该页无缩略图
3Tel: +86 10 56370168 www.zolix.com.cn
Motion control
ZOLIX INSTRUMENTS CO., LTD.
V1
1Tel: +86 10 56370168 www.zolix.com.cn
81 Fiber Optic Dedicated Manuel Stages
81 UFP Series High Sensitivity Manuel Stages
84 UFP Series High Sensitivity Fiber Coupling Stages
87 NXP Series Multi-Axes Parallel Flexure Platforms
90 NFP-x561 Series High Precision Fiber Alignment Stages
94 Specialized Clamp For Optical Fiber
97 Manual Linear Stage
97 NFP Series Crossed-Roller Bearing High Precision Linear Stages
104 SK Series High Precision Stainless Steel Manual Linear Stage
111 AK Series Aluminum Alloy Crossed-Roller Bearing Linear Stages
127 AD Series Aluminum Alloy Rack And Pinion Type Linear Stage
133 DSM Series Aluminum Alloy Dovetail Guide Linear Stages
136 Manual Vertical Positioners
136 SKV Series Stainless Steel High Precision Vertical Stages
138 AKV Series Aluminum Alloy High Precision Vertical Stages
141 MJ Series High Load Lab Jack
143 Manual Rotation Stages
143 SKR Series Stainless Steel High Precision Rotation Stages
145 AKR Series High Precision Rotation Stages
147 Manual Goniometers
147 MGON Series High Precision Goniometer
150 AKG Series High Precision Manual Goniometer
153 TSMG Series Manual Goniometer
154 Manual Integrated Stages
154 TSMW Series Bearing Linear Stage, 13mm XYZ Travel
156 Combined Manual Stages
156 AAK Series Combined Manual Stages
159 Accessories
159 Base for Manual Stages
161 Right Bracket for Manual Stages
165 Micrometer
Contents
Motion control
2 Motorized Linear Stages
2 LAK Series Submicron Motorized Linear Stages
5 CXP and CXPF Series High-Precise Motorized Linear Stages
9 KA Series Precision Closed-Loop Motorized Stage
14 PA Series Precise Motorized Linear Stages
19 LA Series Precise Compact Motorized Linear Stages
22 TSAxx-B Series Square Guide Motorized Linear Stage
24 TSAxx-C Series Slim Motorized Linear Stages
27 Motorized Vertical-Motion Stages
27 CZF Series High Precision Motorized Vertical-Motion Stages
30 TBZF Series Motorized Vertical-Motion Stages
33 CXZ Series Motorized Vertical Stage
35 PSAV Series Long Travel Range Motorized Vertical-Motion Stages
38 KAxx-Z Series High-Precision Motorized Vertical-Motion Stages
42 PAxx-Z Series Precise Motorized Vertical-Motion Stages
46 Motorized Rotation Stages
46 TBRU Series High Precision Closed-Loop Motorized Rotation Stages
49 TBR/TBRF Series Motorized Rotation Stages
53 SIN Series Sinusoidal Mechanism Motorized Rotation Stage
56 Motorized Goniometers
56 GONX Series Motorized Goniometers
59 TBG Series Motorized Goniometers
62 PSAG Series Motorized Goniometers
65 2D- or 3D Motorized Alignment Stages
65 Motorized XY Series All-In-One Two-Axis Stages
68 Motorized XYR Series All-In-One Three-Axis Stages
71 HXP High Precision Hexapod
71 HXP High Precision Hexapod
73 Custom Automation Equipment
73 Semiconductor Wafer Micro-Operation And Inspection Equipment
74 Controller
75 TMC-USB Series Controllers
77 MC600 Series Controllers
79 ZC300 Series Controllers
2Tel: +86 10 56370168 www.zolix.com.cn
Motorized Linear Stages
LAK Series Submicron Motorized Linear Stages
Naming rules:
Description:
LAK series submicron motorized linear stages are high precision
specially designed by Zolix for the special situation of compact size
and high frequency of operation. The main material of this stage is
high rigidity, anodized black aluminium alloy which is with high wear
resistance and nice appearance. The slide rail adopts linear slide way
to ensure high rigidity, heavy load capacity and good durability.
Features:
•Low backlash ball screw provides outstanding durability
and smooth motion.
•1mm lead screw provides the fundamental of precise
positioning.
•Minimum incremental motion of 1 µm.
•Equipped with a 5-phase stepper motor, which offers
higher accuracy and features a compact structure.
Linear Slide Guide
LAK 20-60
Series code: LAK: High precision, aluminum alloy, ball screw, linear slider guides
Effective travel
range:
20:20mm
Table dimension:
60:60mm×60mm
3
Selection chart:
Model LAK20-60
Mechanical
specifications
Travel range(mm) 20
Stage surface size(mm) 60×60
Transmission mechanism Imported C3 ball screw, Φ6×1
Guide mechanism linear-slider guides
Main body material, surface treatment Black anodized aluminum alloy
Weight(Kg) 0.58
Shaft coupling(OD - OD1- OD2)(mm) 16-03-05
Accuracy
specifications
Resolution(step/half-step)(µm) 2/1
20-fine-subdivision resolution(µm) 0.1
Highest speed(mm/s)* 20
Single-direction positioning accuracy(µm) ≤20
Repositioning accuracy(µm) ≤±1
Backlash(µm) ≤1
Static parallelism(mm) ≤0.05
Dynamic straightness(µm) ≤10
Dynamic parallelism(µm) ≤10
Yaw(\") ≤25
Pitch(\") ≤30
Specialty
specifications Minimum incremental motion(µm) ≤1
Allowable
torque load
Up and down swing(N·m) 9.31
Left and right swing(N·m) 9.8
Axial rotation(N·m) 9.31
Torque
rigidity
Up and down swing(µm/90N·cm) ≤6
Left and right swing(µm/90N·cm) ≤6
Electrical
specifications
Motor and its stepping angle(°) 5 phase 28 stepping, 0.72
Brand and model number of motor Oriental Motor, PKP523N12B-L
Working current(A) 1.2
Holding torque(N.m) 52.5
Brand and model number of stepping
driver(optional) Oriental Motor, CVD512BR-K
Type of plug for stage 10pin connector
Type of cable for stage High flexibility cable
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×EE-SX4320(Japan OMRON)
Origin-point sensors(built-in) 1×EE-SX4320(Japan OMRON)
Voltage of power supply for sensors(V) DC5～24V±10%
Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports output OFF when sensor is blocked
Maximum
load capacity
Horizontal direction(Kg) 8
Vertical direction(Kg) 3
Inverted direction(Kg) 4
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
4Tel: +86 10 56370168 www.zolix.com.cn
Dimensions:
LAK20-60
5 www.zolix.com.cn 56370168 10 86 Tel: +
Description:
CXP series is special designed for the usage scenarios such as small-size and
high frequency operation.The main body is made by hard aluminum alloy
with black anodic-oxidation surface treatments which ensure the good wear
resistance and nice appearance. A set of crossed-roller guide is employed
which offers high motion precision even with heavy load. 1mm lead pitch
and high precision two-phase stepping motor are the key parts to ensure
minimum incremental motion size and high positioning accuracy. This model
is a very idea option for automation equipment, precise instruments in which
limited space must being considered. CXPF series is one of derivative version
of CXP series, equipped with longer lead pitch(2mm) and a set crossed-roller
guides to meet the requirements of faster moving, higher rigidity and longer
travel range.
