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Piezoelectric Motion
non-magnetic, ultra-high vacuum compatible
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezoelectric Motion - RT
1 Piezo Motor Positioning 1-26
1.1 Lab series
LS35x.Lab, LS35z.Lab, LS65x.Lab, LS65z.Lab ……
3
1.1.1 LS Linear Stage
LS35x.Lab, LS35z.Lab, LS65x.Lab, LS65z.Lab ……
9
1.1.2 RS Rotary Stage
RS35.Lab, RS65.Lab …… 13
1.1.3 GS Goniometer Stage
GS35.Lab, GS65.Lab …… 15
1.2 Indus series
L030.Indus, L060.Indus, L100.Indus, L150.Indus & LS200.Indus
21
1.3 Mini series
X11.mini, X20.mini
22
Piezo Motion · RT
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
2 Multi Degrees of Freedom 27-38
2.1 Free XD series
Multi Degrees of Freedom, Long Travel Range, Parallel Kinematic
27
2.1.1 Z Tx Ty
Free3D.ZTxTy
29
2.1.2 X Y Z · Tx Ty Rz
Free6D.3-2.150, Free6D.3-2.070
30
2.2
Carrier series
Carrier.L7550.XY, Carrier.L1010.XY …… 33
2.3 Piezo Motor Controller
MC-Newton.S
37
Piezoelectric Motion - RT Piezo Motion · RT
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezoelectric Motion - RT
3 Piezo Scanner 39-48
3.1 Compact series
Compact Structure, Capacitive Sensor Feedback
41
3.1.1 S series, single axis, long travel range
S100.xyz.C, S100.z.C, S300.x.C…
43
3.1.2 SD series, high dynamic
SD15.x.C, SD30.x.C…
47
3.1.3 SH series, high load
SH30.xyz.C
48
3.2
Clear Aperture series
Versatile Stage, Multi Degrees of Freedom,Capacitive Sensor
Feedback
49-64
3.2.1 Carrer.OB series, Objective Scanner
Carrier.OB100.C, Carrier.OB200.C, Carrier.OB400.C ……
51
3.2.2 Carrier.S series
Carrier.S100, Carrier.S200, Carrier.S300
55
3.2.3 Carrer.SL series
Carrier.SL200
62
3.3 Piezo Scanner Controller 63-64
Piezo Motion · RT
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
www.multi-field.com ｜ MultiFields Technologies www.multi- Piezoelectric Motion - RT Piezo Motion · RT
4 Optics Automation 65-72
4.1 Fast Steering Mirror 67
4.1.1 Z motion
Mirrors.Z12
67
4.1.2 Tx Ty
Mirrors.TxTy.1010, Mirrors.TxTy.0303
68
4.1.3 Z Tx Ty
Mirrors.Z12TxTy0101.
69
4.2
Piezo Motorized Mirror Mount
and Autoscrew Actuator 70
4.2.1 Long Stroke Actuator
AutoScrew.LR
70
4.2.2 Dynamic Actuator
AutoScrew.Nano
71
4.3 Piezo Mirror Mount Controller 72
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
1
➡Single Axis Module
➡Multi Degrees of
Freedom
Free series
Parallel Kinematic
Lab series
Balance, Stackable
Piezo Motor Positioning
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
2
mini series
Miniature
Indus series
Long Travel Range
Carrier series
Large Aperture
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
3
“Lab Series”
\"Lab series\" have 35 mm and 65 mm two families piezo motor stages. All
equipped with optical encoder for close loop control. They are easily stackable
to build various multi-axes combination.
• RS35.Lab, Rotary ➠
• GS35-35.Lab, Goniometer ➠
• GS35-55.Lab, Goniometer ➠
• LS35z.Lab, Elevation ➠
• LS35x.Lab, Linear ➠
• LS35x.Lab, Linear ➠
35 mm
Balance of Speed, Load and Size
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
4
65 mm
• RS65.Lab, Rotary ➠
• GS65-77.Lab, Goniometer ➠
• GS65-97.Lab, Goniometer ➠
• LS65z.Lab, Elevation ➠
• LS65x.Lab, Linear ➠
• LS65x.Lab, Linear ➠
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
5
Linear Motion Unit
X/Y Z
35 mm
LS35x.Lab series LS35z.Lab series
65 mm
LS65x.Lab series LS65z.Lab series
80mm
LS80z.Lab series
105mm
LS105x.Lab series
.NM Non-magnetic, .HV, High Vacuum Version, .UHV, Ultra High Vacuum Version
Room Temperature Piezo Stage· Lab series
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
6
Angular Motion Unit
Tx Ty Tz
35 mm
GS35 - 35.Lab series GS35 - 55.Lab series RS35.Lab series
65 mm
GS65 - 77.Lab series GS65 - 97.Lab series RS65.Lab series
80 mm
105 mm
.NM Non-magnetic, .HV, High Vacuum Version, .UHV, Ultra High Vacuum Version
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
“Lab Series”
Balance of Speed, Load and Size
Environment ➠
Standard
Atmosphere
Size
⟱
Motion
Direction
⟱
Product Code
⟱
• Standard
35 × 35 mm
X LS35x.Lab ✓
2 nm Optical Sensor Z LS35z.Lab ✓
Rz RS35.Lab ✓
Tx GS35-35.Lab ✓
Ty GS35-55.Lab ✓
65 × 65 mm
X LS65x.Lab ✓
Z LS65z.Lab ✓
Rz RS65.Lab ✓
Tx GS65-77.Lab ✓
Ty GS65-97.Lab ✓
• Cost Effective
35 × 35 mm
X LS35x.Lab.E ✓
50 nm Optical Sensor Rz RS35.Lab.E ✓
65 × 65 mm
X LS65x.Lab.E ✓
Rz RS65.Lab.E ✓
• Advanced
35 × 35 mm
X LS35x.Lab.adv ✓
0.5 nm Optical Sensor Z LS35z.Lab.adv ✓
65 × 65 mm
X LS65x.Lab.adv ✓
Z LS65z.Lab.adv ✓
Piezo Motion · RT
7
www.multi- www.multi- www.multi- Zolix Instruments Co.,Ltd. fifield.com ｜ MultiFields Technologies field.com ｜ MultiFields Technologies
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
.HV .UHV .NM .NM.HV .NM.UHV
High Vacuum
1E - 7 mabr
Ultra High Vacuum
2E - 11 mbar
Non-magnetic
Atmosphere
Non-magnetic
NM and HV
1E - 7 mbar
Non-magnetic
NM and UHV
2E - 11 mbar
Non-magnetic
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✗ ✗ ✗ ✗ ✗
✗ ✗ ✗ ✗ ✗
✗ ✗ ✗ ✗ ✗
✗ ✗ ✗ ✗ ✗
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
✓ ✓ ✓ ✓ ✓
Piezo Motion · RT
8
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification LS35x.Lab LS35x.Lab.E
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
/
2 Footprint × Height 35 × 35 × 12 mm
3 Material Standard, .HV, .UHV Stainless Steel; NM, Ti Stainless Steel
4 Mass Standard, .HV, .UHV 85 g; NM, 50g 85 g
5 Travel Range 20 mm
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Max. Velocity ~ 20 mm/s*(Reduce to 10% in Vacuum)
9 Minimum Incremental
Motion(Close-loop) 10 nm (.adv 5 nm) 100 nm
10 Unidirection Repeatability ±100 nm ±300 nm
11 Max. Push Force 2 N (High Force version 4N ) 2 N
12 Holding Force 5 N
13 Max. Payload
(horizontal mounting) 1kg
14 Max. Payload
(vertical mounting) 100 g (High Force version 250g)
15 Sensor Type Optical Sensor
16 Sensor Resolution Standard 2 nm; .adv 0.5 nm; 50 nm
17 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezo Motion · RT Piezo Motion · RT
9Specifications subject to change without notice.
