motors

ST5xx:Optional five-phase stepping

motors.xx refers to model number of

motors

ASPx: Optional Panasonic servo

motors. x refers to power code of servo

motors Note: partial products can

not employ servo motors

Series code：

XYR: all-in-one XY threeaxis stages

Central light-through

hole

None (default): No hole

CH:There is a central

light-through hole

Central light-through hole

and covers:

None (default): central hole,

without any cover.

GC: central hole with glass

cover

AC:central hole with

aluminum-alloy cover

NH: No central hole

Baseplate dimension：

210:210mm×210mm

230:230mm×230mm

400:400mm×400mm

Main body material:

None (default):black anodized

aluminum-alloy

S: stainless steel

XYR200230-(L) (S)(-CH)(-ST528)

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Model XY5050 XY120120

Mechanical

specifications

Travel range( mm ) X axis: 50

Y axis: 50

X axis: 120

Y axis: 120

Stage surface size(mm) 125×125 280×280

Central light-through hole

dimension(mm) 60×64 188×188

Light-through dimension at extreme

position(mm) 35×47 128×128

Transmission mechanism precision ball screw, φ6×1 precision ball screw, φ16×4

Guides(guiding mechanism) crossed-roller bearing guides crossed-roller bearing guides

Main body material, surface treatment Black anodized aluminum alloy

Shaft coupling(external diameterdiameter of aperture 1-diameter of

aperture 2)(mm)

13-3-5 20-5-10

Weight(Kg) 2.2 7

Accuracy

specifications

Resolution(step/half-step)(µm) 5/2.5 20/10

20-fine-subdivision resolution(µm) 0.25 1

Highest speed(mm/s)* 10 40

Repositioning accuracy(µm) ≤±1.5 ≤±3

Backlash(µm) ≤3 ≤5

Static parallelism(mm) ≤0.1

Dynamic straightness(µm/100mm) ≤10

Dynamic parallelism(µm) ≤25

Error on orthogonality(µm) ≤15 ≤60

Electrical

specifications

Brand and model number of motor Shinano, STP-28D1003-08 Shinano, SST43D2126

Working current(A) 1.3 1.7

Holding torque of motor(N·m) 0.0785 0.456

Brand and model number of stepping

driver(optional) Moons, SR2

Type of plug for stage DB9(pin) DB9(pin)

Type of cable for stage High flexibility cable(Helukabel, Germany)

Length of connection cable(m) 0.2

Position-limit sensors(built-in), for each

axis 2×GP1S09xHCPI(Japan SHARP) 2×PM-L25(SUNX, Japan)

Origin-point sensors(built-in), for each

axis 1×GP1S09xHCPI(Japan SHARP) /

Voltage of power supply for sensors(V) DC5~24V±10%

Control output

NPN open controller output.

DC5～24V 8mA or less

Residual voltage 0.3V or less(when load

current is 2mA)

NPN open collector output；

DC5~24v 50mA or less

Status of output ports Output ON when sensor is blocked

Maximum load

capacity Vertical direction(Kg) 4 20

*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.

Selection chart:

67

Dimensions:

XY5050 XY120120

68 www.zolix.com.cn 56370168 10 86 Tel: +

XYR Series All-In-One Three-Axis Stages

Description:

XYR series alignment stages are one kind of three-axis parallel

alignment stages to solve the requirements of high-precision, highreuse frequency alignment, bonding and fitting of workpieces on

industrial production lines. Each XYR alignment stage is composed of

four sets of modules on the top surface, the bottom surface and the

middle. Each set of modules is guided by crossed-roller guide and

crossed-roller bearing. The belt drive module(3 sets) is equipped with

small lead ball screw and a standard stepper motor, or a five-phase

stepper motor or servo motor. A light-though hole or no through hole

in the center can be designed according to the actual needs, which

can realize the transmission and reflection alignment requirements

respectively.

Features:

•Using ball screws to meet the requirement of high

precision and high repetition operations.

•Better motion accuracy is guaranteed by employing

crossed-roller guides and bearings.

•Standard modular-design principles present better

uniformity of parts and shorter delivery time of

products.

•The center can be designed with light-through hole or

without light-through hole to fit different applications.

•Equipped with standard two-phase stepping motor,

five-phase stepping motor or servo motor are optional.

Naming rules:

XY 120 120(-NH)(-ST528)

X-axis travel

range:

50:50mm

120:120mm

Motor type:

None (default):standard two-phase

stepping motors

ST5xx:Optional five-phase stepping

motors.xx refers to model number of

motors

ASPx: Optional Panasonic servo

motors. x refers to power code of servo

motors Note: partial products can not

employ servo motors

Series code：

XY: All-in-one XY

two-axis stages

Y-axis travel range：

50:50mm

120:120mm

XYR 200 230 (S)(-CH)(-ST528)

Dimension of table：

150:150mm×150mm

200:200mm×200mm

Type of motors:

None (default):standard two-phase

stepping motors

ST5xx:Optional five-phase stepping

motors.xx refers to model number of

motors

ASPx: Optional Panasonic servo

motors. x refers to power code of servo

motors Note: partial products can

not employ servo motors

Series code：

XYR: all-in-one XY threeaxis stages

Central light-through

hole

None (default): No hole

CH:There is a central

light-through hole

Central light-through hole

and covers:

None (default): central hole,

without any cover.