CXP and CXPF Series High-Precise Motorized Linear Stages
Features:
•Using short-lead-pitch ball screws with two.
phase stepping motors to provide ≤5um
minimum incremental motion and rigidity
•Crossed-roller guides ensure better rigidity
and higher load capability
•Installation surface treated by using finegrinding techniques to guarantee higher
motion precision
•Three built-in sensors(positive and negative
position limit sensors and one origin-point
sensor) installed with flexible cables and
relative units to make sure easy maintenance
Naming rules:
Micro Step
≤5µm
CXP 20-60 (-ST528)
Series code：
CXP: high precision, 2mm lead
pitch ball screw, crossed-roller
guide、aluminum alloy
Effective travel range：
15:15mm
20:20mm
Motor type：
None (default):two-phase stepping
motor
ST528: 5 phase 28 stepping motor
Dimension of table：
40:40mm×40mm
60:60mm×60mm
CXPF 30-80 (-ST542)
Effective travel
range：
30:30mm
50:50mm
75:75mm
100:100mmMotor type：
None (default):two-phase
stepping motor
ST542:5 phase 42 stepping motor
Dimension of table：
80:80mm×80mm
80100:80mm×100mm
80125:80mm×125mm
80175:80mm×175mm
Series code：
CXP:high precision, 2mm lead
pitch ball screw, crossed-roller
guide and aluminum alloy. Faster
and higher rigidity version
CXP 20-60 (-ST528)
Series code：
CXP: high precision, 2mm lead
pitch ball screw, crossed-roller
guide、aluminum alloy
Effective travel range：
15:15mm
20:20mm
Motor type：
None (default):two-phase stepping
motor
ST542:5 phase 42 stepping motor
Dimension of table：
40:40mm×40mm
60:60mm×60mm
CXPF 30-80 (-ST542)
Effective travel
range：
30:30mm
50:50mm
75:75mm
100:100mm
Motor type：
None (default):two-phase
stepping motor
ST542:5 phase 42 stepping motor
Dimension of table：
80:80mm×80mm
80100:80mm×100mm
80125:80mm×125mm
80175:80mm×175mm
Series code：
CXP:high precision, 2mm lead
pitch ball screw, crossed-roller
guide and aluminum alloy. Faster
and higher rigidity version
6Tel: +86 10 56370168 www.zolix.com.cn
Selection chart:
Model CXP15-40 CXP20-60 CXPF30-80 CXPF50-80100 CXPF75-80125 CXPF100-80175
Mechanical
specifications
Travel range(mm) 15 20 30 50 75 100
Stage surface size(mm) 40×40 60×60 80×80 80×100 80×125 80×175
Guide mechanism ball screw, φ6×1 ball screw, φ8×2
Guide mechanism crossed-roller bearing guides
Main body material, surface
treatments Black anodized aluminum-alloy
Weight(Kg) 0.4 0.6 1.2 1.4 1.6 1.8
Shaft coupling(OD - OD1-
OD2)(mm) 16-03-05 16-05-05
Accuracy
specifications
Resolution(step/half-step)
(µm) 5/2.5 10/5
20-fine-subdivision
resolution(µm) 0.25 0.5
Highest speed(mm/s)* 10 20
Repositioning accuracy(µm) ≤±1.5 ≤±2
Backlash(µm) ≤3
Static parallelism(mm) ≤0.08 ≤0.1
Dynamic straightness(µm) ≤10
Dynamic parallelism(µm) ≤15
Specialty
specifications
Minimum incremental
motion(µm)** ≤5 ≤2
Electrical
Specifications
(Motor
specifications)
Brand and model number
of motor Shinano, STP-28D1003-08 Shinano, SST43D2126-10
Motor and its stepping
angle(°)
2 phase 28 stepping motor,
1.8 2 phase 42 stepping motor, 1.8
Insulation resistance Above 100MΩ/Min
Insulating strength \"500V AC no abnormality within 1 minute\"
Insulating level UL B level
Weight(Kg) 0.11 0.29
Voltage(V) 1.9 2.8
Current 1.3A/phase 1.7A/phase
Resistance 1.45±10%Q/phase 1.65±10%Ω/phase
Inductance 1.25mH/phase 3.6mH/phase
Holding torque 0.0785N.m 0.456N.m
Retarding torque 0.00294N.m(reference value) 0.005N.m(reference value)
Inertia of the rotor 8g.cm 56g.cm
Operating temperature 0~+50℃
Max operating temperature
for motor 80℃ Max
Brand and model number
of stepping driver(optional) Moons, SR2
Connectors,
sensors
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of cables for
stages(m) 0.2
Position-limit sensors(builtin) 2×GP1S09xHCP(Japan SHARP)
Origin-point sensors(builtin) 1×GP1S09xHCPI(Japan SHARP)
Voltage of power supply for
sensors(V) DC5-24V±10%
current consumption <60(total)
Control output NPN open collector output DC5～24V 8mA or
less Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports output ON when sensor is blocked
Maximum load
capacity
Horizontal direction(kg) 5 8 16 20 25 30
Vertical direction(kg) 2 3 5 6 7 8
Inverted direction(kg) 3 4 5 5 5 5
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
**Note: ≤2µm(when using our TMC controller), microstep capacity ≤5µm when using our other controllers.
7
Dimensions:
CXP15-40 CXP20-60
CXPF30-80 CXPF50-80100
8Tel: +86 10 56370168 www.zolix.com.cn
CXPF75-80125 CXPF100-80175
9
KA 100-(ST242)(-C)(-ER)(-SR)
Series code
KA: high precision, ball
screws, linear slider guides,
aluminum alloy, closed loop
(1μm resolution)
Travel range：
050:50mm
100:100mm
150:150mm
200:200mm
300:300mm
400：400mm
Type of protection:
None(default):no protection
C:with protection
Motor type：
None (default):two-phase 57 stepping
motor
ST242: two-phase 42 stepping motor
ASP1: Panasonic 100W AC servo motor
ASY2: Yaskawa 200W AC servo motor
P1: Installation plate and Shaft coupling
of Panasonic 100W AC servo motor
Y2: Installation plate and Shaft coupling
of Yaskawa 200W AC servo motor
Grating ruler position：
None (default):left side
ER: right side
Position of sensors：
None(default):internal
SL: External, left side
SR: External, right side
Note: The sensor and the grating
ruler cannot be located on the
same side
KA 600-(ASP4)(-ER)
Series code
KA: high precision, ball screws,
linear slider guides, aluminum alloy,
closed loop (0.5μm resolution)
Travel range：
600:600mm
800 :800mm
1000:1000mm
None ( default ) : two-phase 57 stepping motor
ASP4: Panasonic 400W AC servo motor
ASY4: Yaskawa 400W AC servo motor
P4: Equipped with installation plate, shaft coupling
and Panasonic 400W AC servo motor
Y4: Equipped with installation plate, shaft coupling
and Yaskawa 400W AC servo motor
Grating ruler position：
None(default):left
ER: right
KA Series Precision Closed-Loop Motorized Stage
Naming rules:
Description:
The KA series products are precision closed-loop linear stages designed
for medium to large strokes. These stages utilize an external grating ruler
outside, by using MC600 or TMC series controllers, this stage is able
to achieve a closed-loop resolution of 1µm/0.5µm. The base features
a high-rigidity U-type structure, ensuring suitability for operations
under heavy load, high rigidity, and multi-dimensional combinations. An
optional stainless-steel dustproof cover protects the inner parts from
particles and dust, ensuring better stability, durability, and long-term
accuracy.