“Lab series” Linear Stage — LS35x.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Feature •Sub nanometer
tuinning resolution
•UHV, Non-magnetic
•Millions cycle life time
•Sub nanometer
tuinning resolution
➡ Photo & Drawing
35.0
20.0
15.0
35.0 30.0 4 x 2.0 2.0
4 x M2 3.7
12.0
30.0
25.0
20.0 15.0
4 x 2.2 2.0
4.0 1.5
4 x 2.0 H7 2.0
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification LS35z.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 35 × 35 × 41 mm
3 Material Standard .HV, .UHV Stainless Steel; .NM, Ti
4 Mass 200 g
5 Travel Range 10 mm
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Max. Velocity ~ 10 mm/s*(Reduce to 10% in Vacuum)
9 Minimum Incremental
Motion(Close-loop) 10 nm (.adv 5 nm)
10 Unidirection Repeatability ±150nm
11 Max. Payload 500 g
12 Pitch/Yaw 0.3 mrad
13 Sensor Type Optical Sensor
14 Sensor Resolution Standard 2 nm; .adv 0.5 nm;
15 Controller MC-Newton.S series
For detail drawing and 3D model please contact us.
Piezo Motion · RT
10
“Lab series” Elevation Stage — LS35z.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Self-lock
• Optical Sensor Inside •Nanometer
Resolution
➡ Photo & Drawing
• Stackable with other Lab
series stage
35.0
35.0
12 x M2 - 6H 3.0
8 x 2.0 H7 2.0 3.0 41.0
35.0 4 x 2.4 4.0 30.0
30.0
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification LS65x.Lab LS65x.Lab.E
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
/
2 Footprint × Height 65 × 65 × 13 mm
3 Material Standard, .NM Aluminum; .HV .UHV Ti Aluminum
4 Mass 160 g
5 Travel Range 30 mm
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Max. Velocity ~ 20 mm/s*(Reduce to 10% in Vacuum)
9 Minimum Incremental
Motion(Close-loop) 10 nm (.adv 5 nm) 100 nm
10 Unidirection Repeatability ±100 nm ±300 nm
11 Max. Push Force 2 N (4N optional) 2 N
12 Holding Force 5 N
13 Pitch/Yaw 0.3 mrad
14 Max. Payload
(horizontal mounting) 2 kg
15 Max. Payload
(verticall mounting) 100 g (higher force up to 250 g optional)
16 Sensor Type Optical Sensor
17 Sensor Resolution Default 2 nm; .adv 0.5 nm; 50 nm
18 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezo Motion · RT Piezo Motion · RT
11
“Lab series” Linear Stage — LS65x.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
Specifications subject to change without notice.
➡ Feature •UHV, Non-magnetic
•Millions cycle life time
•Nanometer resolution
➡ Photo & Drawing
4 x 3.20 3.00
6.00 5.40 4 x M3 - 6H 3.50
2.50 3.50
4 x 3.00 H7 2.00
4 x M3 - 6H 3.50
2.50 3.50
15.00
65.00
65.00
13.00
4 x 3.00 H7 1.50
50.00
4 x 3.20 3.00
6.00 5.40 4 x M3 - 6H 3.50
2.50 3.50
4 x 3.00 H7 2.00
4 x M3 - 6H 3.50
2.50 3.50
15.00
65.00
65.00
13.00
4 x 3.00 H7 1.50
25.00 45.00
50.00
4 x 3.20 3.00
6.00 5.40 4 x M3 - 6H 3.50
2.50 3.50
4 x 3.00 H7 2.00
4 x M3 - 6H 3.50
2.50 3.50
15.00
65.00
65.00
13.00
4 x 3.00 H7 1 50.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
12
“Lab series” Elevation Stage — LS65z.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Specification LS65z.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 65 × 65 × 44 mm
3 Material Standard, .NM Aluminum; .HV .UHV Ti
4 Mass 430 g
5 Travel Range 10 mm (20 mm optional)
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Max. Velocity ~ 10 mm/s*(Reduce to 10% in Vacuum)
9 Minimum Incremental
Motion(Close-loop) 10 nm (.adv 5 nm)
10 Unidirection Repeatability ±150 nm
11 Max. Push Payload 500 g
12 Pitch/Yaw 0.3 mrad
13 Sensor Type Optical Sensor
14 Sensor Resolution Default 2 nm; .adv 0.5 nm;
15 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature •UHV, Non-magnetic
•Millions cycle life time
•Nanometer resolution
➡ Photo & Drawing
10.00
65.00
54.00 4 x M3 - 6H 4.00
2.50 4.00
4 x M3 4.00
2.50 4.00
3.05 X 90.00°, 近端
8 x M2 - 6H 4.00
1.60 4.00
55.00 50.00 30.00 20.00
25.00
30.00
55.00
65.00
4 x 3.40 5 55.00 50.00
45.00
55.00
44.00
10.00
65.00
54.00 4 x M3 - 6H 4.00
2.50 4.00
4 x M3 4.00
2.50 4.00
3.05 X 90.00°, 近端
8 x M2 - 6H 4.00
1.60 4.00
55.00 50.00 30.00 20.00
25.00
30.00
55.00
65.00
4 x 3.40 5.00 4 x 3.00 H7 2.00
55.00 50.00
45.00
55.00
44.00
10.00
65.00
54.00 4 x M3 - 6H 4.00
2.50 4.00
4 x M3 4.00
2.50 4.00
3.05 X 90.00°, 近端
8 x M2 - 6H 4.00
1.60 4.00
55.00 50.00 30.00 20.00
25.00
30.00
55.00
65.00
4 x 3.40 5.00 4 x 3.00 H7 2.00
55.00 50.00
45.00
55.00
44.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
13
“Lab series” Linear Stage — LS105x.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Specification LS105x.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 105 × 105 × 20 mm
3 Material Aluminum, Stainless Steel, Ceramic
4 Mass 650 g
5 Travel Range 60 mm
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Max. Velocity ~ 20 mm/s(Reduce to 10% in Vacuum)
9 Minimum Incremental Motion
(Close-loop) 10 nm
10 Max. Push Force 3 N
11 Holding Force 5 N
12 Pitch/Yaw 0.2 mrad
13 Max. Payload
(horizontal mounting) 4 kg
14 Sensor Type Optical Sensor
15 Sensor Resolution 2 nm
16 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer
