www.multi-field.com ｜ MultiFields Technologies

Piezo Motion · RT

46

XYZ Piezo Scanner — S100.XYZ.C.P

Ultra Compact XYZ Stack System

➡ Specification S100.XYZ.C.P

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction X, Y, Z

3 Footprint × Height 40 × 40 × 40 mm

4 Material Aluminum, Stainless Steel

5 Travel Range

(Close-loop X/Y/Z) 100 × 100 × 100 μm

6 Linearity 0.03%

7 Resolution (Close-loop) 1 nm

8 Repeatability (X/Y/Z) 10 nm

9 Resonant Frequency

(X/Y/Z no load) 700 / 700 / 700 Hz

10 Max. Payload 200g

11 Sensor Type Capacitive

12 Driving Voltage Max. 150 V

13 Working Temperature 15 ~ 40 °C

15 Cable D-Sub 3W3

16 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• Direct Metrology

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• Parallel Motion

➡ Photo & Drawing

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

62.00

40.00

51.50

30.00

26.00

18.00

4 x M2.5

13.50

40.00

69.60

30.00

6 x M2.5

18.00

44.00

18.00

80.00 13.50

➡ Specification SD15.X.C SD30.X.C

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction X

3 Footprint × Height 62 × 40 × 13.5 mm 80 × 40 × 13.5 mm

4 Material Stainless Steel

5 Travel Range

(Close-loop) 15 μm 30 μm

6 Resolution (Close-loop) 0.1 nm 0.2 nm

7 Repeatability 2 nm 4 nm

8 Linearity 0.03%

9 Pitch/Yaw 2 μrad

10 Resonant Frequency 3.3 kHz 2.2 kHz

11 Resonant Frequency

(300 g load) 1 kHz 0.625 kHz

12 Stiffness 28 N/μm 18 N/μm

13 Sensor Type Capacitive

14 Working Temperature 15 ~ 40 °C

15 Mass 250 g 350 g

16 Cable D-Sub 3W3

17 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

www.multi-field.com ｜ MultiFields Technologies

Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT

47

X Piezo Scanner — SD15/30.X.C

Standard Single Axis Piezo Scanner Module, High Dynamic

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• Direct Metrology

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• ms Response Time

➡ Photo & Drawing

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification SH30.XYZ.C

1 Optional .HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction X, Y, Z

3 Footprint × Height 160 × 160 × 35 mm

4 Material Stainless Steel

5 Travel Range (Close-loop) 30 x 30 x 15 μm

6 Resolution (Open-loop) 0.1 nm

7 Resolution (Close-loop) 0.3 nm

8 Pitch/Yaw 20 / 20 / 50 μrad

9 Resonant Frequency 500 Hz

10 Max. Payload 10 kg

11 Sensor Type Capacitive

12 Driving Voltage Max. 150 V

13 Working Temperature 15 ~ 40 °C

14 Mass 2 kg

15 Cable D-Sub 3W3

16 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

www.multi-field.com ｜ MultiFields Technologies

XYZ Piezo Scanner — SH30.XYZ.C

High Load XYZ Unit

Piezo Motion · RT

48Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• High Load

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• Direct Metrology

➡ Photo & Drawing

160.0

160.0

115.0 140.0

140.0

70.7

70.7

115.0

160.0

34.5

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Carrier.OB Series

Objective Focusing & Scanning

Travel Range up to 400 μm, High Dynamic optional, High Load above 10 kg

available, Z and XY types

Piezo Motion · RT

49

Travel Range Product Code

100 μm Carrier.OB100.C

200 μm Carrier.OB200.C

400 μm Carrier.OB400.C

100 μm (High Load) Carrier.OBHL100.C

200 × 200 μm Carrier.OB200.XY.C

* Non-magnetic, Ultra High Vacuum Versions available

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT

50

Resonant Frequency

(150 g payload) Close-loop Resolution

250 Hz 1 nm

220 Hz 3 nm

165 Hz 5 nm

560 Hz 1 nm

300 Hz 2 nm

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT

51

➡ Specification Carrier.OB100.C Carrier.OB200.C Carrier.OB400.C

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction Z

3 Travel Range 100 µm 200 µm 400 µm

4 Pitch/Yaw ±10 µrad ±20 µrad ±30 µrad

5 Linearity 0.03%

6 Resolution (Open-loop) 0.2 nm 0.4 nm 0.8 nm

7 Resolution (Close-loop) 1 nm 3 nm 5 nm

8 Repeatability 10 nm

9 Sensor Type Capacitive

10 Response Time 15 ms 19 ms 24 ms

11 Stiffness 0.5 N/μm 0.35 N/μm 0.25 N/μm

12 Resonant Frequency

(no load) 600 Hz 480 Hz 380 Hz

13 Resonant Frequency

(150 g) 250 Hz 220 Hz 165 Hz

14 Mass 270 g 350 g

15 Material Stainless Steel, Aluminum

16 Working Temperature 15 ~ 40 °C

17 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Objective Z Scanner — Carrier.OB.C

For Optical Microscopy

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving • Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• Auto Focus Option

➡ Photo & Drawing

65.00

4.00

11.50 27.25

M25 x 0.75

50.00

22.00

45.00 65.00

RMS内螺纹

R20.00

65.00

4.00

11.50 27.25

M25 x 0.75

50.00

22.00

45.00 65.00

RMS内螺纹

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification Carrier.OBHL100.C

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction Z

3 Travel Range 100 µm

4 Linearity 0.03%

5 Repeatability 3 nm

6 Sensor Type Capacitive

7 Resolution (Open-loop) 0.3 nm

8 Resolution (Close-loop) 1 nm

9 Response Time 5 ms

10 Stiffness 3 N/μm

11 Resonant Frequency

(no load) 1 KHz

12 Resonant Frequency

(150 g) 560 Hz

13 Mass 500 g

14 Material Stainless Steel, Aluminum

15 Working Temperature 15 ~ 40 °C

16 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Piezo Motion · RT

www.multi-field.com ｜ MultiFields Technologies

52

Objective Z Scanner — Carrier.OBHL100.C

For Optical Microscopy

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• ms Response Time

• Auto Focus Option

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• Higher Payload

➡ Photo & Drawing 69.0

66.6

27.0

40.0

21.0 67.0 49.0 44.0

M25 x0.75

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification Carrier.OB200.XY.C

1 Optional .NM, Non-magnetic;

.UHV, Ultra High Vacuum Version;

2 Motion Direction XY

3 Footprint × Height 70 × 70 × 25 mm

4 Material Aluminum, Stainless Steel

5 Travel Range 200 × 200 μm

6 Clear Aperture 20 mm

7 Resolution (Close-loop) 2 nm

8 Repeatability 10 nm

9 Linearity 0.03%

10 Resonant Frequency

(no load) 350 Hz

11 Max. Payload 500 g

12 Sensor Type Capacitive

13 Driving Voltage Max. 150 V

14 Working Temperature 15 ~ 40 °C

15 Mass 280 g

16 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Piezo Motion · RT Piezo Motion · RT

53

Objective XY Scanner — Carrier.OB200.XY.C

For Optical Microscopy

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• Direct Metrology

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• High Dynamic

➡ Photo & Drawing

70.00

20.00 贯穿

70.00

25.00

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT

54

Carrier series combination for microscopy

Sample Position, Objective Focus, Photon Laser Scan

➡ Specification

1 Combination

(top-down)

Carrier.OB400.C

Carrier.SL200.XYZ.C

Carrier.L1010s.XY

2 Motion Direction XYZ

3 Coarse Travel Range 100 × 100 mm (XY, Carrier.L1010s.XY)

4 Fine Scanning Range 200 × 200 × 200 μm (XYZ, Carrier.SL200.XYZ.C)

5 Objective Focusing Rage 400 μm (Z, Carrier.OB400.C)

6 Minimum Incremental Motion

(Close-loop) 10 nm (XY, Carrier.L1010s.XY)

7 Fine Scanning Resolution

(Close-loop) 2 nm (XYZ, Carrier.SL200.XYZ.C)

* For detail drawing and 3D model please contact us.