This KA series is equipped with precision ball screws, linear-slider guides,
and high -performance shaft coupling units. This design offers excellent
adaptability for accurate operations in complex environments.
Features:
•Equipped with a grating ruler, providing closedloop resolution of 1µm/0.5µm.
•U-type aluminum alloy base plates treated by
fine machining and black anodic oxidation for
enhanced rigidity and aesthetic appeal.
•Utilizes precise-grade linear-slider guides to
ensure high load capability and accuracy.
•Dust cover is optional.
•Default configuration includes a two-phase
stepping motor, with the option to upgrade to a
servo motor.
Linear Slide Guide
10Tel: +86 10 56370168 www.zolix.com.cn
Selection chart:
Model KA050 KA100 KA150 KA200 KA300 KA400 KA600 KA800 KA1000
Mechanical specifications
Travel range(mm) 50 100 150 200 300 400 600 800 1000
Stage surface size(mm) 120×120 150X150 200X200
Transmission mechanism Precision ball screwφ12×4 Precision ball
screwφ16×5 Precision ball screwφ25×5
Guide mechanism Linear-slider guides
Main body material, surface treatment Black anodized aluminum alloy
Weight(Kg) 6.6 6.8 7.2 7.6 9.9 10.9 22.3 26 29.5
Shaft coupling(OD - OD1- OD2)(mm) 30-6.35-8 34-8-12
Accuracy specifications
Closed loop resolution(µm) 1 0.5
20-fine-subdivision resolution(µm) 1 1.25
Highest speed(mm/s) 40 50
Single-direction positioning accuracy ≤30 ≤70µm
Repeatability/unidirectional(µm)* ≤±3 ≤±5
Static clearance(µm)* ≤3
Backlash(µm)* ≤5
Static parallelism(mm) ≤0.1 ≤0.12
Dynamic straightness(µm) ≤10 ≤15 ≤15/100mm
Dynamic parallelism(µm) ≤15 ≤20 ≤15/100mm
Yaw(\") ≤30 ≤40 /
Pitch(\") ≤35 ≤55 /
Electrical specifications
Motor and its stepping angle(°) Two-phase 57 stepping motor, 1.8
Brand and model number of motor Shinano, SST59D3206 Shinano, SST59D5301
Working current(A) 2.8 3.0
Holding torque of motor(N·m) 1.44 1.57
Brand and model number of grating
ruler Fagor, MX or MKX series LAMOTION
Brand and model number of stepping
driver(optional) Moons, SR4
Type of plug for stag DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×PM-L25(SUNX, Japan)
Origin-point sensors(built-in) 1×PM-L25(SUNX, Japan)
Voltage of power supply for sensors(V) DC5～24V±10%
Current consumption(mA) <60(total)
Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports Position limit sensor: output ON when sensor is blocked;
Origin-point sensor: output OFF when sensor is blocked;
Maximum load capacity
Horizontal direction(Kg) 30 50 80
Vertical direction(Kg) Please use \"xx-Z\" model for vertical load, refer to KAxx-Z series for details
Inverted direction(Kg) 15 25 40
*Note: Measured in open loop mode.
11
Dimensions:
KA050 KA100
KA150 KA200
12Tel: +86 10 56370168 www.zolix.com.cn
KA300
KA600
KA400
KA800
13
KA1000
14Tel: +86 10 56370168 www.zolix.com.cn
PA Series Precise Motorized Linear Stages
Naming rules:
Description:
PA series products are designed as middle-size and middle-travel-range precise
motorized stages. The base of this series employ high-rigidity U-type structure
to ensure this stage could be suitable for the operations in the circumstances of
heavy load, high rigidity and multi-dimension combinations. A stainless-steel dust
proof cover is optional to protect all inner parts of stages from particles and dust
in real operation environments, which could guarantee better stability, durability
and the capability to keep a long-term accuracy. PA series products equip
precision ball screw, linear-slider guide and high-performance shaft coupling
units. This kind of design offers good adaptabilities for being used in accurate
operation scenarios with relative complex environments.
Features:
•Fine machining for U-type aluminum alloy
base plates, which are treated as black anodicoxidation. High rigidity and nice appearance.
•Precise-grade linear-slider guides are used to
guarantee high load capability and high motion
accuracy
•Stainless-steel dust cover is optional
•Default configuration: Two-phase stepping
motor, servo motor is optional
Linear Slide Guide
PA 100-(ST242)(-C)(-SR)
Series code：
PA: precise,ball screw,
linear-slider guide and
aluminum alloy
Travel range：
050:50mm
100:100mm
150:150mm
200:200mm
300:300mm
400:400mm
600:600mm
800:800mm
1000:1000mm
Type of protection:
None (default): No
protection
C: with protection
Motor type：
None (default):two-phase 57 stepping
motor
ST242: two-phase 42 stepping motor
ASP1: Panasonic 100W AC servo
motor
ASY2: Yaskawa 200W AC servo motor
P1: Installation plate and Shaft
coupling of Panasonic 100W AC servo
motor
Y2: Installation plate and Shaft
coupling of Yaskawa 200W AC servo
motor
Position of sensors：
None(default):internal
SL: External, left side
SR: External, right side
15
Selection chart:
Model PA050 PA100 PA150 PA200 PA300 PA400 PA600 PA800 PA1000
Mechanical
specifications
Travel range(mm) 50 100 150 200 300 400 600 800 1000
Stage surface size(mm) 120×120 150X150 200X200
Transmission mechanism precision ball screw, Φ12×4 precision ball screw,
Φ16×5
precision ball screw,
Φ25×5
Guide mechanism linear-slider guides
Main body material, surface
treatment Black anodized aluminum alloy
Weight(Kg) 5.8 6.2 6.6 7 8.9 9.9 21.5 25 28.4
Shaft coupling(OD - OD1- OD2)
(mm) 30-6.35-8 32-8-12
Accuracy
specifications
Step resolution(µm) 20 25
20-fine-subdivision resolution(µm) 1 1.25
Highest speed(mm/s) 40 50
Single-direction positioning
accuracy
≤30 /
Repositioning accuracy(µm) ≤±3 ≤±5
Static clearance(µm) ≤3
Backlash(µm) ≤5
Static parallelism(mm) ≤0.1 ≤0.12
Dynamic straightness(µm) ≤20 ≤25 ≤15µm/100mm
Dynamic parallelism(µm) ≤25 ≤30 ≤15µm/100mm
Yaw(\") ≤50 /
Pitch(\") ≤55 ≤60 /
Electrical
specifications
Motor and its stepping angle(°) Two-phase 57 stepping motor, 1.8
Brand and model number of motor Shinano, SST59D3206 Shinano, SST59D5301
Working current(A) 2.8 3.0
Holding torque of motor(N·m) 1.44 1.57
Brand and model number of
stepping driver(optional) Moons, SR4
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×PM-L25(SUNX, Japan)
Origin-point sensors(built-in) 1×PM-L25(SUNX, Japan)
Voltage of power supply for
sensors(V) DC5~24V±10%
Current consumption(mA) <60(total)
Control output NPN open collector output DC5～24V 8mA or
less Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports Position limit sensor: output ON when sensor is blocked;Origin-point sensor: output OFF
when sensor is blocked;
Maximum
load capacity
Horizontal direction(Kg) 30 50 80
Vertical direction(Kg) Please use \"xx-Z\" model for vertical load, refer to PAxx-Z series for details
Inverted direction(Kg) 15 25 40
16Tel: +86 10 56370168 www.zolix.com.cn
Dimensions:
PA050 PA100
PA150 PA200
17
PA300
PA600
PA400
PA800
18Tel: +86 10 56370168 www.zolix.com.cn
PA1000
19
Description:
The LA series is designed for industrial applications
with high repeatability. The main body material is
rigidity aluminum alloy treated with black anodic
oxidation to meet heavy load, multi-dimension
combinations requirements.The mechanical
mechanism adopts ball screw drive and equipped
with standard two-phase stepper motor, which can
provide high resolution and positioning accuracy.