Resolution
• Self-lock
• Optical Sensor Inside
• Higher Payload Capability
➡ Photo & Drawing
105.00
4 x M4 5.00
4 x 4.00 H7 4.00
8 x M3 5.00
25.00
55.00
50.00
75.00
95.00 75.00 55.00 50.00 20.00
105.00
75.00
75.00 50.00
95.00
4 x 4.30 6.00
8.20 6.00
30.00
105.00
4 x M4 5.00
4 x 4.00 H7 4.00
8 x M3 5.00
25.00
55.00
50.00
75.00
95.00 75.00 55.00 50.00 20.00
105.00
4 x 4.30 6.00
8.20 6.00
30.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
14
“Lab series” Elevation Stage — LS80z.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Specification LS80z.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 80 × 80 × 40 mm
3 Material Aluminum, Stainless Steel, Ceramic
4 Travel Range 10 mm
5 Driving Frequency Max. 20 kHz
6 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
7 Max. Velocity ~ 3 mm/s(Reduce to 10% in Vacuum)
8 Minimum Incremental Motion
(Close-loop) 10 nm
9 Holding Force 10 N
10 Max. Push Payload 1 kg
11 Sensor Type Optical Sensor
12 Sensor Resolution 2 nm
13 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature •Quiet Motion
• Self-lock
• Higher Force
• Nanometer
Resolution
• Optical Sensor Inside
• Stackable with other Lab series
stage
➡ Photo & Drawing
80.00
80.00
50.00
25.00
50.00 25.00
8 x M3 - 6H 4.00
40.00
85.68
4 x 3.20 2.50
75.00
75.00
44.82
86.69
50.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT Piezo Motion · RT
15
➡ Specification RS35.Lab RS35.Lab.E
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
/
2 Footprint × Height 35 × 35 × 11 mm
3 Material Standard, .HV, .UHV, Stainless Steel; NM, Ti Stainless Steel
4 Mass 90 g
5 Travel Range 360 °
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Aperture 5 mm
9 Max. Velocity ~ 15 °/s*(Reduce to 10% in Vacuum)
10 Minimum Incremental Motion
(Close-loop) 3 µrad 10 µrad
11 Unidirection Repeatability ±7.5 µrad ±25 µrad
12 Max. Payload
(horizontal mounting) 500 g
13 Holding Force 50 N·mm
14 Driving Torque 20 N·mm
15 Rotary Diameter 33.5 mm
16 Sensor Type Optical Sensor
17 Sensor Resolution 0.2 µrad 3 µrad
18 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
“Lab series” Rotary Stage — RS35.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Feature •Clear Aperture • Self-lock
• Nanometer
Resolution
• Optical Sensor Inside
• Stackable with other Lab series stage
➡ Photo & Drawing
4 x 2.40 1.50
4.20 9.00
4 x M2 - 6H 2.50
1.60 2.50 4 x 1.50 H7 2.00
20.00 15.00
15.00
20.00
30.00
30.00
4 x M2 - 6H 2.50
35.00
11.00
35.00
5 x 2.00 H 15.00
25.00
4 x 2.40 1.50
4.20 9.00
4 x M2 - 6H 2.50
1.60 2.50 4 x 1.50 H7 2.00
20.00 15.00
15.00
20.00
30.00
30.00
4 x M2 - 6H 2.50
35.00
11.00
35.00
5 x 2.00 H7 1.50
15.00
5.00
15.00
25.00
4 x 2.40 1.50
4.20 9.00
4 x M2 - 6H 2.50
1.60 2.50 4 x 1.50 H7 2.00
20.00 15.00
15.00
20.00
30.00
30.00
4 x M2 - 6H 2.50
35.00
11.00
35.00
5 x 2. 15.00 25.00Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
16
“Lab series” Rotary Stage — RS65.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Specification RS65.Lab RS65.Lab.E
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM , Non-magnetic Version;
/
2 Footprint × Height 65 × 65 × 13 mm
3 Material Standard, .NMAluminum; .HV .UHV Ti Aluminum
4 Mass 200 g
5 Travel Range 360 °
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Aperture 25.4mm
9 Max. Velocity ~ 10 °/s*(Reduce to 10% in Vacuum)
10 Minimum Incremental Motion
(Close-loop) 3 µrad 10 µrad
11 Unidirection Repeatability ±5 µrad ±20 µrad
12 Max. Payload
(horizontal mounting) 2 kg
13 Holding Force 100 N·mm
14 Driving Torque 40 N·mm
15 Rotary Diameter 62 mm
16 Sensor Type Optical Sensor
17 Sensor Resolution 0.07 µrad 2 µrad
18 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • Quiet Motion
•Self-lock
• Clear Aperture
• Nanometer
Resolution
• Optical Sensor Inside
• Stackable with other Lab series stage
➡ Photo & Drawing
55.00
55.00
4 x 3.40 4.50
8.00 8.00
30.00
30.00
50.00
4 x M2 - 6H 3.50
1.60 3.50
8 x M3 - 6H 3.50
2.50 3.50
65.00
13.00
65.00
45.00
50.00
4 x 3.00 H7 3.00
55.00
55.00
4 x 3.40 4.50
8.00 8.00
30.00
30.00
50.00
4 x M2 - 6H 3.50
1.60 3.50
8 x M3 - 6H 3.50
2.50 3.50
65.00
13.00
65.00
45.00
50.00
4 x 3.00 H7 3.00
55.00
30.00
65.00
13.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification GS35-35.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 35 × 35 × 20 mm
3 Material Standard, .HV, .UHV Stainless Steel; .NM, Ti
4 Mass 250 g
5 Travel Range ±8 °
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Tilt Radius 35 mm
9 Max. Velocity ~ 3 °/s*(Reduce to 10% in Vacuum)
10 Minimum Incremental Motion
(Close-loop) 2 µrad
11 Unidirection Repeatability ±10 µrad
12 Max. Payload
(horizontal mounting) 1 kg
13 Holding Force 200 N·mm
14 Driving Torque 70 N·mm
15 Sensor Type Optical Sensor
16 Sensor Resolution 0.05 µrad
17 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
17
“Lab series” Goniometer Stage — GS35-35.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
Specifications subject to change without notice.