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT

55

Carrier.S Series

Versatile, High Performance

Multi Degrees of Freedom, Parallel Metrology with Capacitive Sensor, Parallel Kinematic

Travel Range - 100 μm

1 Axis

Carrier.S100.Z.C

100 μm

2 Axes

Carrier.S100.XY.C

100 μm, 100 μm

3 Axes

Carrier.S100.XYZ.C

100 μm, 100 μm, 100 μm

Carrier.S100.XYRz.C

100 μm, 100 μm, ± 1 mrad

Carrier.S100.ZTxTy.C

100 μm, ± 1 mrad, ± 1 mrad

6 Axes

Carrier.S100.XYZTxTyRz.C

100 μm, 100 μm, 100 μm, ± 1 mrad,

± 1 mrad, ± 1 mrad

* Non-magnetic, Ultra High Vacuum Versions available

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Travel Range - 200 μm Travel Range - 300 μm

Carrier.S200.Z.C

200 μm

Carrier.S200.XY.C

200 μm, 200 μm

Carrier.S200.XYZ.C Carrier.S300.XYZ.C

200 μm, 200 μm, 200 μm 300 μm, 300 μm, 300 μm

Carrier.S200.XYRz.C

200 μm, 200 μm, ± 2 mrad

Carrier.S200.ZTxTy.C

200 μm, ±2 mrad, ±2 mrad

Carrier.S200.XYZTxTyRz.C

200 μm, 200 μm, 200 μm, ± 2 mrad,

± 2 mrad, ± 2 mrad

www.multi-field.com ｜ MultiFields Technologies

56Piezo Motion · RT

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT

57

➡ Specification Carrier.S100.Z.C Carrier.S200.Z.C

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction Z

3 Footprint × Height 150 × 150 × 30 mm

4 Material Aluminum, Stainless Steel

5 Travel Range

(Close-loop) 100 μm 200 μm

6 Aperture 80 × 80 mm

7 Linearity 0.03%

8 Pitch / Yaw 50 μrad ±50 μrad

9 Roll 10 μrad ±10 μrad

10 Resolution

(Close-loop / Open-loop) 1 nm / 0.3 nm

11 Repeatability 10 nm 10 nm

12 Stiffness 2.5 N/μm 1.7 N/μm

13 Resonant Frequency

(no load / 2.5 kg) 500 / 200 Hz 350 / 120 Hz

14 Max. Payload 5 kg

15 Sensor Type Capacitive

16 Driving Voltage Max. 150 V

17 Working Temperature 15 ~ 40 °C

18 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Z Piezo Scanner — Carrier.S100/200.Z.C

Versatile, High Performance, Clear Aperture, Z Motion

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• Direct Metrology

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• Large Aperture

➡ Photo & Drawing

4 x 6.60 完全贯穿

11.00 15.00

24 x M3 - 6H 5.00

2.50 5.00

150.00 125.00 60.00

150.00

125.00

60.00

80.00

80.00

30.00

150.00

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification Carrier.S100.XY.C Carrier.S200.XY.C