LA Series Precise Compact Motorized Linear Stages
Features:
•Adopting precision ball screw and standard two-phase stepper motor to
provide high resolution and positioning accuracy.
•Smooth linear-slider guides enables the stage running with a high speed.
•The mounting surface of the guide adopts precision machining technology,
which makes the product have high motion accuracy.
•Built-in three sensors(positive and negative limit and zero limit), the use of
high flexible cable and cable module, more convenient maintenance
•With three built-in sensors(positive, negative, and zero) and a highly
flexible cable and cable module, this design makes maintenance easier.
Naming rules:
Linear Slide Guide
LA 100-60 (-ST528)
Series code：
LA: precise level、
aluminum alloy, ball
screw, linear-slider guides
Motor type：
None (default):two-phase stepping
motor
ST528: five-phase 28 stepping motor
Travel range:
50:50mm
100:100mm
150:50mm
Stage surface
size(mm):
60:60mm×60mm
20Tel: +86 10 56370168 www.zolix.com.cn
Selection chart:
Model LA50-60 LA100-60 LA150-60
Mechanical
specifications
Travel range(mm) 50 100 150
Stage surface size(mm) 60×60
Transmission mechanism Ball screw, Φ8×2
Guide mechanism linear-slider guides
Main body material, surface treatment Black anodized aluminum alloy
Weight(Kg) 0.73 0.85 1
Accuracy
specifications
Resolution(step/half-step)(µm) 10/5
20-fine-subdivision resolution(µm) 0.5
Highest speed(mm/s)* 20
Repositioning accuracy(µm) ≤±2
Static clearance(µm) ≤1
Backlash(µm) ≤3
Static parallelism(mm) ≤0.08
Dynamic straightness(µm) ≤20
Dynamic parallelism(µm) ≤30
Specialty
specifications
Minimum incremental motion(µm)** ≤2
Repositioning accuracy while microstep motion(µm) ≤±1
Backlash while micro-step motion(µm) ≤0.5
Electrical
specifications
Motor and its stepping angle(°) Two phase 28 stepping motor, 1.8
Brand and model number of motor Shinano, STP-28D1003-08
Working current(A) 1.3
Torque of motor(N-m) 0.0785
Brand and model number of stepping
driver(optional) Moons, SR2
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×GP1S09xHCPI(Japan SHARP)
Origin-point sensors(built-in) 1×GP1S09xHCPI(Japan SHARP)
Voltage of power supply for sensors(V) DC5~24V±10%
Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports output ON when sensor is blocked
Maximum load
capacity
Horizontal direction(Kg) 4
Vertical direction(Kg) 2
Inverted direction(Kg) 2
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
**Note: ≤2µm(when using Zolix TMC controller), the minimum incremental motio is less than or equal to 5µm when using Zolix MC600 and
ZC300 controller.
21
LA50-60 LA100-60
LA150-60
Dimensions:
22Tel: +86 10 56370168 www.zolix.com.cn
TSAxx-B Series Square Guide Motorized Linear Stage
Description:
TSA-B series motorized linear stages employ linear slider guide, industrialgrade ball screw and high-quality shaft coupling unit contributes to high
performance. A pair of mechanical position-limit switches(one at right end
and the other at left end) and an origin-point sensor are all necessary parts
to protect stages working well. It is easy for signal communications due to
standard electrical and mechanical interfaces being used. Customers can
operate the stages manually by using a hand wheel attached to the motor.
This series of products offers standard installation holes which ensure the
easy setup for multi-axis stages system. It also makes the combination with
Zolix other products much easier. TSA-B series is most applicable of heavyloading and stable-running scenarios.
Features:
•Industrial-grade 4mm-lead-pitch ball screws
with two-phase stepping motor to offer high
performance and durability .
•Linear-slider guides provides heavy-load
capabilities for different applications.
Selection chart:
Model TSA50-B TSA100-B TSA150-B TSA200-B TSA300-B
Mechanical
specifications
Travel range(mm) 50 100 150 200 300
Stage surface size(mm) 120×120
Transmission mechanism precision ball screw, Φ12×4
Guide mechanism linear-slider guides
Main body material, surface
treatment Black anodized aluminum alloy
Weight(Kg) 3.4 3.7 4.1 4.6 5.3
Accuracy
specifications
Resolution(step/half-step)(µm) 10/5 20/10
8-fine-subdivision resolution(µm) 1.25 2.5
Highest speed(mm/s)* 40
Repositioning accuracy(µm) ≤±5
Backlash(µm) ≤7
Electrical
specifications
Motor and its stepping angle(°) Two phase 42 stepping motor, 0.9 Two phase 42 stepping motor, 1.8
Working current(A) 1.7
Holding torque of motor(N·m) 0.42
Position-limit sensors(built-in) 2×KX-EE-SX672
Origin-point sensors(built-in) 1×PI-ITR8104
Maximum load
capacity
Horizontal direction(Kg) 30
Vertical direction(Kg) 3
Inverted direction(Kg) 5
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
Linear Slide Guide
23
Dimensions:
TSA50-B TSA100-B
TSA150-B TSA200-B
TSA300-B
24Tel: +86 10 56370168 www.zolix.com.cn
TSAxx-C Series Slim Motorized Linear Stages
Description:
The height of the table is 30mm, and the highest point of the stage is only 44mm.
Grinding ball screws, crossed-roller guide and high-quality shaft coupling are
equipped to ensure that high performance, is perfect for those high-precision
and high-resolution motion required but limited-height-space scenarios. A pair of
mechanical position-limit switch and origin point sensor are all necessary parts to
guarantee stages working well. It is easy for signal communications due to standard
electrical and mechanical interfaces being used. Customers can operate the stages
manually by using a hand wheel attached to the motor. This series offers standard
installation holes which ensure the easy setup for multi-axis stages system. It also
makes the combination with Zolix other products much easier. The characteristic of
self-lock of grinding screws benefits the usage of this kind of products as Z-axis.
Features:
•Grinding screws(1mm lead pitch) and
standard two-phase stepping motors offer
higher performance and adaptability.
•Higher loading capability contributed by
crossed-roller guides used.
•Compact design offers slim table surface
and other small mechanical dimensions.
•Mechanical position-limit switch and
sensor benefit operation safety and easy
maintenance.