➡ Feature • Nanometer
Resolution
• Self-lock
• Stackable with other
Lab series stage
• Optical Sensor Inside
• Co-pivot Center with
GS35-55.Lab
➡ Photo & Drawing
8 x M2 - 6H 2.00
1.60 2.00
4 x 2.00 H7 3.00 30.00
35.00 30.00 20.00 15.00
35.00
10.00°
20.00
35.00
30.00
20.00
2 x 2.00 H7 5.00
10.00
3 x 2.20 6.00
4.20 11.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
18
“Lab series” Goniometer Stage — GS35-55.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Specification GS35-55.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 35 × 35 × 20 mm
3 Material Standard, .HV, .UHV, Stainless Steel; .NM, Ti
4 Mass 250 g
5 Travel Range ±8 °
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Tilt Radius 55 mm
9 Max. Velocity ~ 3 °/s*(Reduce to 10% in Vacuum)
10 Minimum Incremental Motion
(Close-loop) 2 µrad
11 Unidirection Repeatability ±10 µrad
12 Max. Payload
(horizontal mounting) 1 kg
13 Holding Force 200 N·mm
14 Driving Torque 70 N·mm
15 Sensor Type Optical Sensor
16 Sensor Resolution 0.03 μrad
17 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer
Resolution
• Self-lock
• Stackable with
other Lab series
stage
• Optical Sensor Inside
• Co-pivot Center with GS35-35.Lab
➡ Photo & Drawing
8 x M2 - 6H 2.00
1.60 2.00
4 x 2.00 H7 2.00
25.00
30.00
35.00 30.00 20.00 15.00
55.00
10.00°
20.00
35.00
30.00
20.00
2.00 H7 6.08
25.00
10.00
3 x 2.20 7.00
4.20 11.00
8 x M2 - 6H 2.00
1.60 2.00
4 x 2.00 H7 2.00
25.00
30.00
35.00 30.00 20.00 15.00
55.00
10.00°
20.00
35.00
30.00
20.00
2.00 H7 6.08
25.00
10.00
3 x 2.20 7.00
4.20 11.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
19
“Lab series” Goniometer Stage — GS65-77.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
➡ Specification GS65-77.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 70 × 70 × 20 mm
Material Standard, .NM Aluminum; .HV .UHV Ti
3 Mass 650 g
4 Travel Range ±10 °
5 Driving Frequency Max. 20 kHz
6 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
7 Tilt Radius 77 mm
8 Max. Velocity ~ 3 °/s*(Reduce to 10% in Vacuum)
9 Minimum Incremental
Motion 1 µrad
10 Unidirection Repeatability ±7.5 µrad
11 Max. Payload
(horizontal mounting) 2 kg
12 Holding Torque 400 N·mm
13 Driving Torque 150 N·mm
14 Sensor Type Optical Sensor
15 Sensor Resolution 0.03 μrad
16 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer
Resolution
• Self-lock
• Stackable with
other Lab series
stage
• Optical Sensor Inside
• Co-pivot Center with GS65-97.Lab
➡ Photo & Drawing 4 x M3 3.00
2.50 3.00
3.05 X 90.00°, 近端
4 x 3.00 H7 3.20
3.50 X 90.00°, 近端 8 x M2 - 6H 4.00
1.60 5.20
2.05 X 90.00°, 近端
55.00 45.00 30.00 25.00
20.00
30.00
50.00
55.00
4 x M3 3.00
2.50 3.00
3.30 X 90.00°, 近端
70.00
10.00°
77.00
20.00
4 x 3.00 H7 2.35
25.00
45.00
50.00
4 x 3.20 100.00
6.00 16.00
4 x M3 3.00
2.50 3.00
3.05 X 90.00°, 近端
4 x 3.00 H7 3.20
3.50 X 90.00°, 近端 8 x M2 - 6H 4.00
1.60 5.20
2.05 X 90.00°, 近端
55.00 45.00 30.00 25.00
20.00
30.00
50.00
55.00
4 x M3 3.00
2.50 3.00
3.30 X 90.00°, 近端
70.00
10.00°
77.00
20.00
4 x 3.00 H7 2.35
25.00
45.00
50.00
4 x 3.20 100.00
6.00 16.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification GS65-97.Lab
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 70 × 70 × 20 mm
3 Material Standard, .NM Aluminum; .HV .UHV Ti
4 Mass 650 g
5 Travel Range ±10 °
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Tilt Radius 97 mm
9 Max. Velocity ~ 3 °/s*(Reduce to 10% in Vacuum)
10 Minimum Incremental Motion
(Close-loop) 1 µrad
11 Unidirection Repeatability ±7.5 µrad
12 Max. Payload
(horizontal mounting) 2 kg
13 Holding Torque 400 N·mm
14 Driving Torque 150 N·mm
15 Sensor Type Optical Sensor
16 Sensor Resolution 0.02 μrad
17 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezo Motion · RT
20
“Lab series” Goniometer Stage — GS65-97.Lab
Balance of Speed, Travel Range and Resolution, Quiet Motion
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer
Resolution
• Self-lock
• Stackable with
other Lab series
stage
• Optical Sensor Inside
• Co-pivot Center with GS65-77.Lab
➡ Photo & Drawing 4 x M3 4.00
2.50 4.00
3.50 X 90.00°, 近端
4 x 3.00 H7 2.35
3.50 X 90.00°, 近端
4 x M3 4.00
2.50 4.00
3.30 X 90.00°, 近端
8 x M2 - 6H 4.00
1.60 5.20
55.00 45.00 30.00 25.00
20.00
30.00
50.00
55.00
70.00
10.00°
97.00
20.00
70.00
4 x 3.00 H7 3.20
50.00
25.00
45.00
4 x 3.20 2.00
6.00 15.00
4 x M3 4.00
2.50 4.00
3.50 X 90.00°, 近端
4 x 3.00 H7 2.35
3.50 X 90.00°, 近端
4 x M3 4.00
2.50 4.00
3.30 X 90.00°, 近端
8 x M2 - 6H 4.00
1.60 5.20
55.00 45.00 30.00 25.00
20.00
30.00
50.00
55.00
70.00
10.00°
97.00
20.00
70.00
50.00
4 x 3.20 2.00
6.00 15.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT Piezo Motion · RT Piezo Motion · RT
21
“Indus Series”