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction XY

3 Footprint × Height 150 × 150 × 30 mm

4 Material Aluminum, Stainless Steel

5 Travel Range

(Close-loop XY) 100 x 100 μm 200 x 200 μm

6 Aperture 66 × 66 mm

7 Linearity 0.03%

8 Resolution

(Close-loop / Open-loop) 1 nm / 0.2 nm 2 nm / 0.4 nm

9 Repeatability 10 nm 10 nm

10 Stiffness 2 N/μm 1 N/μm

11 Resonant Frequency

(no load / 2.5 kg) 420 / 130 Hz 340 / 100 Hz

12 Max. Payload 5 kg

13 Sensor Type Capacitive

14 Driving Voltage Max. 150 V

15 Working Temperature 15 ~ 40 °C

16 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

www.multi-field.com ｜ MultiFields Technologies

58Piezo Motion · RT

XY Piezo Scanner — Carrier.S100/200.XY.C

Versatile, High Performance, Clear Aperture, XY Motion

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• Parallel Metrology

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

➡ Photo & Drawing

150.0 125.0 60.0

150.0

125.0

60.0

66.0

66.0

4 x 6.4 7.0

24 x M3 3.5

150.0

30.0

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT

59

➡ Specification Carrier.S100.XYZ.C Carrier.S200.XYZ.C Carrier.S300.XYZ.C

1 Optional .NM, Non-magnetic; .HV, High Vacuum Version; .UHV, Ultra High Vacuum Version;

2 Motion Direction XYZ

3 Footprint × Height 150 × 150 × 30 mm

4 Material Aluminum, Stainless Steel

5 Travel Range(XYZ) 100 x 100 x 100 μm 200 x 200 x 200 μm 300 x 300 x 300 μm

6 Aperture 66 × 66 mm

7 Resolution

(Close-loop/Open-loop) 1 nm / 0.3 nm 1.5 nm / 0.4 nm 2 nm / 0.5 nm

8 Repeatability 10 nm 10 nm 10 nm

9 Linearity(XYZ) 0.03%

10 Crosstalk

(Z-XY) ±30 nm ±50 nm

11 Resonant Frequency

(XYZ no load) 180 / 180 / 390 Hz 155 / 155 / 320 Hz 135 / 135 / 250 Hz

12 Resonant Frequency

(XYZ 350 g) 150 / 150 / 250 Hz 120 / 120 / 200 Hz 90 / 90 / 140 Hz

13 Max. Payload 5 kg 3 kg

14 Sensor Type Capacitive

15 Driving Voltage Max. 150 V

16 Working Temperature 15 ~ 40 °C

17 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

XYZ Piezo Scanner — Carrier.S100/200/300.XYZ.C

Versatile, High Performance, Clear Aperture, XYZ Motion

➡ Feature •Piezo Stack Driving

• Direct Metrology

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• Large Aperture

➡ Photo & Drawing

150.00 125.00 60.00

60.00

125.00

150.00

66.00

66.00

4 x 6.40 完全贯穿

11.00 7.00

2.50 5.00

2.90 X 90°

30.00

150.00

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification Carrier.S100.ZTxTy.C Carrier.S200.ZTxTy.C

1 Optional .NM, Non-magnetic; .HV, High Vacuum Version; .UHV, Ultra High Vacuum Version;

2 Motion Direction Z, θx, θy

3 Footprint × Height 150 × 150 × 30 mm

4 Material Aluminum, Stainless Steel

5 Travel Range(Z, θx, θy) 100 μm, ±1 mrad, ±1 mrad 200 μm, ±2 mrad, ±2 mrad

6 Aperture 80 × 80 mm

7 ZLinearity 0.03%

8 θLinearity 0.15%

9 Z Resolution

(Close-loop/Open-loop) 1 nm / 0.5 nm 1.5 nm / 0.7 nm

10 θ Resolution

(Close-loop/Open-loop) 0.05 μrad / 0.04 μrad 0.1 μrad / 0.06 μrad

11 Repeatability (Z/θ) 10 nm / ±0.05 μrad 10 nm / ±0.1 μrad

12 Stiffness 2 N/μm 1.5 N/μm

13 Z Resonant Frequency

(no load / 2.5 kg) 480 / 180 Hz 350 / 125 Hz

14 θ Resonant Frequency

(no load / 2.5 kg) 500 / 190 Hz 370 / 110 Hz

15 Max. Payload 5 kg

16 Sensor Type Capacitive

17 Driving Voltage Max. 150 V

18 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Piezo Motion · RT

60

ZTxTy Piezo Scanner — Carrier.S100/200.ZTxTy.C

Versatile, High Performance, Clear Aperture, Tip and Tilt Motion

Specifications subject to change without notice.

➡ Feature •Piezo Stack Driving

• Direct Metrology

• Flexure Guiding

• Sub-nanometer

Resolution

• CAP Sensor, Close-loop

Control

• Large Aperture

➡ Photo & Drawing

4 x 6.60 完全贯穿

11.00 15.00

24 x M3 - 6H 5.00

2.50 5.00

150.00 125.00 60.00

150.00

125.00

60.00

80.00

80.00

30.00

150.00

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification Carrier.S100.XYRz.C Carrier.S200.XYRz.C