GC: central hole with glass

cover

AC:central hole with

aluminum-alloy cover

NH: No central hole

Baseplate dimension：

210:210mm×210mm

230:230mm×230mm

400:400mm×400mm

Main body material:

None (default):black anodized

aluminum-alloy

S: stainless steel

XYR 200 230 - (L) (S)(-CH)(-ST528)

台面尺寸：

150：150mm×150mm

200：200mm×200mm

300：300mm×300mm

电机类型：

无(默认)：标配二相步进电机

ST5xx：配五相步进电机,xx为型号代码

ASPx：配松下伺服电机，x为功率代码

注：部分产品无法配伺服电机

系列代码：

XYR：整体三维对位平台

中心孔：

无(默认)：无中心孔

CH：有中心孔

底板尺寸：

210：210mm×210mm

230：230mm×230mm

400：400mm×400mm

主体材料：

无（默认）：铝合金，黑

色阳极氧化

S：不锈钢

无：交叉滚柱导轨

L：线性滑块导轨

69

Selection chart:

Model XYR150210 XYR200230 XYR300400-CH

Mechanical

specifications

Travel range for X- and Y-axis(mm) ±4.5 ±10 ±15

Rotation angular range for θzaxis(°) ±5

Stage surface size(mm) 150×150 200×200 300×300

Base plate dimension(mm) 210×210 230×230 400×400

Overall height(mm) 62.5 76 98

Transmission mechanism precision ball screw, φ8×2

Guide mechanism crossed-roller bearing guide

Main body material, surface

treatment Black anodized aluminum alloy

Weight(Kg) 6 8 15

Accuracy

specifications

Resolution of XY axis(step/halfstep)(µm) 10/5

20-fine-subdivison resolution of

XY axis(µm) 0.5

Repositioning accuracy(µm) ≤±3

Static parallelism(mm) ≤0.03 ≤0.04 ≤0.05

Dynamic parallelism(µm) ≤20 ≤30

Highest speed(mm/s)* 20

Electrical

specifications

Motor and stepping angle(°) 2-phase 28 stepping motor,

1.8 2-phase 42 stepping motor, 1.8

Brand and model number of motor Shinano, STP-28D1003-08 Shinano, SST43D2126-10

Working current(A) 1.3 1.7

Holding torque of motor(N·m) 0.0785 0.456

Brand and model number of

stepping driver(optional) Moons, SR2

Type of plug for stage 1×DB9(pin)

Type of cable for stage High flexibility cable(Helukabel, Germany)

Length of connection cable(m) 0.2

Position-limit sensors(built-in), for

each axis 2×GP1S09xHCPI(Sharp, Japan) 2×PM-L25(SUNX, Japan)

Origin-point sensors(built-in), for

each axis 1×GP1S09xHCPI(Sharp, Japan) 1×PM-L25(SUNX, Japan)

Voltage of power supply for

sensors(V) DC5~24V±10%

Control output

NPN open controller output

DC5～24V 8mA or less

Residual voltage 0.3V or less(when load current is 2mA)

NPN open controller

output

DC5～24V 8mA or less

Status of output ports Output ON when sensor is blocked

Algorithms and formulas on multiaxis motion Can be provided(Free)

Software for stage control and Can be provided(Extra charge needed)

Maximum load

capacity Horizontal direction(Kg) 20 30 50

*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.

70Tel: +86 10 56370168 www.zolix.com.cn

Dimensions:

XYR150210 XYR200230

XYR300400-CH

71

HXP High Precision Hexapod

Decription:

HXP high precison hexapod is is mainly used for high-precision six-degree-of-freedom adjustment, and is particularly suitable for

spacial precision alignment, micro-device processing and assembly, optical communication device core adjustment, wafer inspection

and other occasions.

Structurally, the main body adopts six push rods + double Hook joint structure, which has the characteristics of strong rigidity, high

repeatability, and can be installed in any position. The push rod can be selected with an absolute encoder or an incremental encoder.

The push rod motor with an absolute encoder has the ability to maintain position information after power failure, and does not

need to be reset after restart. The motor drive system uses the standard industrial bus EtherCAT for communication, which has high

reliability and high communication efficiency, and is compatible with mainstream motion control systems on the market.

The control system and software support various Euler angle space transformation formats, support robot operation space coordinate

system management(including the setting and conversion of the world coordinate system, workpiece coordinate system(64 groups),

robot installation coordinate system, robot drive coordinate system, and robot tool coordinate system(64 groups)), support load

simulation, have robot space calibration function, support 3D posture simulation, teaching program and other functions. Provide

secondary development package, which can be integrated into system equipment according to actual application.