Easy Integration Module with Multiple Travel Range
• L030.Indus ➠
• L060.Indus ➠
• L100.Indus ➠
• L150.Indus ➠
• LS200.Indus ➠
尺寸：24 × 60 × 14 mm
尺寸：24 × 105 × 14 mm
尺寸：24 × 180 × 14 mm
尺寸：36 × 250 × 16.5 mm
尺寸：80 × 295 × 20 mm
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
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22
➡ X20.mini
“mini Series”
Ultra Compact
Size： 20 × 20 × 12 mm
➡ X11.mini
Size： 11 × 11 × 6.5 mm
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
www.multiPiezoelectric Motion - RT
Piezo Motion · RT
www.multiPiezo Motion · RT
23
“Indus series” Linear Stage — L030.Indus ~ L150.Indus
Easy Integration Module with Multiple Travel Range
➡ Specification L030.Indus L060.Indus L100.Indus L150.Indus
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 60 × 24 ×14 mm 105 × 24 × 14 mm 180 × 24 × 14 mm 250 × 36 × 16.5 mm
3 Mounting Space 93 mm 165 mm 280 mm 480 mm
4 Material Stainless Steel, Aluminum
5 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
6 Mass 110 g 174 g 388 g 840 g
7 Max. Payload
(horizontal mounting) 1 kg 1 kg 2 kg 3 kg
8 Travel Range 30 mm 60 mm 100 mm 150 mm
9 Max. Velocity ～ 10 mm/s*(Reduce to 10% in Vacuum)
10 Minimum Incremental
Motion 10 nm
11 Driving Frequency Max. 20 kHz
12 Max. Push Force 3 N
13 Holding Force 5 N
14 Sensor Type Optical Encoder
15 Sensor Resolution 2 nm
16 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer Resolution
• Self-lock
• Multiple Travel Range
• Optical Sensor Inside
➡ Photo & Drawing
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
www.multi- ➡ Specification LS200.Indus
1 Optional
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
.NM, Non-magnetic Version;
2 Footprint × Height 80 × 295 × 20 mm
3 Material Stainless Steel, Aluminum
4 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
5 Mass 1050 g
6 Travel Range 200 mm
7 Max. Velocity ～ 10 mm/s*(Reduce to 10% in Vacuum)
8 Minimum Incremental
Motion 10 nm
9 Driving Frequency Max. 20 kHz
10 Max. Payload
(horizontal mounting) 2 kg
11 Max. Push Force 3 N
12 Holding Force 5 N
13 Sensor Type Optical Encoder
14 Sensor Resolution 2 nm
15 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezo Motion · RT
24
“Indus series” Linear Stage — LS200.Indus
Easy Integration Module with Multiple Travel Range
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer Resolution
• Self-lock
• Long Travel Range
• Optical Sensor Inside
➡ Photo & Drawing
4 x 3.30 6
M4 - 6H 6
8 x 2.50 6 8 x 3.00 H7 3.00
M3 - 6H 6
60.00
60.00
25.00
25.00
45.00
50.00
8 x 3.40 6.4
6.50 3.60
80.00
295.00
82.00 20.00
8 x 3.00 H7 45.00 25.00
4 x 3.30 6
M4 - 6H 6
8 x 2.50 6 8 x 3.00 H7 3.00
M3 - 6H 6
60.00
60.00
25.00
25.00
45.00
50.00
8 x 3.40 6.4
6.50 3.60
80.00
295.00
82.00 20.00
8 x 3.00 H7 3.00
240.00
50.00
45.00 25.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
www.multi-fi
Piezoelectric Motion - RT
Piezo Motion · RT
www.multi-fi
Piezo Motion · RT
25
Specifications subject to change without notice.
“mini series” Linear Stage — X11.mini
Ultra Compact
➡ Specification X11.mini
1 Optional
.HV, High Vacuum;
.UHV, Ultra High Vacuum;
.NM, Non-magnetic;
2 Footprint × Height 11 × 11 × 6.5mm
3 Material Stainless Steel, Aluminum
4 Mass 10 g
5 Travel Range 6 mm
6 Driving Frequency Max. 20 kHz
7 Resolution (Open-loop) <1 nm
8 Max. Payload 50 g
9 Max. Output Force 0.3 N
10 Holding Force 0.5 N
11 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
➡ Feature • Tiny Structure
• Nanometer Resolution
• Quiet Motion • Self-lock
➡ Photo & Drawing
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification X20.mini
1 Optional
.HV, High Vacuum;
.UHV, Ultra High Vacuum;
.NM, Non-magnetic;
2 Footprint × Height 20 × 20 × 12 mm
3 Material Standard, .HV, .UHV Stainless Steel; NM, Ti
4 Mass 30 g
5 Travel Range 10 mm
6 Driving Frequency Max. 20 kHz
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Max. Velocity ~ 20 mm/s* (Reduce to 10% in Vacuum)
9 Minimum Incremental Motion 10 nm
10 Max. Output Force 1.5 N
11 Holding Force 3 N
12 Max. Payload
(horizontal mounting) 300 g
13 Max. Payload
(verticall mounting) 100 g
14 Sensor Type Optical Sensor
15 Sensor Resolution 2 nm
16 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
“mini series” Linear Stage — X20.mini
Ultra Compact
➡ Feature •Quiet Motion
• Nanometer Resolution
• Self-lock • Optical Sensor Inside
➡ Photo & Drawing
20.0
23.2
15.0
20.0
2 x M2 5.00
12.0
20.0
15.0
15.0
4 x M1.6 - 6H 3.2
1.3 4.3
1.7 X 90°, 近端
4 x M1.6 - 6H 2.00
20.0
23.2
15.0
20.0
2 x M2 5.00
12.0
20.0
15.0
15.0
4 x M1.6 - 6H 3.2
1.3 4.3
1.7 X 90°, 近端
4 x M1.6 - 6H 2.00
www.multi-field.com ｜ MultiFields Technologies Piezo Motion · RT
www.multi-fi
26Specifications subject to change without notice.