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction X, Y, θz

3 Footprint × Height 150 × 150 × 30 mm

4 Material Aluminum, Stainless Steel

5 Travel Range (X, Y, θz) 100 μm, 100 μm, ±1 mard 200 μm, 200 μm, ±2 mard

6 Aperture 66 × 66 mm

7 Linearity (Z) 0.03%

8 Resolution

(Close-loop/Open-loop) 1 nm / 0.3 nm 2 nm / 0.5 nm

9 Repeatability 10 nm 10 nm

10 Stiffness 2 N/μm 1 N/μm

11 Resonant Frequency

(no load / 2.5 kg) 420 / 130 Hz 340 / 100 Hz

12 Max. Payload 5 kg

13 Sensor Type Capacitive

14 Driving Voltage Max. 150 V

15 Working Temperature 15 ~ 40 °C

16 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT

61Specifications subject to change without notice.

XYRz Piezo Scanner — Carrier.S100.XYRz.C

Versatile, High Performance, Clear Aperture, XY and Rz Motion

➡ Feature •Piezo Stack Driving

• Direct Metrology

• Flexure Guiding

• Nanometer

Resolution

• CAP Sensor, Close-loop

Control

➡ Photo & Drawing

150.0 125.0 60.0

150.0

125.0

60.0

66.0

66.0

4 x 6.4 7.0

24 x M3 3.5

150.0

30.0

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification Carrier.SL200.XY.C Carrier.SL200.XYZ.C

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction XY XYZ

3 Footprint × Height 182 × 150 × 19.5 mm 190 × 150 × 19.5 mm

4 Material Aluminum, Stainless Steel

5 Travel Range 200 × 200 μm 200 × 200 × 200 μm

6 Aperture 77 × 65 mm 77 × 65 mm

7 Resolution 2 nm

8 Repeatability 10 nm

9 Linearity 0.03%

10 Max. Payload 500 g

11 Sensor Type Capacitive

12 Driving Voltage Max. 150 V

13 Working

Temperature 15 ~ 40 °C

14 Combination Compatible with Carrier.L7550.XY

15 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Piezo Motion · RT

XY Piezo Scanner — Carrier.SL200.XY/XYZ.C

Large Clear Aperture, XY Motion, Low Profile

62Specifications subject to change without notice.

➡ Feature • Piezo Stack Driving • Flexure Guiding

• Nanometer

Resolution

• CAP Sensor, Close-loop Control

• For High Resolution Microscopy

• Combination with Long Travel

Range Piezo Motor Stage

➡ Photo & Drawing 190.0

175.0

150.0 135.020.0

20.0 4 x 6.6 贯穿

11.0 13.0

8 x 2.1 7.5

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification MC-Archimedes.N series

1 Control Mode Open-loop and Close-loop

2 Size 230 × 120 × (30 × (N+1)) mm

3 Structure FPGA

4 Channels N Channels (N ≤ 8)

5 Sensor Type .S Strain Gauge Sensor; .C Capacitive Sensor

6 Sensor Sample Rate 20 kHz / 50 kHz

7 Communication Interface USB, EtherNET

8 Stage Connector D-SUB 3W3

9 Power Supply 24V DC & (24 × N) W

10 Max. Output Power 24 W per Channel

11 Power Plug IEC inlet

12 Output Voltage -20 ~ 150 V

13 Analog In 0 ~ 10 V (single-ended)

14 Trigger SMA, TTL (3.3V)

15 Software PC GUI, SDK

* For detail drawing and 3D model please contact us.

Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT

63

Piezo Scanner Controller — MC-Archimedes.N

Multi-channels, Low Noise, High Bandwidth

Specifications subject to change without notice.