Naming rules:

HXP High Precision Hexapod

HXP – 824 A

Series code：

HXP：Hexapod

Product code Encoder type：

A：Absolute encoder

R：Incremental encoder

None：without encoder

72Tel: +86 10 56370168 www.zolix.com.cn

Hexapod Parameters

*Note: Maximum travel of space

**Note: Measured typical value

Controller Parameters

Drawing:

Drawing of Hexapod: Drawing of conroller:

Controller model TMC-NET-HXP

Rated voltage(V) AC 220

Rated current(A) 1.5

Rated power(W) 350

Working temperature(℃) 0 ～ +55

Type of each axis

Ether CAT/RTE X/6 d iffer ential pulse

axe(The output port can be equipped

with 6 single-ended pulse axes)

Internal IO portn number

24 inputs and 12 outputs (with

overcurrent protection and built-in

expansion)

Internal ADDA number 2-channel AD, 2-channel DA(0-10V,

built-in expansion)

Maximum expansion AD/DA 256 AD, 128 DA

Number of pulses 64

Encoder Bits 64

Speed acceleration digits 64

Pulse maximum rate 10Mhz

Number of motion buffers

per axis 4096

Array Space 640000

Program Space 8000Kbyte

256MByte 256MByte

Communication Interface

External: Ethernet

Built-in expansion: RS232, RS485,

Ethernet, USB, CAN, RTEX, EtherCAT

Max. height 186mm

Min. height 153mm

Height of

the original

position

169.7±0.1

mm

Model HXP-824A

Travel X, Y(mm)* ±34

Travel Z(mm)* ±15

Travel θX, θY(°)* ±11

Travel θZ(°)* ±25

Push rod resolution(µm) 0.25

Min incremental motion X, Y, Z(µm)** 1

Min incremental motion θX, θY, θZ °** 0.001

Backlash X, Y(µm)** 3

Backlash Z(µm)** 1

BacklashθX, θY(\")** 10

Backlash θZ(\")** 15

Uni-repeatability X、Y(µm)** ±0.5

Uni-repeatability Z(µm)** ±0.3

Uni-repeatability θX, θY(\")** ±2

Uni-repeatability θZ(\")** ±2.5

Highest speed of push rod(mm/s ) 80

Standard speed of push rod(mm/s ) 40

Horizontal load(Kg) 20

Load in any direction(Kg) 2.5

Motor type Step-servo motor

Working temperature(℃) +10 ～ +40

Body material SUS/Aluminium alloy

Weight(Kg) 7

Cable length(m) 2

73

Semiconductor Wafer Micro-Operation And Inspection Equipment

Custom Automation Equipment

Description:

This platform is designed by Zolix for semiconductor wafer microoperation and inspection, which consists of: semiconductor

wafer holder unit, semiconductor wafer alignment unit, machine

vision unit and micro-manipulator unit, and equipped with the

main development of stable motion control system and machine

vision software. A large variety of standard and custom options

are available to meet specific process requirements like wafer

clamping, alignment, transfer, cleaning, inspection and other

functions.

Features:

•The system includes a variety of clamping and alignment

structure, which can be customized according to the actual

needs from customers.

•Secondary development interfaces are available for control

system and machine vision software.

•Specific effective operations will be taken to be compatible with

different wafer structures, different Mark point graphics.

•Support multi-dimensional micro-step adjustment of

semiconductor wafers.

•Multi-station configuration, higher work efficiency

Specification: (The following indicators are for reference, please contact us for the final parameters)

Indicators Data

Machine vision resolution(µm) 0.1

Microscope magnification 0.5~4.5

Camera resolution 2048×1536

Maximum frame rate(fps) 15

Camera type monochrome

Light source Monochromatic coaxial light source

Mark point recognition repeatability(µm) 0.1

Mark point recognition alignment accuracy(µm) <0.5

Stage travel range of rough localization in X-axis(mm) 400

Stage travel range of rough localization in Y-axis(mm) 200

Repeatability accuracy of rough localization(µm) 1

Resolution of rough localization(µm) 士1

Stage travel range of fine localization in X-axis(mm) 10

Stage travel range of fine localization in Y-axis(mm) 10

Stage travel range of fine localization in Z-axis(mm) 20

Fine alignment linear motion unidirectional repeatability(µm) ±1

Fine alignment linear motion resolution(µm) 0.1

Stage travel range of fine alignment in θZ axis(°) 5

Number of wafer processing station(set) 2

Number of wafer vacuum adsorption channels 4

74Tel: +86 10 56370168 www.zolix.com.cn

Controller selection recommendation for motorized stage:

Motorized stage

Controller model

TMC-USB MC600 ZC300

Linear motorized stage

LAK ●

CXP/CXPF ● ● ●

KA ● ●

PA ● ● ●

LA ● ● ●

TSAxx-B ● ● ●

TSAxx-C ● ● ●

Vertical motion

motorized stage

CZF ● ● ●

TBZF ● ● ●

CXZ ● ● ●

PSAV ● ● ●

KA-Z ● ●

PA-Z ● ● ●

Motorized rotation stage

TBRK/TBRU ● ●

TBR/TBRF ● ● ●

SIN ● ● ●

Motorized

goniometer

GONX ● ● ●

TBG ● ● ●

PSAG ● ● ●

All-in-one two

axis stage

XY ● ● ●

XYR ●

Note:

● Means suitable ；

* Based on the specific model；

○ Not fully applicable；

Description:

If not specified, the conversion cable between the stage and the controller is provided by the controller；

Controller

75

Description:

Structure description:

Front panel

•Emergency stop switch: After pressing the emergency stop

switch, all control axes will stop.