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT Piezo Motion · RT
27
“FreeXD Series”
Multi Degrees of Freedom, Long Travel Range, Parallel
Kinematic
➡ Free3D.ZTxTy.150
ZTxTy Motion, Optical Sensor Feedback
Travel Range: Z: ±5 mm & θX, θY: ±3 °, ±3 °
Minimum Incremental Motion: Z: 25 nm & θX, θY:
7.5 μrad
Max. Payload: 3kg
XYZTxTyRz 6DoF Motion, Optical Sensor Feedback
Travel Range: XYZ： ±10 mm, ±10 mm, ±5 mm;
θx, θy, θz: ±10 °, ±10 °, ±20 °
Minimum Incremental Motion: XYZ: 20 nm, 20 nm, 20
nm; θX, θY, θZ: 1 μrad, 1 μrad, 1 μrad
Max. Payload: 1kg
➡ Free6D.3 - 2.150
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
28
Piezo Motor Positioning Stage, Optical Sensor
Feedback
Travel Range: 75 × 50 mm
Minimum Incremental Motion: 10 nm
Max. Payload: 2 kg
➡ Carrier.L7550.XY
“Carrier Series”
Microscopy Imaging and Positioning
Piezo Motor Positioning Stage, Optical Sensor
Feedback
Travel Range: 100 × 100 mm
Minimum Incremental Motion: 10 nm
Max. Payload: 4 kg
➡ Carrier.L1010.XY
Piezo Motor Positioning Stage, Optical Sensor
Feedback
Travel Range: 100 × 100 mm
Minimum Incremental Motion: 10 nm
Max. Payload: 4 kg
➡ Carrier.L1010s.XY
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification Free3D.ZTxTy.150
1 Optional .HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Footprint × Height Ø150 × 110 mm
3 Material Aluminum
4 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
5 Max. Payload 3 kg
6 Mass 1.5 kg
7 Travel Range Z * ±5 mm
8 Travel RangeθX, θY * ±3 °, ±3 °
9 Velocity 1 mm/s ~ 10 mm/s
10 Minimum Incremental
Motion Z 25 nm
11 Minimum Incremental
MotionθX, θY 7.5 μrad, 7.5 μrad
12 Unidirection
Repeatability Z ±0.15 μm
13 Unidirection
Repeatability θX, θY ±2.5 μrad, ±2.5 μrad
14 Sensor Type Optical Sensor
15 Sensor Resolution 2 nm
16 Controller MF-Free6D
✦ Axes of Parallel kinematic system are not independent. The specified value represents the maximum Travel Range achievable under
independent single-axis motion conditions.
For detail drawing and 3D model please contact us.
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
29
3DoF ZTxTy Stage — Free3D.ZTxTy.150
Parallel Kinematic, Clear Aperture, Flexible Design
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer Resolution
• Self-lock
• Parallel Kinematic
• Optical Sensor Inside
• Customize Available
➡ Photo & Drawing
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
30
6 DoF Parallel Stage — Free6D.3-2.150
Parallel Kinematic, Clear Aperture, Flexible Design
➡ Specification Free6D.3-2.150
1 Optional .HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Footprint × Height Ø150 × 90 mm
3 Material Stainless Steel, Aluminum
4 Cable & Connector(6x) Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
5 Max. Payload 1 kg
6 Travel Range X, Y, Z * ±10 mm, ±10 mm, ±5 mm
7 Travel Range θX, θY , θZ * ±10 °, ±10 °, ±20 °
8 Unidirection Repeatability
X, Y, Z ±0.25 μm, ±0.25 μm, ±0.1 μm
9 Unidirection Repeatability
θX, θY, θZ ±5 μrad, ±5 μrad, ±5 μrad
10 Minimum Incremental Motion
X, Y, Z 10 nm, 10 nm, 10 nm
11 Minimum Incremental Motion
θX, θY, θZ 1 μrad, 1 μrad, 1 μrad
12 Sensor Type Optical Sensor
13 Sensor Resolution 2nm
14 Controller MF-Free6D
✦ Axes of Parallel kinematic system are not independent. The specified value represents the maximum Travel Range achievable under
independent single-axis motion conditions.
For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer Resolution
• Self-lock
• Parallel Kinematic
• Optical Sensor Inside
• High Stiffness
➡ Photo & Drawing
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
31
6 DoF Parallel Stage — Free6D.3-2.070
Parallel Kinematic, Clear Aperture, Flexible Design
➡ Specification Free6D.3-2.070
1 Optional .HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Footprint × Height Ø70 × 65 mm
3 Material Stainless Steel, Aluminum
4 Cable & Connector(6x) Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
5 Max. Payload 100 g
6 Travel Range X, Y, Z ±5 mm, ±5 mm, ±2.5 mm
7 Travel Range θX, θY , θZ * ±16 °, ±13 °, ±26 °
8 Unidirection Repeatability
X, Y, Z * ±0.4 μm, ±0.4 μm, ±0.15 μm
9 Unidirection Repeatability
θX, θY, θZ ±20 μrad, ±20 μrad, ±20 μrad
10 Minimum Incremental Motion X,
Y, Z 20 nm, 20 nm, 20 nm
11 Minimum Incremental Motion θX,
θY, θZ 4 μrad, 4 μrad, 4 μrad
12 Sensor Type Optical Sensor
13 Sensor Resolution 2 nm
14 Controller MF-Free6D
✦ Axes of Parallel kinematic system are not independent. The specified value represents the maximum Travel Range achievable under
independent single-axis motion conditions.
For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer Resolution
• Self-lock
• Parallel Kinematic
• Optical Sensor Inside
• High Stiffness
➡ Photo & Drawing
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
32
6 DoF Controller — MC-Free6D
➡ Specification MC-Free6D
1 Function Controller for “Free series” stage motion and positioning.
2 Control Method Close-loop control for each driving unit. Parallel Kinematic algorithm.
3 Size 200 × 200 × 140 mm
4 Mass 2.7 kg
5 Power Supply 24 V
6 Max. Frequency 20 kHz
7 Max. Output Power 100 W
8 Work Environment 0～50 °C, <70 % RH
9 Channels 6
10 Connector DB15 female ×6
11 Communication Interface USB Type-C, EtherNet, EtherCAT(on request)
12 Software PC GUI, SDK
13 Feature 3D module simulation, trajectory distribution, rotary pivot user define
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature • 6 Channels • Multiple Interface • Advance Algorithm
➡ Photo & Drawing
• Close-loop Control for Optical Encoder
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification Carrier.L7550.XY
1 Optional
.NM, Non-magnetic;
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Motion Direction X, Y
3 Size 250 × 200 × 30 mm
4 Mounting Space 325 × 250 mm
5 Aperture 85 × 65 mm
6 Material Aluminum, Stainless Steel
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Work Temperature 10 ~ 40 °C
9 Mass 2.5 kg
10 Travel Range 75 × 50 mm
11 Max. Velocity ~ 15 mm/s*(Reduce to 10% in Vacuum)
12 Minimum Incremental Motion
(Close-loop) 10 nm
13 Driving Frequency Max. 20 kHz
14 Max. Payload
(horizontal mounting) 2 kg
15 Pitch/Yaw 0.3 mrad
16 Sensor Type Optical Sensor
17 Sensor Resolution 2 nm (Default)
18 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
33
Planar Linear Motion — Carrier.L7550.XY
High Resolution Piezo Motor Driving, Close-loop Control, for Microcopy
Specifications subject to change without notice.