➡ Feature • Fully Digital Process

• Digital Linearization

• High Performance

Algorithm

• Hardware Trigger

• Digital, Analog Control

• Multi Channels

➡ Photo & Drawing

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT

64

Piezo Scanner Controller — MC-Archimedes.N

High Performance, Digital Process

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT Piezo Motion · RT

65

www.multi-field.com ｜ MultiFields Technologies

Mirrors Series

Fast Steering Mirror

Dynamic, Robust, Compact

Short Range

1 Axis Mirrors.Z12

12 μm

2 Axes Tx Ty

Mirrors.TxTy0303

±1.5 mrad, ±1.5 mrad

3 Axes Mirrors.Z12TxTy0101

12 μm, 1 mrad, 1 mrad

* Non-magnetic, Ultra High Vacuum Versions available

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT

66

www.multi-field.com ｜ MultiFields Technologies

Mid Range

Mirrors.TxTy1010

±5 mrad, ±5 mrad

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT Piezo Motion · RT

67

➡ Specification Mirrors.Z12

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction Z

3 Footprint × Height Φ25 × 31 mm

4 Material Stainless Steel

5 Travel Range(Open-loop) 15 μm

6 Travel Range(Close-loop) 12 μm

7 Resolution (Close-loop) 0.2 nm

8 Linearity 0.1%

9 Stiffness 40 N/μm

10 Resonant Frequency 4 kHz

11 Max. Payload 200 g

12 Sensor Type SGS

13 Driving Voltage Max. 150 V

14 Working Temperature 15 ~ 40 °C

15 Cable D-Sub 3W3

16 Mass 40 g

17 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Piezo FSM — Mirrors.Z12

High Dynamic Motion for Beam Steering, Phase Turning

Specifications subject to change without notice.

➡ Feature • Piezo Stack

Driving

• Sub-nanometer

Resolution

• Flexure Guiding

• ms Response Time

• SGS sensor, Close-loop

➡ Photo & Drawing

4 x M2 - 6H 4.00

1.60 5.20

10.00

10.00

25.00 23.00

31.00

25.00

23.00

4 x M2 - 6H 1.60 10.00

10.00

25.00 23.00

31.00

25.00

23.00

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

➡ Specification Mirrors.TxTy.0303 Mirrors.TxTy.1010

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction Tx, Ty

3 Footprint × Height Φ25 × 45 mm Φ25 × 75 mm

4 Material Stainless Steel

5 Travel Range (Close-loop) ±1.5 mrad, ±1.5 mrad ±5 mrad, ±5 mrad

6 Resolution (Open-loop) 0.05 μrad (Open-loop) 0.2 μrad (Open-loop)

7 Resolution (Close-loop) 0.1 μrad (Close-loop) 0.5 μrad (Close-loop)

8 Linearity 0.1%

9 Resonant Frequency

(no load) 2 kHz 1 kHz

10 Tilt Radius 6.5 mm 6.5 mm

11 Sensor Type SGS

12 Driving Voltage Max. 150 V

13 Working Temperature 15 ~ 40 °C

14 Cable D-Sub 3W3

15 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Piezo Motion · RT

68

Piezo FSM — Mirrors.TxTy0303/1010

High Dynamic Motion for Beam Steering, Tip and Tilt

Specifications subject to change without notice.

➡ Feature • Piezo Stack

Driving

• Flexure Guiding

• ms Response Time

• SGS sensor, Close-loop

• 2 Axes Direct Control

➡ Photo & Drawing

25.00

2.50

7.00 46.00

5.00 96.00

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT Piezo Motion · RT

69

➡ Specification Mirrors.Z12TxTy0101

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Motion Direction Z, Tx & Ty

3 Footprint × Height 30 × 30 mm

4 Material Aluminum, Stainless Steel

5 Travel Range

(Close-loop Z / Tx / Ty) 12 μm / 1 mrad / 1mrad

6 Resolution

(Open-loop Z / Tx / Ty) 0.2 nm / 0.05 μrad / 0.05 μrad

7 Resolution

(Close-loop Z / Tx / Ty) 0.4 nm / 0.1 μrad / 0.1 μrad

8 Linearity(Z / Tx /Ty) 0.2%

9 Resonant Frequency 5.5 kHz

10 Stiffness 10 N/µm

11 Sensor Type SGS

12 Driving Voltage Max. 150 V

13 Working Temperature - 20 ~ 80 °C

14 Cable D-Sub 3W3

15 Controller MC-Archimedes.N

* For detail drawing and 3D model please contact us.

Specifications subject to change without notice.