•Power indicator: When the main power switch is turned on,

the power indicator will turn on.

• USB port: Connects to a PC through this port.

The control software is developed based on LABVIEW, which is easy to operate

and achieve secondary development to be integrate with the user's original system.

After selecting the model type, user can operate the stages directly since Zolix

already collected products data inside the controller.

The interactive interface can display the operating parameters of each axis at the

same time, and the operation is intuitive without frequent switching. It can operate

a certain axis independently, and can also be combined with multiple axes. It can

replace PLC directly in function. It can meet the needs of automatic production line

and automatic experimental equipment.

Rear panel

This is TMC-USB-1, 2, 3, 4-S242, TMC-USB-1, 2, 3, 4-S257,

TMC-USB-1, 2, 3, 4-S528, TMC-USB-1, 2, 3, 4-S357

controller rear panel.

Rear panel

This is TMC-USB-1、2、3、4-ASP1, TMC-USB-1、2、3、

4-ASP2 controller rear panel.

Rear panel

This is TMC-USB-1、2、3、4-S286 controller rear panel.

Rear panel

This is TMC-USB-1、2、3、4-LMP5, TMC-USB-1、2、

3、4-LMC10 controller rear panel.

TMC-USB Series Controllers

Naming rules: TMC-USB -x -xxx

TMC-USB:

USB version

full function controller

Total quantity of

axis controlled:

1: 1 axis

2: 2 axis

3: 3 axis

4: 4 axis

Type of motor that can be adapted:

S242：2 -phase 42（or less）stepper

motor

S257：2-phase 57 stepper motor

S286：2-phase 86 stepper motor

S528：5-phase oriental stepper motor

ASP1：Ac servo motor, panasonic 100w

ASP2：Ac servo motor, panasonic 200w

LMC10: Standard linear motor driver,

driving current 10A

S357：3-phase 57 stepper motor

76Tel: +86 10 56370168 www.zolix.com.cn

Main specifications:

Basic function

Output of single controlling card Pulse control of 2-or 4-channel stepping motor, optocoupler for isolation

Maximum output frequency 4MHZ

Error on pulse output frequency <0.1%

Interpolation Linear-interpolation of 2 to 3 random axis; Circle-interpolation of 2 random axis

Continuous interpolation fuction Yes

Type of acceleration/deceleration Linear

Digit of logic counter forpositioning 32

Capability of real-time-changing of speed

during motions Yes

Parameters can be read during motions Logic position, real position, driving speed, acceleration

Position detection of eachaxis Input ports provided for independent left- and right-side-limit sensors and origin-point sensor, for

each axis

Inputs Up to 8-channel optocoupler input for each axis

Inputs of encoder Pulsed optocoupler inputs for A- and B-phase of encoder

Outputs Up to 8-channel optocoupler output of open-collector for each axis

Inputs

Inputs of encoder 220V AC +/- 10% 45-65Hz

Outputs <1KW

Working temperature range 0℃~50℃

Storage temperature range -20℃~80℃

Working humidity range 20%~95%

Storage humidity range 0%~95%

77

There are two models in this series:

•MC600-2B/4B, for two-phase stepping motors

•MC6003P-2B/4B, for three-phase stepping motors

Main characteristics:

•32-bit DSPs employed

•oAbsolute- and relative-position control functions

•Combination controling of muli-stages

•0ffer four kinds of controling units: pulse number, angle, mm and um

•0fffer close-cycle controling functin by using external grating rulers

•Provide controling of initial speed, constant speed and accelerationspeed separately

•Can setup an arbitrary position as customer-defined origin point

•Real-time readout of status parameters such as logicposition, true position, driving speed and acceleration speed

•16-channel l0s provides enough host- and slave-controllingfunctions

•240*180 iquid-crystal display pane

•Controling parameters can be saved before turn down, easyfor next operation

•Controling function of optional handlesZolx MC600 contrdl software provided

MC600 series products are high-performance controllers designedand manufactured by Zolix. They employ 32-bit DSPs

to realize 3-axis linearinterpolation and 2-axis circle interpolation with closed-cycle feedback witheach axis. They can

be operated with a built-in SD cards which means that hostcomputer is not a necessary part in the controling systems.

MC600 series products can be used for the controlling of motorized inearstages, rotation stages and goniometers. Drivers of

stepping motors and servomotors can be installed inside of MC600 controlers to provide higher operationreliability. They also ensure

customers friendly HMl, ful function of parameterssetting and fexible lOs.