➡ Feature • Nanometer Resolution
• Compatible with
microscopy
• Self-lock
• XY Planar Structure
• Clear Aperture
• Optical Sensor Inside
➡ Photo & Drawing
• Stackable with Piezo Scanner
250.0
230.0
200.0 180.0
127.0
4 x M2.5
50.0 150.0
166.0
76.0
17 x M6 7
4 x M2 1.6
200.0
4 x M4 - 6H 9.0
3.3 11.1
30.0
13 x M6 - 6H 6.0
5.0 9.0
4 x 6.6 完全贯穿
11.0 6.8
180.0
230.0
50.0
225.0
100.0 75.0
175.0
250.0
230.0
200.0 180.0
127.0
4 x M2.5
50.0 150.0
166.0
76.0
17 x M6 7
4 x M2 1.6
200.0
4 x M4 - 6H 9.0
3.3 11.1
30.0
13 x M6 - 6H 6.0
5.0 9.0
4 x 6.6 完全贯穿
11.0 6.8
180.0
230.0
50.0
225.0
100.0 75.0
175.0
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification Carrier.L1010.XY
1 Optional
.NM, Non-magnetic;
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Motion Direction X, Y
3 Size 250 × 250 × 40 mm
4 Mounting Space 350 × 350 × 40 mm
5 Aperture 120 × 120 mm
6 Material Aluminum / Stainless Steel
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Work Temperature 10 ~ 40 °C
9 Travel Range 100 × 100 mm
10 Max. Velocity ~ 10 mm/s*(Reduce to 10% in Vacuum)
11 Minimum Incremental Motion
(Close-loop) 10 nm
12 Driving Frequency Max. 20 kHz
13 Max. Payload
(horizontal mounting) 4 kg
14 Pitch/Yaw 0.3 mrad
15 Sensor Type Optical Sensor
16 Sensor Resolution 2 nm (Default)
17 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezo Motion · RT
34
Planar Linear Motion — Carrier.L1010.XY
High Resolution Piezo Motor Driving, Close-loop Control, for Microcopy
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer Resolution
• XY Planar Structure
• Self-lock
• Clear Aperture
• Optical Sensor Inside
➡ Photo & Drawing
• Stackable with Piezo Scanner 250.0 225.0 200.0 150.0 50.0 120.0 120.0
250.0
225.0
200.0
100.0
28 x M6
250.0
40.00
250.0 225.0 200.0 150.0 50.0 120.0 120.0
250.0
225.0
200.0
100.0
28 x M6
250.0
40.00
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification Carrier.L1010s.XY
1 Optional
.NM, Non-magnetic;
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Motion Direction X, Y
3 Size 185 × 185 × 28 mm
4 Mounting Space 285 × 285 × 28 mm
5 Aperture 20 x 20 mm (Full Travel Range); 50 x 50 mm (Travel Range<70 x 70mm)
6 Material Aluminum, Stainless Steel, Ceramic
7 Cable & Connector Standard/HV, shield cable and D-Sub15 plug; UHV, Kapton, PEEK D-Sub15
8 Work Temperature 10 ~ 40 °C
9 Mass 2 kg
10 Travel Range 100 × 100 mm
11 Max. Velocity 10 mm/s* (Reduce to 10% in Vacuum)
12 Minimum Incremental Motion
(Close-loop) 10 nm
13 Driving Force 2 N
14 Holding Force 4 N
15 Max. Payload
(horizontal mounting) 4 kg
16 Pitch/Yaw 0.3 mrad
17 Sensor Type Optical Sensor
18 Sensor Resolution 2 nm (Default)
19 Controller MC-Newton.S series
* For detail drawing and 3D model please contact us.
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
35
Planar Linear Motion — Carrier.L1010s.XY
High Resolution Piezo Motor Driving, Close-loop Control, for Microcopy
Specifications subject to change without notice.
➡ Feature • Quiet Motion
• Nanometer Resolution
• XY Planar Structure
• Self-lock
• Clear Aperture
• Optical Sensor Inside
• Stackable with Piezo
Scanner
➡ Photo & Drawing 28.00
185.00
16 x M6 5.00
125.00
25.00
75.00
150.00 125.00 50.00
50.00
120.00
120.00 185.00
4 x M6 10.00
4 x 4.00 4.00
50.00 100.00 125.00
125.00
150.00
6 x 6.60 3.80
11.00 6.40
28.00
185.00
16 x M6 5.00
125.00
25.00
75.00
150.00 125.00 50.00
50.00
120.00
120.00 185.00
4 x M6 10.00
4 x 4.00 4.00
50.00 100.00 125.00
125.00
150.00
6 x 6.60 3.80
11.00 6.40
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
36
Mounting Type
Piezo Motion · RT
Goniometer Stage Horizontal Mounting Rotary Stage Horizontal Mounting
Linear Stage
Elevation Stage
Vertical Horizontal
➡ Specification MC-Newton.S
1 Control Mode Open-loop and Close-loop
2 Size 136 × 131 × 32 mm
3 Motor Type For Room Temperature Piezo Inertia Motor
4 Channels Single
5 Sensor Type Incremental Optical Sensor
6 Communication Interface USB, EtherNet, RS485
7 Motor Connector D-Sub 15
8 Power Supply 24V DC
9 Max. Output Power 30 W
10 Power Plug IEC inlet
11 Output Voltage 0 ~ 75 V
12 Analog In 0 ~ 10 V (single-ended)
13 Manual Control Button on front panel
14 Hardware Trigger SMA, TTL (3.3V), I/O
15 Remote Upgrade Yes
16 Software PC GUI, SDK
* For detail drawing and 3D model please contact us.
Piezo Motion · RT
www.multi-field.com ｜ MultiFields Technologies
Piezo Motion · RT
37
Piezo Motor Controller — MC-Newton.S
For Room Temperature Piezo Motor
Specifications subject to change without notice.
➡ Feature • High Performance
• Hardware Trigger
• Advance Algorithm
• Analog In
• Close-loop Control with
Optical Sensor
➡ Photo & Drawing
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification MC-Newton.MSx
1 Control Mode Open-loop and Close-loop
2 Size 136 × 131 mm (32 × (× +1) ) mm
3 Motor Type For Room Temperature Piezo Inertia Motor
4 Channels Up to 10
5 Sensor Type Incremental Optical Sensor
6 Communication Interface USB, EtherNet, RS485, EtherCAT(on request)
7 Motor Connector D-Sub 15
8 Power Supply 24 VDC & 120 W
9 Max. Output Power 30 W per Channel; 100 W in Total
10 Power Plug IEC inlet
11 Output Voltage 0 ~ 75 V
12 Analog In 0 ~ 10 V (single-ended)
13 Manual Control Button on front panel
14 Hardware Trigger SMA, TTL (3.3V), I/O
15 Remote Upgrade Yes
16 Software PC GUI, SDK
* For detail drawing and 3D model please contact us.
Piezo Motion · RT
38
Piezo Motor Controller — MC-Newton.MSx
For Room Temperature Piezo Motor
Specifications subject to change without notice.