Naming rules:
TSA 50-C
Series code：
TSA: standard precision,
aluminum-alloy
Travel range：
30:30mm
50:50mm
C:Slim type
25
Selection chart:
Model TSA30-C TSA50-C
Mechanical
specifications
Travel range(mm) 30 50
Stage surface size(mm) 90×90 90×110
Transmission mechanism Grinding screwsφ8×1
Guide mechanism crossed-roller bearing guides
Main body material, surface treatment Black anodized aluminum alloy
Weight(Kg) 1.3 1.4
Accuracy
specifications
Resolution(step/half-step)(µm) 5/2.5
8-fine-subdivision resolution(µm) 0.625
Highest speed(mm/s)* 10
Repositioning accuracy(µm) ≤±5
Backlash(µm) ≤7
Electrical
specifications
Motor and its stepping angle(°) Two phase 42 stepping motor, 1.8
Working current(A) 1.7
Holding torque of motor(N·m) 0.42
Position-limit sensors(built-in) 2×KX-EE-SX672
Origin-point sensors(built-in) 1×PI-ITR8104
Maximum load
capacity
Horizontal direction(Kg) 10
Vertical direction(Kg) 5
Inverted direction(Kg) 3
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
26Tel: +86 10 56370168 www.zolix.com.cn
Dimensions:
TSA30-C TSA50-C
27
Motorized Vertical-Motion Stages
CZF Series High Precision Motorized Vertical-Motion Stages
Description:
CZF series products are precise motorized vertical-motion stages designed
and manufactured by Zolix to meet the requirements of applications with
high-precision and high repeated operation rate. The materials of main
body are hard black anodic-oxidation aluminum alloys which ensure higher
durability and offers nice appearance. This series stages present higher
motion precision which benefits from employed linear-slider(or cross-roller)
guides feature high strength, high loading capacity and excellent durability.
This series products are ideal for being integrated in automation equipment
or instruments which have strict requirements of space, size and weight.
They are also very suitable to be employed with on-site production lines
which operate in a short-travel range requiring higher repetition rate.
Features:
•Ball screws with high quality stepping motors
to provide higher resolution and positioning
accuracy.
•High strength, heavy load capacity and high
durability are offered by linear-slider or crossedroller bearing guides.
•Fine-grinding techniques are used on the
treatment of installation surface of guides to
ensure high motion accuracy.
•Three sensors(two for position-limit and one
for origin point) works with high flexible cable.
Modular cable units make maintenance easier
Naming rules:
Linear Slide Guide Worm and Gear
PSAV Series
TBZF Series
CZF Series Small, middle
size
Middle, big size
Big size
Motorized verticalmotion stages
KAxx-Z Series
PAxx-Z Series
Middle, big size
Middle, big
Ball screws
Grinding screws
Worm gear linear
push rod
Ball screws
Ball screws
crossed-roller bearing guides or
linear-slider guides
linear-slider guides
Linear ball bearing guides
linear-slider guides
linear-slider guides
High precision and durability
Standard precision, self-locking
capability
Standard precision, large travel
range, high load
High precision, large travel range,
closed loop
High precision, large travel range
CXZ Series Small size Ball screw Crossed-roller guides High precision
CZF 8-60 (-ST528)
Travel range:
8:8mm
20:20mm
40:40mm
Motor type：
Default: two-phase stepping motors
ST528:five-phase 28 stepping motors
Dimension of table(mm):
60:60×60
120:120×120
200:200×200
Series code：
CZF: High precision,
Ball screws,
Linear slider guides or
crossed-roller
Bearing guides.
28Tel: +86 10 56370168 www.zolix.com.cn
Selection chart:
Model CZF8-60** CZF20-120 CZF40-200
Mechanical
specifications
Travel range(mm) 8 20 40
Stage surface size(mm) 60×60 120×120 200×200
Ball screws φ6, 1mm lead φ12, 5mm lead φ16, 10mm lead
Transmission mechanism Timing belt worm gear and worm
Transmission ratio 1: 1 80: 1 120: 1
Travel range with one rotation
of motor(mm) 1 0.0625 ≈0.083
Material of worm gear / Wear-resistant tin bronze
Material and process
technology of worm / Steel, high frequency quenchinged
Guide crossed-roller bearing guides linear-slider guides
Main body material, surface
treatment Black anodized aluminum alloy
Shaft coupling / 19-5-5 30-6.35-6.35
Weight(Kg) 1 4.2 12.5
Accuracy
specifications
Resolution(step/half-step)(µm) 5/2.5 ≈0.31/0.155 ≈0.42/0.21
8-fine-subdivision
resolution(µm) 0.625 ≈0.039 ≈0.052
Highest speed(mm/s)* 5 0.625 0.833
Repositioning accuracy(µm) ≤±3 ≤±2
Zero-load Backlash(µm) / ≤15 ≤15
Static parallelism(mm) ≤0.1 ≤0.1 ≤0.12
Electrical
specifications
Motor and its stepping
angle(°)
Two phase 28 stepping
motor, 1.8
Two phase 42 stepping
motor, 1.8
Two phase 57 stepping
motor, 1.8
Brand and model number of
motor Shinano, STP-28D1003-1504 Shinano, SST43D2126-10 Shinano, SST59D3206
Working current(A) 1.5 1.7 2.8
Motor torque(N-m) 0.0785 0.456 1.44
Brand and model of stepping
driver Moons, SR2 Moons, SR4
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×GP1S09xHCPI(JAPAN SHARP)
Origin-point sensors(built-in) 1× GP1S09xHCPI(JAPAN SHARP)
Voltage of power supply for
sensors(V) DC5～24V±10%
Current consumption(mA) <60(total)
Sensor Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports Output ON when sensor is blocked
Maximum load
capacity Horizontal direction(Kg) 4 20 30
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
**Note: No self-locking function after power off.
29
Dimensions:
CZF8-60 CZF20-120
CZF40-200
30Tel: +86 10 56370168 www.zolix.com.cn
TBZF Series Motorized Vertical-Motion Stages
Description:
Zolix's TBZF series motorized vertical-motion stage is a very ideal option for
applications with requirements of middle or large size but high repetition rates.
Fine-grinding techniques are applied in guide surface treatment to ensure
motion accuracy. 1mm or 2mm lead-pitch grinding screws whose nuts are made
of wear-resistant tin bronze constitute main parts of driving systems, working
with standard two-phase stepping motors, to ensure higher resolution and
positioning accuracy.
Features:
•Fine-grinding screws whose nuts are made
of wear-resistant tin bronze provide higher
durability
•Wedge-type structure design to ensure higher
rigidity and higher loading capability.
•Smooth running comes from employing linearslider guides.