MC600 Series Controllers

78Tel: +86 10 56370168 www.zolix.com.cn

Front panel:

Rear panel:

Model name Number keys Emergency switch

LCD Screen Menu key

Power plug USB RS-232 interface Fan

Power switch I/O interface Motor interfaces Grating encoder interface Model number

Motion control keys Control handle interface

Selection chart:

Model MC600-4B MC600-2B MC6003P-4B MC6003P-2B

Description 4-axis two-phase stepper

motor

2-axis two-phase stepper

motor

4-axis three-phase stepper

motor 2-axis three-phase stepper motor

Electrical

specifications

two-phase stepper motor(24V, 3.5Amax) three-phase stepper motor(24V, 5.8Amax)

Open loop or closed loop

400kHz pulse frequency

Maximum 256 subdivisions Maximum 51200 pulses per revolution

Motion control

specifications

32 bit, 150MHz DSP processor

Digital PID servo control

Trapezoidal speed control

Point to point, synchronous/asynchronous motion

Point mode, incremental mode

3-axis linear interpolation and 2-axis circular interpolation

Sensor Origion point sensor, negative limit switch and positive limit switch

Optional

accessories Joystick

Software kit ZolixMC600 control software

MC600 control software

Communication

interface RS-232, USB2.0

I/O interface 16 bit I/O(8 TTL inputs, 8 open collector outputs)

Memory 512KB Flash Non-Volatile Firmware

Screen LCD, 240×128 matrix, 105mm×56mm

Power supply and

power

115/220v, 60/50Hz, 400W(max)

Dimensions 440×395×145mm

Weight 7.5Kg max

fifffflffi

fifffl

I/O

USB RS-232

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LCDfiffffl ffifl











79

ZC300 series controller is a new generation of 1 to 3 axis point to point position control system launched by Zolix.Built-in motor

driver with excellent drive performance, friendly user-interface, multiple functional parameters, modbus communication protocol

control instructions, making the system integration more simple and efficient.

ZC300 Series Controllers

Main specifications:

Basic function

Number of controlled axis 1～3 axis

Output frequency range 15Hz~65KHz

Acceleration and

deceleration mode Trapezoidal acceleration and deceleration

Screen LCD, 128×64

Communication interface USB、RS485(optional)

Signal detection Each axis has independent left and right limits and origin point detection signal sensor input ports

I/O input 3 optocoupler isolated inputs(optional)

I/O output 3 open collector optocoupler isolated output(optional)

Dimensions 344mm×329mm×134mm

Weight ≤6Kg

Usage environment

Power supply 180～264VAC

Operation temperature 0℃～60℃

storage temperature -20℃～80℃

Operation humidity 20％～85%

Storage humidity 0%～95%

Naming rules:

Description:

ZC300 -xx -RI

Series code Number of

controlled axis：

1 : 1 axis

2:2 axis

3:3axis

Compatible motor：

A:2-phase 42 stepper motor

B:2-phase 57 stepper motor

RS485

I/O signal

80Tel: +86 10 56370168 www.zolix.com.cn

1 2 4 5

3

Front panel

1.128X64 lattice backlit, wide-angle LCD display

2.Menu control key

3.Motion control keys and numeric keys

C key is backspace and used for rewriting the input

M key is used to exit the menu interface

4.emergency stop key: used for emergency stop. Once pressed, all mobile stations stop moving

5.Power switch

Rear panel

1.Input power socket: Support 180 ~ 264VAC input

2.RS485 and |O ports: RS485 bus communication, with three inputs and three outputs(based on the actual configuration).

3.USB interface: Used to communicate with the computer.

4.Axis interface: Controller and cable interface(DB15 hole).

5.Fan: Used for heat dissipation. Do not shield it.

1 2 3 4 5

81

Selection chart

UFP Series High Sensitivity Manuel Stages

Features:

•The coarse and fine double tuning structure is used for this stage, and the sensitivity is better than 0.5µm

•Rotary stage sensitivity better than 23.4\"

•High stability and high cost-effective performance

Naming rules

Note: there is no difference about the right or left Drive location for UFP1A, UFP1B.

Model UFP1A UFP1B UFP1C-L UFP1C-R UFP2T-L UFP2T-R

Stage surface size(mm) 60×60 45×45

Stage Thickness(mm) 20 25 30 -

Travel range coarse tuning: ±6.5mm；fine tuning: ±±0.3mm θx: ±3°；θy: ±3°

Guide mechanism Linear-slider guides Crossed-roller guide Crossed-roller ring

Drive type Micrometer

Main body material,

surface treatment Black anodized aluminum alloy

Weight(Kg) 0.28 0.32 0.4 0.64

Sensitivity Coarse: ≤10µm;Fine≤0.5µm θx: ≤25.2” ;0y; ≤234

Static parallelism ≤60µm -

Dynamic parallelism ≤10µm -

Dynamic straightness ≤3µm -

Horizontal

direction(Kg) 5 5 5 1.5

UFP 1A- L

UFP: High sensitivity

manuel stage

Configuration：

1A:stage thickness 20mm

1B:stage thickness 25mm

1C:stage thickness30mm

2T:two-dimension rotary stage

Drive location

L: left

R: right

Fiber Optic Dedicated Manuel Stages

82Tel: +86 10 56370168 www.zolix.com.cn

UFP1A

UFP1C-L UFP1C-R

Dimensions:

UFP1B

83

UFP2T-L UFP2T-R

Rotation center Rotation center

84Tel: +86 10 56370168 www.zolix.com.cn

Selection chart

UFP Series High Sensitivity Fiber Coupling Stages

Features:

•Multi-axis adjustment

•Linearity sensitivity is better than 0.5um, angular sensitivity is better than 23.4\"