Piezo FSM — Mirrors.Z12TxTy0101

High Dynamic Motion for Beam Steering, Z, Tip and Tilt

➡ Feature •Piezo Stack Driving

• Clear Aperture

• ms Response Time

• Flexure Guiding

• Sub-nanometer

Resolution

• SGS sensor, Close-loop

• Tripod Structure

➡ Photo & Drawing

30.0

30.0

4 x M2

25.0

17.0

25.0 17.0

4 x 2.2

30.5

25.0

23.0

30.0

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

www.multi-field.com ｜ MultiFields Technologies

Piezo Screw Actuator — AutoScrew.LR

Piezo Motor Driving with Screw Actuator, for Motorized Mirror Mount

Piezo Motion · RT

70Specifications subject to change without notice.

➡ Feature • Self-lock • Large Force, Rigid • Compatible with Standard Mirror Mount

➡ Photo & Drawing

➡ Specification AutoScrew.LR

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Footprint × Height 35 × 15 × 57.4 mm

3 Material Stainless Steel

4 Cable & Connector Standard, shield cable and SMB plug; .HV and .UHV, Kapton, PEEK-2mm pins

5 Travel Range 10 mm

6 Max. Velocity 2 mm/min

7 Minimum Incremental

Motion 20 nm (typical), up to 50 nm

8 Driving Frequency 2 kHz

9 Max. Output Force 20 N (up to 50N)

10 Holding Force 100 N

11 Lateral Force 1 N

12 Controller MC - Newton E4

13 Max. Driving Voltage 100V

* For detail drawing and 3D model please contact us.

➡ Specification AutoScrew.LR.Set.01 AutoScrew.LR.Set.02

1 Compatible Optics 1 inch 2 inch

2 Angular Motion Range ±4 ° ±3 °

3 Angular Motion Resolution 0.5～1.5 μrad 0.4～0.9 μrad

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

www.multi-field.com ｜ MultiFields Technologies

Piezo Screw Actuator — AutoScrew.LR

Piezo Motor Driving with Screw Actuator, for Motorized Mirror Mount

Piezo Motion · RT Piezo Motion · RT

71Specifications subject to change without notice.

➡ Feature •Sub-nanometer Resolution • Dynamic Tunning

• Compatible with Standard Mirror Mount

➡ Photo & Drawing

➡ Specification AutoScrew.Nano

1 Optional

.NM, Non-magnetic;

.HV, High Vacuum Version;

.UHV, Ultra High Vacuum Version;

2 Material Stainless Steel / Aluminum

3 Cable & Connector Standard, shield cable and SMB plug; .HV and .UHV, Kapton, PEEK-2mm pins

4 Travel Range 18 μm

5 Resolution

(Open-loop) 1 nm

6 Driving Voltage 0 - 120 V

7 Capacitance of Piezo 550 nF

8 Max. Output Force 300 N

9 Mass 9.5 g

* For detail drawing and 3D model please contact us.

➡ Specification AutoScrew.Nano.Set.01 AutoScrew.Nano.Set.02

1 Compatible Optics 1 inch 2 inch

2 Angular Motion Range 0.5 mrad 0.3 mrad

3 Angular Motion Resolution 0.02 μrad 0.01 μrad

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

Piezo Motion · RT

72Specifications subject to change without notice.

Piezo Screw Actuator Controller — MC-Newton.E4

4 Channels

➡ Feature •Manual Control on Panel • Cost Effective

➡ Photo & Drawing

➡ Specification MC-Newton.E4

1 Control Mode Open-loop, Stepping

2 Channels 4

3 Communication Interface USB

4 Motor Connector SMB

5 Driving Voltage 120 V

6 Driving Frequency 2000 Hz

7 Manual Control Button on front panel

8 Power Supply 12 VDC

9 Software PC GUI, ASCII Command Code

* For detail drawing and 3D model please contact us.

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn

eld.com ｜ MultiFields Technologies

Piezoelectric Motion - RT

Zolix Instruments Co.,Ltd.

LDUV 68B, No. 16 Huanke Middle Rd, Golden Bridge,

Science and Technology Industrial Base, Zhongguancun

Science Park Tongzhou Zone, Tongzhou District, Beijing

China(101102).

www.zolix-group.com

info@zolix.com.cn

Zolix Instruments Co.,Ltd.

TEL: +86 10 5637 0168 Email: info@zolix.com.cn