Naming rules:
Linear Slide Guide
TBZF 10-120 (-ST528)
Effective
travel rang:
6:6mm
10:10mm
30:30mm
Motor type：
None (default): standard
twophase stepping motors
ST528: optional five-phase 28
stepping motor
Dimension of table:
120:120mm×120mm
200:200mm×200mm
Series code：
TBZF: Grinding screw,
linearslider guides, aluminum
alloy and horizontal driving
31
Selection chart:
Model TBZF6-60** TBZF10-120 TBZF30-200
Mechanical
specifications
Travel range(mm) 6 10 30
Stage surface size(mm) 60×60 120×120 200×200
Transmission mechanism Ball screwsφ6×1 Grinding screws, φ8×1 Grinding screws, φ12×2
Guide mechanism linear-slider guides
Main body material, surface
treatment Black anodized aluminum alloy
Weight(Kg) 0.8 2.5 11.5
Accuracy
specifications
Resolution(step/half-step)
(µm) 3.5/1.75 1.82/0.91 6.49/3.245
20-fine-subdivision
resolution(µm) 0.175 0.091 0.325
Highest speed(mm/s)* 7 3.64 13
Repositioning accuracy(µm) ≤±2.5
Backlash(µm) ≤5
Static clearance(mm) ≤0.1
Electrical
specifications
Motor and its stepping
angle(°) Two-phase 28 stepping, 1.8 Two-phase 42 stepping, 1.8 Two-phase 57 stepping, 1.8
Brand and model number of
motor Shinano, STP-28D1003-08 Shinano, SST43D2126-10 Shinano, SST59D3206
Working current(A) 1.3 1.7 2.8
Holding torque of
motor(N·m) 0.0785 0.456 1.41
Brand and model number of
stepping driver(optional) Moons, SR2 Moons, SR2 Moons, SR4
Type of plug for stage DB9(pin)
Type of cable for stage Ordinary cable High flexibility cable(Helukabel, Germany)
Length of connection
cable(m) 0.2
Position-limit sensors(builtin) 2×PM-L25(SUNX, Japan) 2×GP1S09xHCPI(Janpan SHARP)
Origin-point sensors(builtin) 1×PM-L25(SUNX, Japan) 1×GP1S09xHCPI(Japan SHARP)
Voltage of power supply for
sensors(V) DC5~24V±10% DC5～24V±10%
Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports
Position-limit sensor:
Output ON when sensor is
blocked(conduction);
Zero position sensor: Output
OFF when sensor is blocked(Non
conduction);
Output ON when sensor is blocked
Maximum load
capacity Horizontal direction(Kg) 4 10 20
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
**Note: Non power off brake structure, after power off, the stage has no self-locking function.
32Tel: +86 10 56370168 www.zolix.com.cn
Dimensions:
TBZF6-60 TBZF10-120
TBZF30-200
33
CXZ Series Motorized Vertical Stage
Description:
CXZ series vertical stage is the latest products especially designed by Zolix for
occasions where compact dime nsion and high frequency operation is needed.
The main body is made by premium aluminium alloy, and surface is treated by
black anodic oxidation. This process gives the stage good wear resistance and
anti-stray light properties. Structurally speaking, crossed-roller guides, precision
ball screw and 2-phase stepping motor is employeed to ensure high resolution
and positioning repeatability.
Features:
•Equipped with precision ball, precision motion
•Wedge structure, high rigidity and high load
capacity
•Crossed-roller guides are employeed for sm
ooth translation
Naming rule:
CXZ-10-120 (-B)
Series code：
CXZ:ball screw, crossedroller guide, wedge
stucture, vertical stage.
Surface dimension：
120：120mm×120mm
Travel range：
10：10mm
Motor type：
None: 2-phase 42 stepping motor
without power-off locking mechanism
B: 2-phase 42 stepping motor with
power-off locking Mechanism
34Tel: +86 10 56370168 www.zolix.com.cn
Specifications:
Model CXZ10-120
Mechanical
specifications
Travel range(mm) 10
Stage surface size(mm) 120×120
Transmission mechanism Ball screwΦ8 x 2
Guide mechanism Crossed-roller guides
Main body material, surface treatment Black anodized aluminum alloy
Weight(kg) 2.6
Accuracy
specifications
Resolution(step/half step, µm) 5 / 2.5
20-fine-subdivision resolution(µm) 0.25
Highest speed(mm/s)* 10
Repositioning accuracy(µm) ≤±2.5
Backlash(µm) ≤5
Static clearance(mm) ≤0.1
Dynamic straightness(µm) ≤30
Electrical
specifications
Motor and its stepping angle(°) 2-phase stepping motor, 1.8
Brand and model number of motor Shinano, SST43D2126-10
Working current(A) 1.7
Torque of motor(mN·m) 456
Brand and model number of stepping driver Moons, SR2
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×GP1S09xHCPI(Japan SHARP)
Origin-point sensors(built-in) 1×GP1S09xHCPI(Japan SHARP)
Voltage of power supply for sensors(V) DC5~24V±10％
Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(w hen load current is 2mA)
Status of output ports out put ON whe n sensor is bloc ked
Maximum load
capacity Horizontal direction(Kg) 8
**Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
Dimensions:
CXZ10-120
35
PSAV Series Long Travel Range Motorized Vertical-Motion Stages
Description:
The PSAV series motorized vertical-motion stages utilize ball screw
reducers to ensure ultra-high load capacity. The backlash of ball
screw is smaller than grinding screw, which enhances motion and
positioning accuracy. Smooth operation is guaranteed by the use of
high-quality aluminum alloy and four linear bearing guides. This series
offers a wide travel range of 50-400mm, catering to most customers'
needs. These motorized vertical stages are ideal for applications
requiring higher load capacity and longer travel ranges in optical
experiments.
Features:
•Longer travel range and higher loading capability are
guaranteed by using ball screw reducers.
•Four pieces of linear bearing guides constitute guiding
mechanism to ensure high motion accuracy and smooth
running.
•Long travel range is up to 400mm
•Reliable standard two-phase 57 stepping motors feature
high torque and high loading capability
Naming rules:
PSAV 100-240 ZF
Travel range：
50:50mm
100:100mm
200:200mm
300:300mm
400:400mm
ZF:horizontal driving
Dimension of table：
240:240mm×240mm
Series code：
PSAV: standard precision,
ball screw, linear bearing
guides and aluminum alloy.
36Tel: +86 10 56370168 www.zolix.com.cn
Selection chart:
Model PSAV50-240ZF PSAV100-240ZF PSAV200-240ZF PSAV300-240ZF PSAV400-240ZF
Mechanical
specifications
Travel range(mm) 50 100 200 300 400
Stage surface size(mm) 240×240
Transmission mechanism φ40×5 Ball screws reducer, reduction ratio is 4: 1
Guide mechanism 4* linear-bearing guides
Main body material, surface
treatment Black anodized aluminum alloy
Weight(Kg) 14 16 20 24 28
Accuracy
specifications
Resolution(step/half-step)(µm) 6.25/3.125
8-fine-subdivision
resolution(µm) 0.781
Highest speed(mm/s)* 12.5
Electrical
specifications
Motor and its stepping
angle(°) Two-phase 57 stepping motor, 1.8
Model number of motor** MS-57BYG250CSC
Working current(A) 2.4
Holding torque of motor
(mN·m) 1900
Brand and model number of
stepping driver(optional) Moons, SR4
Type of plug for stage DB9(pin)
Position-limit sensors(built-in) 2×KX-SS-5GL2
Voltage of power supply for
sensors(V) DC5～24V±10%
Control output Dry contact point output
Status of output ports Output ON when sensor is triggered
Maximum
load capacity Horizontal load(Kg)*** 200 180 150 120 100
*Note: Highest speed is measured with the conditions of zero-load and motors being worked at 600rpm
**Note: Power failure protector must be turned on before motors running
***Note: Time-delay protection circuits need to be added when loading is higher than 50Kg
37
PSAVxx-240ZF
Dimensions:
Model PSAV50-240ZF PSAV100-240ZF PSAV200-240ZF PSAV300-240ZF PSAV400-240ZF
Overall height(mm) 251~301 308~408 411~611 515~815 627~1027
38Tel: +86 10 56370168 www.zolix.com.cn
KAxx-Z Series High-Precision Motorized Vertical-Motion Stages
Description:
KAxx-Z series high-precision motorized vertical-motion stages are derivative models of Zolix's KA series products. An added rightangle fixing block and a set of power-failure protection unit ensure KAxx-Z series stages can be used as high-precision verticalmotion carriers. Except for motion direction and loading capability, other parameters are the same as those of standard KA
products. KAxx-Z is used for fine adjustments in the Z-direction.