•High stability

Naming rules

Model UFP3C-L UFP3C-R UFP5C-L UFP5C-R UFP6C-L UFP6C-R

Travel

range and

sensitivity

X Coarse: ±6.5mm;Fine: ±0.3mm;(Coarse: ≤10µm;Fine: ≤0.5µm

Y Coarse: ±6.5mm;Fine: ±0.3mm;(Coarse: ≤10µm;Fine: ≤0.5um)

Z Coarse: ±6.5mm;Fine: ±0.3mm;(Coarse: ≤10µm;Fine: ≤0.5µm)

θx - - ±3°(≤25.2″)

θy - - ±3°(≤23.4″)

θz - - - - ±4°(≤34″)

Guide mechanism Crossed-roller guide Crossed-roller guide+Crossed-roller ring

Drive type Micrometer

Main body material,

surface treatment Black anodized aluminum alloy

Weight(Kg) 1.74 2.37 2.7

Load capacity(Kg) 1.5 1 0.5

UFP3C- L

UFP: high sensitivity

fiber coupling stages

Number of

controlled axis:

3:3axis

5:5axis

6:6axis

Drive location

L: left

R: right

Version：

A:A

B:B

C:C

85

UFP3C-L UFP3C-R

Dimensions:

UFP5C-L UFP5C-R

Counterbore Counterbore

Counterbore Counterbore

86Tel: +86 10 56370168 www.zolix.com.cn

UFP6C-L UFP6C-R

Counterbore Counterbore

87Tel: +86 10 56370168 www.zolix.com.cn

NXP Series Multi-Axes Parallel Flexure Platforms

Naming rule:

Description:

The NXP series is a platform that can support high-precision alignment in up to 6 axes. This series of products adopts a parallel

structure design, which can effectively solve the problem of error buildup of the traditional stacked stages. In addition, the NXP

platform adopts a flexure design, which has no sliding mechanism or bearings and very few moving parts. Through this design, the

stiffness of the whole device can be significantly improved, and the height and inertia of the device can be controlled in an ideal

range. Another unique feature of the NXP series is the common point, serving as the reference point for all rotational axes, which can

greatly reduce the alignment time of the system, especially for complex alignment of planar optical devices. In general, it’s an ideal

option for sub-micron and nanoscale applications.

Optional driver:

•Manual driver: precision micrometer

•Motorized driver: precision stepper motor

•piezo driver

Applications:

•Fiber coupling

•Waveguide coupling

•Optoelectronic packaging

•Any other high-resolution alignment or positioning applications

Note

1. Three-axes flexure platform without L/R model.

2. The device does not include a driver, which needs to be purchased separately (DNXP-M/A), and driver can be mixed as required.

主计划：六轴调整架

Series code:

NXP series 6

axes flexure

platforms

NXP - 6 M - L

DNXP - M/A

Piezo driver option:

M: without piezo

driver

NP: with internal

piezo driver

Specifications:

3: 3 axes parallel

flexure platforms

6: 6 axes parallel

flexure platforms

Series code:

High precision driver,

replaceable

M: manual driver

A: piezo driver

注：1. 三轴系列无L/R尾缀

2.设备不包含驱动器，需单独采购（DNXP-M/A），可以按需求混装驱动

L: left handed

R: right handed

88Tel: +86 10 56370168 www.zolix.com.cn

Selection chart:

NXP Series Six Axes Parallel Flexure Platforms

Model NXP-6M NXP-6NP

Travel range The travel of X, Y and Z is 4 mm. Rx, Ry, Rz(roll, pitch and yaw) travel is 4°(70mrad)

Transmission

ratio

X

1:1.5 1:1.5

Y Drivers move 1 µm, and the carrier plate moves 1.5 µm

Z 1:1 The drive transmission ratio is 1:1.

Piezo transmission ratio 1:1.5

Resolution Please refer to below driver sheet

Center of rotation Common center of rotation. Maximum crosstalk 100 µm

Parameters

of piezo

type

Model

None

Piezo, closed loop

Travel

range Typical value 19um

Resolution X, Y, Z 1nm

Rx, Ry, Rz 0.018urad

Load capacity 1Kg

Resonant frequency >130 Hz(±10%)

Heat stability 1um/℃

NXP Series Three Axes Parallel Flexure Platforms

Model NXP-3M NXP-3NP

Travel range 4mm

Transmission ratio 1:1

Resolution Please refer to below driver sheet

Crosstalk <100um

Parallelism of carrier

plate <100um

Parameters

of piezo

type

Model

None

Piezo, closed loop

Travel

range Typical value 19um

Resolution X, Y, Z 1nm

Load capacity 1Kg

Resonant frequency >130 Hz(±10%)

Heat stability 1um/℃

Driver

Model DNXP-M DNXP-A

Driver type Manual Motorized

Travel range 13mm

Actual travel is 4mm when used with NXP series

8mm

Actual travel is 4mm when used with NXP series

Resolution Coarse adjustment 10 µm, fine adjustment 0.5 µm Full step 1.25µm/half step 0.625µm

Motor

None

2 phase 35 stepper motor, stepper angle 1.8°

Limit Built-in limit switch

Positioning accuracy The bidirectional repeatability is 5.0 µm

89Tel: +86 10 56370168 www.zolix.com.cn

NXP-6-L NXP-3

Dimensions:

DNXP-M

工艺

设计 主任设计

校对

审核

标记

标准化

批准

处数 更改文件号 签字 日期

日期 苏大明

2024/6/1刘松

李海涛

邓然

65

112

115

20

20

34

34

（3x15=）45

（3x15=）45 4-M2

9-M4

12-M3

工艺

设计 主任设计

校对

审核

标记

图样标记 件数 比例

标准化

批准

处数 更改文件号 签字 日期

图纸未经书面许可，不得复制、泄露给第三方或用于其它目的。

日期 北京卓立汉光仪器有限公司文档版本：C:\\Users\\Administrator\\Desktop\\NXP-3\\ ；模型建立：2023/8/29

苏大明

S

2024/6/14

共1页 第1页 刘松

李海涛

邓然

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112

115

20

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34

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Item NXP-MR01

Pitch/Roll travel range ±5°

Pitch/Roll resolution 0.036°

Yaw travel range ±10°

Yaw resolution 0.03°

Maximum horizontal load 5Kg

NXP-MR01

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90Tel: +86 10 56370168 www.zolix.com.cn

Selection chart

Features:

•Sensitivity≤1µm

•The main material is 304 stainless steel, with high stability and good corrosion resistance

•Ultra high precision crossed-roller guide, which can ensure that the sensitivity, straightness and other key indicators of the product

reach the international level

•Much higher cost-effective.

Naming rules:

NFP-x561 Series High Precision Fiber Alignment Stages

Model NFP-GON10 NFP-2561T(TL) NFP-3561(L) NFP-5561(L) NFP-6561(L)

Travel

range

X(mm) / / 13 13 13

Y(mm) / / 13 13 13

Z(mm) / / 6 6 6

θx(°) ±10 / / / ±10

θy(°) / -2~4 / -2~4 -2~4

θz(°) / -4~4 / -4~4 -4~4

Guide mechanism Dovetail guide rotational

structure

Crossed-roller

guide

Crossed-roller

guide+rotation structure

Crossed-roller

guide+rotation structure+dovetail guide

Drive type Micrometer Screw Micrometer Micrometer+screw

Main body material,

surface treatment Stainless steel, sandblasting

Sensitivity ≤6” / ≤1µm ≤1µm ≤1µm

Linearity Deviation(µm) / / ≤3 ≤3 ≤3

Weight(Kg) 0.31 1.2 1.8 2.2 2.5

NFP-2561(L)

NFP:stainless steel, crossedroller guide, ultra high

precision

Number of controlled axis：

2: two-dimension(θyθz)

3: three-dimension(XYZ)

5: five-dimension(XYZθyθz)

6:six-dimensionXYZθxθyθz)

Drive location：

None(default):right

L: left

T/TL : right/ left(for two-dimension stage)

561:Integral

type (fiber

optic special

91Tel: +86 10 56370168 www.zolix.com.cn

NFP-GON10 optical fiber manual goniometer

Description:

NFP-GON10 can be used in combination with NFP-3561/3561L 3D ultra-high precision manual stage to provide rotation adjustment

around the X-axis, equipped with dovetail slot mounting seat for installation of fiber optic accessories.

NFP-GON10

NFP-2561T/2561TL optical fiber two-dimensional tilt slide stage

Description:

This type can be combined with the NFP-3561/3561L three-dimensional ultra-high precision manual stage, then it can provide pitch

and yaw adjustment around the Y and Z axis, with a dovetail groove mounting seat, and special accessories for optical fiber can be

installed. This product is available for left and right hands, NFP-2561TL is for left hands.

NFP-2561TL NFP-2561T

92Tel: +86 10 56370168 www.zolix.com.cn

NFP-5561/5561L 5-dimension ultra-high precision stage for optical fiber

NFP-5561L NFP-5561

NFP-3561/3561L 3-dimension ultra-high precision stage for optical fiber

NFP-3561L NFP-3561

93Tel: +86 10 56370168 www.zolix.com.cn

NFP-5561/5561L 5-dimension ultra-high precision stage for optical fiber

NFP-6561L NFP-6561

94Tel: +86 10 56370168 www.zolix.com.cn

Specialized Clamp For Optical Fiber

APFP-US universal dovetail bracket

The upper dovetail seat can fix other fiber accessories,

the center height is the same as other products,

suitable for coaxial adjustment.

APFP-TS dovetail bracket

The upper dovetail seat can fix other fiber

accessories, the center height is the same as other

products, suitable for coaxial adjustment.

APFP-FH mounting base for single mode

optical fiber

The single-mode fiber can be fixed, and the magnet design

is used to clamp firmly and do not damage the fiber. The

bottom dovetail seat can be directly fixed on the dovetail

groove, and the side is equipped with top wire for easy

disassembly.

APFP-OM micro objective mirror mount

Equipped with standard microscope mounting thread for

microscope objective mirror mounting. The bottom dovetail

seat can be directly fixed on the dovetail groove, with hex

key on the side for easy disassembly.