Naming rules:
KA 100-(ST242)(-C)(-ER)(-SR)-Z
Series code：
KA: high precision, ball
screws、linear slider guides,
aluminum alloy, closed
loop(1μm resolution)
Travel range：
050:50mm
100:100mm
150:150mm
200:200mm
300:300mm
400:400mm Type of protection:
None(default):
without protection
C:with protection
Motor type：
None(default):Two-phase 57 stepping
motor
ST242: Two-phase 42 stepping motor
ASP1: Panasonic 100W AC servo
motor
ASY2:Yaskawa 200W AC servo motor
P1:Panasonic 100W motor mounting
plate and shaft coupling
Y2:Yaskawa 200W motor mounting
plate and shaft coupling
Grating ruler position：
None(default):left side
ER: right side
Sensor position:
None(default): built in
SL: external & left side
SR: external & right side
Note: The sensor and the grating ruler
cannot be located on the same side
Way to install：
Z: applied in vertical direction
KA 600-(ASP4)(-ER)-Z
Series code：
KA: high precision,ball screws,
linear-slider guide、aluminum
alloy, closed loop(0.5μm
resolution)
Travel range：
600:600mm
800 :800mm
1000:1000mm
None(default):Two-phase 57 stepping motor
ASP4: Panasonic 400W AC servo motor
ASY4:Yaskawa 200W AC servo motor
P4:Panasonic 400W motor mounting plate and shaft coupling
Y4:Yaskawa 400W motor mounting plate and shaft coupling
Grating ruler position：
None(default):left
ER: right
Way to install：
Z:applied in vertical
direction
39
Selection chart:
Model KA050-Z KA100-Z KA150-Z KA200-Z KA300-Z KA400-Z KA600-Z KA800-Z KA1000-Z
Mechanical
specifications
Travel range(mm) 50 100 150 200 300 400 600 800 1000
Stage surface size(mm) 120×120 150X150 200X200
Transmission mechanism precision ball screwφ12×4 precision ball
screwφ16×5 precision ball screwφ25×5
Guide mechanism linear-slider guides
Main body material, surface
treatment Black anodized aluminum alloy
Weight(Kg) 8.4 8.8 9.6 10.3 13.3 14.9 30.3 36 41
Shaft coupling(OD - OD1-
OD2)(mm) 30-6.35-8 34-8-12
Accuracy
specifications
Closed loop resolution(µm) 1 0.5
Open loop resolution under 20
subdivision(µm) 1 1.25
Highest speed(mm/s)* 40 50
Single-direction positioning
accuracy
≤30 ≤70µm
Repositioning accuracy(µm)** ≤±3 ≤±5
Static clearance(µm)** ≤3
Backlash(µm)** ≤5
Static parallelism(µm) ≤0.1 ≤0.12 ≤0.1
Dynamic straightness(µm) ≤10 ≤15 ≤15/100mm
Dynamic parallelism(µm) ≤15 ≤20 ≤15/100mm
Yaw(\") ≤30 ≤40 /
Pitch(\") ≤35 ≤55 /
Electrical
specifications
Motor and its stepping
angle(°) Two-phase 57 stepping motor, 1.8
Brand and model number of
motor Shinano, SST59D3201 Shinano, SST59D5301-SD
Working current(A) 2.0 3.0
Holding torque of motor(N·m) 1.3 1.57
Brand and model number of
grating ruler Fagor, MX or MKX series LAMOTION
Brand and model number of
stepping driver(optional) Moons, SR4
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×PM-L25(SUNX, Japan)
Origin-point sensors(built-in) 1×PM-L25(SUNX, Japan)
Voltage of power supply for
sensors(V) DC5~24V ±10%
Current consumption(mA) <=60mA
Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports Position limit sensor: output ON when sensor is blocked;
Origin-point sensor: output OFF when sensor is blocked;
Maximum load
capacity Vertical direction-central(Kg) 15 30
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
**Note: Run in open loop mode.
40Tel: +86 10 56370168 www.zolix.com.cn
KA050-Z
KA150-Z
KA100-Z
KA200-Z
Dimensions:
KA300-Z KA400-Z
41
KA600-Z KA800-Z
KA1000-Z
42Tel: +86 10 56370168 www.zolix.com.cn
PAxx-Z Series Precise Motorized Vertical-Motion Stages
Description:
PAxx-Z series precise motorized vertical-motion stages are new-developed products based on Zolix's standard PA series motorized
linear stages, adding a set of right-angle fixing block and power-failure protection unit. Except motion direction and loading
capability, other parameters are same as those of standard PAxx products. PAxx-Z is used for fine adjustments in Z-direction.
Naming rules:
PA 100-(ST242)(-C)(-SR)-Z
Series code：
PA: precision,ball
screws, linear-slider
guides,aluminum alloy.
Travel range：
050:50mm
100:100mm
150:150mm
200:200mm
300:300mm
400:400mm
600:600mm
800:800mm
1000:1000mm Type of
protection:None(default)
: without protection
C:with protection
Motortype :
None(default):Two-phase 57 stepping
motor
ST242: Two-phase 42 stepping motor
ASP1: Panasonic 100W Ac servo
motol
ASY2:Yaskawa 200W AC servo motor
P1:Panasonic 100w motor mounting
plate and shaft coupling
Y2:Yaskawa 200w motor mounting
plate and shaft coupling
Sensor position:
None(default): built in
SL: exteral & left side
SR: extemal & right side
Way to install
Z: applied in vertical
43
Selection chart:
Model PA050-Z PA100-Z PA150-Z PA200-Z PA300-Z PA400-Z PA600-Z PA800-Z PA1000-Z
Mechanical
specifications
Travel range(mm) 50 100 150 200 300 400 600 800 1000
Stage surface size(mm) 120×120 150X150 200X200
Transmission mechanism precision ball screwΦ12×4 precision ball
screwΦ16×5 precision ball screwΦ25×5
Guide mechanism linear-slider guides
Main body material, surface
treatment Black anodized aluminum alloy
Weight(Kg) 7.6 8.2 9 9.7 12.3 14 29.5 35 40
Shaft coupling(OD - OD1-
OD2)(mm) 30-6.35-8 32-8-12
Accuracy
specifications
Resolution(µm) 20 25
20-fine-subdivision
resolution(µm) 1 1.25
Highest speed(mm/s)* 40 50
Single-direction positioning
accuracy
≤30 /
Repositioning accuracy(µm) ≤±3 ≤±5
Static clearance(µm) ≤3
Backlash(µm) ≤5
Static parallelism(µm) ≤0.1 ≤0.12
Dynamic straightness(µm) ≤20 ≤25 ≤15µm/100mm
Dynamic parallelism(µm) ≤25 ≤30 ≤15µm/100mm
Yaw(\") ≤50 /
Pitch(\") ≤55 ≤60 /
Electrical
specifications
Motor and its stepping
angle(°) Two-phase 57 stepping motor, 1.8
Brand and model number of
motor Shinano, SST59D3201 Shinano, SST59D5301-SD
Working current(A) 2.0 3.0
Holding torque of motor(N·m) 1.3 1.57
Brand and model number of
stepping driver(optional) Moons, SR4
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) 2×PM-L25(SUNX, Japan)
Origin-point sensors(built-in) 1×PM-L25(SUNX, Japan)
Voltage of power supply for
sensors(V) DC5~24V±10%
Current consumption(mA) <60(total)
Control output NPN open collector output DC5～24V 8mA or less
Residual voltage 0.3V or less(when load current is 2mA)
Status of output ports Position limit sensor: output ON when sensor is blocked;
Origin-point sensor: output OFF when sensor is blocked;
Maximum load
capacity Vertical direction-central(Kg) 15 30
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
44Tel: +86 10 56370168 www.zolix.com.cn
PA050-Z PA100-Z
Dimensions:
PA150-Z PA200-Z
PA300-Z PA400-Z
45
PA600-Z PA800-Z
PA1000-Z
46Tel: +86 10 56370168 www.zolix.com.cn
TBRU Series High Precision Closed-Loop Motorized Rotation Stages
Description:
TBRU series product is a high-precision closed-loop motorized rotary stage,
which is suitable for occasions with high requirements for angle adjustment. The
guide mechanism adopts precision crossed-roller ring, the shaft structure adopts
wear-resistant worm gear and worm, worm material adopts high-frequency
quenched alloy structural steel, high hardness, good rigidity, worm gear material
selects tin bronze, has outstanding wear resistance. The main body is black
anodized aluminum alloy which ensure high rotation accuracy, axial run-out,
concentricity and other key indicators to reach the international level of similar
products. The unique worm gear adjustment mechanism effectively eliminates
mechanical errors and ensures long-term accuracy. This series of products has
high load capacity and can be used for vertical and inverted use.