APFP-OM

WJ4/5\"-1/36n

oo.

V

于

9.

oo~

95Tel: +86 10 56370168 www.zolix.com.cn

APFP-UM universal dovetail mounting seat

The bottom dovetail seat can be directly fixed on the

dovetail groove, and the side is equipped with jacksrew for

easy disassembly. M3 and M4 threaded holes are reserved

for installing other optical fiber accessories.

APFP-GB rectangle dovetail mounting seat

It is used to install APFP-θx, which can be fixed on APFPXYZT /TL through the side jackscrew, and is combined into a

six-dimensional adjustment frameAPFP-XYZTθ /XYZTθL.

APFP-GH self-focusing lens mount

This type is used to fix optic fiber self-focusing lenses

with a diameter of less than 4.8mm. The bottom dovetail

seat can be directly fixed on the dovetail groove, and the

side is equipped with jackscrew for easy disassembly.

APFP-FC fiber chucks

This type can be used to fix APFCH Series Fiber

clamp(diameter 6.35mm), and the bottom dovetail seat

can be directly fixed on the dovetail groove, and the side is

equipped with jackscrew for easy disassembly.

96Tel: +86 10 56370168 www.zolix.com.cn

APFCH-1 Optical fiber clamp

APFCH-1 use elastic clamping method, compatible

0.08～0.2mm optical fiber.

APFCH-1 consists of two parts, the main body is a copper

rod with a slit on it and a copper sheet. After the copper

piece is removed, the fiber with a diameter of 0.08 ~ 0.2mm

can be put into the slit of the copper rod, and then the

copper piece is put back into the slit, pressed on the fiber,

and then loaded into APFP-FC or APFC series products.

APFCH-2 Optical fiber clamp

APFCH-2 can hold multi-mode fiber or fiber bundle with

diameter of 0.2 ~ 1.5mm through the side top wire hole, which

can be firmly clamped and not compressed. It is stable and

convenient to use with APFC series fiber coupler and APFP-FC

fiber clamp head mounting seat.

APFCH-3 Optical fiber clamp

This type suitable for a various of diameter optical fiber

installation. It can also be used with BP-16 base and twodimensional tilting frame, multi-dimensional adjustment of

optical fiber can be carried out.

97Tel: +86 10 56370168 www.zolix.com.cn

Manual Linear Stage

Selection chart:

NFP Series Crossed-Roller Bearing High Precision Linear Stages

Description:

NFP series products are ultra high precision manual linear stage

developed by Zolix. The main material of this series of products

is 304 stainless steel. It is guided by ultra-high precision cross

roller guide and driven by precision Micrometer. With the unique

precision processing technology of Zolix, this series of products

has ultra-high sensitivity which less than 1µm, and runs smoothly

without runout. The series is particularly suitable for ultra-high

precision manual adjustment, especially for the precise adjustment

of fiber coupling or optical waveguide devices, DPSS laser

components, and can also be used in vacuum environment.

Features:

•Sensitivity ≤ 1µm

•The main material is 304 stainless steel, which has high

stability and good corrosion resistance, and is also

suitable for using in the real air

•Ultra high precision crossed-roller guide, which ensures

the sensitivity, straightness and other key indicators to

reach the international level

•All products equipped with Micrometer

•Much higher cost-effective.

Naming rules:

Model NFP-1461C NFP-1461SR NFP-1461SL NFP-1461CZ

Travel range(mm) 13

Stage surface

size(mm) 40×40

Thickness(mm) 19.5

Guide mechanism Precise crossed-roller guide

Drive type Micrometer

Drive location Center Right Left Central and

vertical

Main body material,

surface treatment Stainless steel, sandblasting

Sensitivity(µm) ≤1

Minimum reading of

mi-crometer(mm) 0.01

Straightness(µm) ≤3

Load capacity(Kg) 5 5 5 1.5

Weight(Kg) 0.28

Model NFP-1462C NFP-1462SR NFP-1462SL NFP-1462CZ

Travel range(mm) 25

Stage surface

size(mm) 65×65

Thickness(mm) 23±0.1

Guide mechanism Precise crossed-roller guide

Drive type Micrometer

Drive location Center Right Left Central and

vertical

Main body material,

surface treatment Stainless steel, sandblasting

Sensitivity(µm) ≤1

Minimum reading of

mi-crometer(mm) 0.01

Straightness(µm) ≤3

Load capacity(Kg) 7 7 7 2.5

Weight(Kg) 0.85

NFP-1461 SR

NFP:stainless steel, crossedroller guide, ultra high

precision

Axis：

1: one axis

Drive location：

C: center

SR: right

SL: left

CZ: central and vertical

Stage surface size：

461:40mm×40mm

462·65mm×65mm

98Tel: +86 10 56370168 www.zolix.com.cn

NFP-x461 series of ultra-high precision manual linear stage

NFP-1461SL NFP-1461SR

Dimensions:

NFP-1461C NFP-1461CZ

99Tel: +86 10 56370168 www.zolix.com.cn

NFP-2461CC-L NFP-2461CC

NFP-3461CCZ-L NFP-3461CCZ