Features:
•Refined Worm Gear Transmission:
Ensures high precision positioning
performance.
•Built-in Circle Grating: Provides
Closed-Loop resolution up to 0.55\".
•High Grade Crossed-Roller Ring:
Offers high motion characteristics and
durability.
•Standard Two-Phase Stepping Motor:
Ensures stable and reliable operation.
•Built-in Origin-Point Sensor: Facilitates
easy operation and setup.
Naming rules:
Worm and Gear
Motorized Rotation Stages
The motorized rotary stage refers to the motorized equipment that drives the stage to rotate in the direction of Z axis through the motor.
TBR &TBRF
Series
TBRK Series
TBRU Series Big, middle size
Big, middle size
Small, middle size
Motorized Rotation
Stages
SIN Series Small size
worm gear and
worm
worm gear and
worm
worm gear and
worm
Ball screws
crossed-roller ring
Crossed-roller ring
Crossed-roller ring
Linear slider guides
High precision, high repeatability,
high load capacity
Ultra high precision, high rigidity,
high load capacity
High precision, high rigidity, high
durability
High precision, sinusoidal
mechanism, small angle
TBRU 100(-SSxx)
Series code:
TBRU: Wear-resistant tin bronze
worm gear, high precision,
aluminum alloy, crossed-roller
ring, closed loop.
Table dimesions：
100:φ102mm
200:φ196mm
Sensor position：
None(default):Built-in
SSxx: Externally installed,
xx: angle range
47
Selection chart:
Model TBRU100 TBRU200
Mechanical
specifications
Table size(mm) Φ102 Φ196
Angle range(°) 360
Worm Gear Ratio 180: 1
Guide Mechanism crossed-roller ring
Material of worm gear Wear-resistant tin bronze
Material and process technology of
worm Steel, high frequency quenching
Main body material and surface Black anodized aluminum alloy
Weight(Kg) 3.4 11.5
Shaft coupling(OD - OD1- OD2)(mm) 20-5-5 25-6.35-6.35
Accuracy
specifications
Closed loop resolution(°/pp) 0.000152027 0.0000762712
Open loop resolution under 8
subdivision(°) 0.00125
Highest speed(°/s)* 20
Repositioning accuracy(°) ≤±0.003
Static clearance(µm) ≤6 ≤12
Backlash(°) ≤0.003
Static parallelism(mm) ≤0.08
End jump(axial runout)(µm) ≤36 ≤40
Radial runout(µm) ≤27 ≤30
Electrical
specifications
Motor and Angle(°) Two-phase 57 stepping motor, 1.8 Two-phase 57 stepping motor, 1.8
Motor model 42M-1.8D-C-10 57M-1.8D-C
Working current(A) 1.7 2.4
Motor Torque(N-m) 0.42 1
Grating ruler brand LAMOTION
Driver brand and model(optional) Moons, SR2 Moons, SR4
Type of plug for stage DB9(pin)
Type of cable for stage High flexibility cable(Helukabel, Germany)
Length of connection cable(m) 0.2
Position-limit sensors(built-in) None(external in optional)
Origin-point sensors(built-in) 1×PM-L25(SUNX, Japan)
Sensor voltage(V) DC5~24V±10%
Current consumption(mA) ≤15
Control output NPN open collector output; DC5～24V 50mA or less
Status of output ports Output ON when sensor is blocked
Maximum load
capacity
Horizontal direction(Kg) 20 40
Inverted direction(Kg) 5 10
Vertical direction(Kg) 5 10
*Note: Highest speed is measured under zero-load conditions with the motor running at 600 RPM.
48Tel: +86 10 56370168 www.zolix.com.cn
TBRU100
Dimensions:
TBRU200
Zero position
Scale: 0° ~ 360°
49
TBR/TBRF Series Motorized Rotation Stages
Description:
The TBR series stages are designed to meet the requirements of high
precision, high rigidity, and high repeatability in industrial automation
fields. The worm gears in the TBR series are made of tin bronze,
offering excellent wear-resistant performance. The matched worm
is made of stainless steel, treated with high-frequency quenching,
providing high hardness and rigidity.
A fine crossed-roller ring constitutes the main part of the guiding
mechanism, offering high strength, high load capacity, and longterm durability. These stages can be operated horizontally, vertically,
and even inverted. Higher motion accuracy is ensured by the finely
designed inner shaft structure.
Standard TBR series products employ worm gears with a higher
transmission ratio, resulting in higher meshing accuracy but slower
rotation speeds. The TBRF version runs faster than the standard TBR
series by using a set of worm gears with a smaller transmission ratio.
Features:
•Excellent Wear Resistance: Achieved through tin bronze
worm gears.
•High Hardness and Rigidity: Provided by stainless
steel worms treated with high-frequency quenching
techniques.
•Robust Guiding Mechanism: Fine crossed-roller ring
offers high strength, high loading capability, and
good durability for horizontal, vertical, and inverted
operations.
•Smooth Running and Minimal Backlash: Ensured by
a gap-adjustment mechanism and high-meshingaccuracy worm gear/worm.
•Motor Options: Standard with two-phase stepping
motors; optional servo motors from various brands.
•Ease of Operation: Equipped with a built-in origin-point
sensor.
Naming rules:
Worm and Gear
TBR 200 (L)(-ASP2)(-SSxx)
Series code:
TBR: worm gear made of wearresistant tin bronze, high precise,
aluminum alloy, crossed-roller ring.
TBRF: high speed,wear-resistant tin
bronze, high precision, aluminum
alloy, crossed-roller ring.
Motor type：
None (default): standard two phase stepping motors
ASP1: Panasonic 100W Ac servo motor
ASY2: Yaskawa 200W AC servo motor
P1: Panasonic 100w motor mounting plate and shaft
coupling Series code:
TBR: worm gear made of wear-resistant tin bronze,
high precise, aluminum alloy, crossed-roller ring.
Table diameter：
60:φ59mm
75:φ75mm
100:φ102mm
200:φ196mm
Position of motor
mounting：
None(default):right side
L: left side
N: Special model(Table
sizeφ60mm)
Sensor position：
None (default): built-in
SSxx: Externally installed, xx: angle
range