➡ Feature • Module Design
• High Performance
• Advance Algorithm
• Up to 10 Channels
• Close-loop Control with
Optical Sensor
➡ Photo & Drawing
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
39
➡Compact
➡Clear Aperture
➡Fast Steering Mirror
Mirrors series
Dynamic, Robust
S series
Balance Choice
Carrier.S series
Versatile, High Performance
Piezo Scanner
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
40
Carrier.SL series
Low Profile
SD series
High Dynamics
SH series
High Load
Carrier.OB series
Objective Focusing & Scanning
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezo Motion · RT
41
S, SH & SD Series
Compact Design, Capacitive Sensor Close-loop Control
Multi Degrees of Freedom, Travel Range up to 500 μm, High Dynamic and High
Load optional
Standard
1 Axis
S100.X.C S300.X.C S500.X.C
100 μm 300 μm 500 μm
S100.Z.C S300.Z.C
100 μm 300 μm
2 Axes S100.XY.C S300.XY.C S500.XY.C
100 μm, 100 μm 300 μm, 300 μm 500 μm, 500 μm
3 Axes S100.XYZ.C S200.XYZ.C
100 μm, 100 μm, 100
μm
200 μm, 200 μm, 200
μm
* Non-magnetic, Ultra High Vacuum Versions available
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
High Dynamic High Load
SD15.X.C SD30.X.C
1 Axis
15 μm 30 μm
2 Axes
SH30.XYZ.C 3 Axes
30 μm, 30 μm, 15 μm
Piezo Motion · RT
42
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification S100.X.C S300.X.C S500.X.C
1 Optional
.NM, Non-magnetic;
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Motion Direction X
3 Footprint × Height 55 × 55 × 17 mm 70 × 70 × 17 mm
4 Material Aluminum, Stainless Steel
5 Travel Range
(Open-loop) 120 μm 350 μm 600 μm
6 Travel Range
(Close-loop) 100 μm 300 μm 500 μm
7 Resolution
(Open-loop) 0.2 nm 0.5 nm 0.7 nm
8 Resolution
(Close-loop) 0.5 nm 0.9 nm 1.5 nm
9 Linearity 0.03%
10 Pitch/Yaw ±3 µrad / ±3 µrad ±3 µrad / ±3 µrad ±6 µrad / ±6 µrad
11 Resonant Frequency 700 Hz 370 Hz 200 Hz
12 Max. Pull Force 10 N
13 Max. Payload
(horizontal mounting) 500 g
14 Sensor Type Capacitive
15 Driving Voltage Max. 150 V
16 Working Temperature 15 ~ 40 °C
17 Mass 160 g 200 g 240 g
18 Controller MC-Archimedes.N
* For detail drawing and 3D model please contact us.
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
43
X Piezo Scanner— S100.X.C, S300.X.C & S500.X.C
Standard Single Axis Piezo Scanner Module
Specifications subject to change without notice.
➡ Feature • Piezo Stack Driving
• Flexure Guiding
• Sub-nanometer
Resolution
• Long Travel Range
• CAP Sensor, Close-loop
Control
• Direct Metrology
➡ Photo & Drawing
50.0
50.0
25.0
12.5
25.0
9 x M2.5
4 x 3.2 贯穿
20.0
40.0
17.0
50.0
50.0
50.0
25.0
12.5
25.0
9 x M2.5
4 x 3.2 贯穿
20.0
40.0
17.0
50.0
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
➡ Specification S100.Z.C S300.Z.C
1 Optional
.NM, Non-magnetic;
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Motion Direction Z
3 Footprint × Height 55 × 55 × 18 mm
4 Material Aluminum, Stainless Steel
5 Travel Range
(Open-loop) 120 μm 350 μm
6 Travel Range
(Close-loop) 100 μm 300 μm
7 Resolution
(Open-loop) 0.2 nm 0.5 nm
8 Resolution
(Close-loop) 0.5 nm 1 nm
9 Pitch/Yaw ±100 µrad ±200 µrad
10 Linearity 0.03%
11 Resonant Frequency
(no load) 700 Hz 320 Hz
12 Stiffness 0.5 N/µm 0.25 N/µm
13 Max. Payload 500 g
14 Sensor Type Capacitive
15 Driving Voltage Max. 150 V
16 Working Temperature 15 ~ 40 °C
17 Mass 170 g 250 g
18 Controller MC-Archimedes.N
* For detail drawing and 3D model please contact us.
Piezo Motion · RT
44
Z Piezo Scanner — S100.Z.C, S300.Z.C
Standard Single Axis Piezo Scanner Module, Vertical Motion
Specifications subject to change without notice.
➡ Feature • Piezo Stack
Driving
• Direct Metrology
• Flexure Guiding
• Sub-nanometer
Resolution
• CAP Sensor, Close-loop
Control
➡ Photo & Drawing
40.0
40.0 25.0
25.0
15.0
12 x M2
4 x 3.0 2.9
33.5
33.5
18.0
40.0
817
16
15
14
13
12
11
10
9
8
7
6
40.0
40.0 25.0
25.0
15.0
12 x M2
4 x 3.0 2.9
33.5
33.5
18.0
40.0
21
20
19
18
17
16
15
14
13
12
11
10
9
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
Piezoelectric Motion - LT Piezo Motion · RT Piezo Motion · RT
45
XY/XYZ Piezo Scanner — S100.XY/XYZ, S200.XY/XYZ
Compact XYZ Stack System
➡ Specification S100.XY.C S200.XY.C S100.XYZ.C S200.XYZ.C
1 Optional
.NM, Non-magnetic;
.HV, High Vacuum Version;
.UHV, Ultra High Vacuum Version;
2 Motion Direction X, Y X, Y, Z
3 Footprint × Height 55 × 55 × 27 mm 55 × 55 × 30 mm 55 × 55 × 40 mm 55 × 55 × 45 mm
4 Material Aluminum, Stainless Steel
5 Travel Range
(Open-loop) 120 × 120 μm 240 × 240 μm 120 × 120 × 120 μm 240 × 240 × 240 μm
6 Travel Range
(Close-loop) 100 × 100 μm 200 × 200 μm 100 × 100 × 100 μm 200 × 200 × 200 μm
7 Resolution
(Open-loop) 0.2 nm 0.4 nm 0.2 nm 0.4 nm
8 Resolution
(Close-loop) 1 nm 1.5 nm 1 nm 1.5 nm
9 Linearity 0.03%
10 Resonant Frequency
(X/Y/Z no load) 400 / 350 / - Hz 300 / 250 / - Hz 400 / 350 /300 Hz 300 / 250 / 200 Hz
11 Stiffness 0.5 N/μm 0.25 N/μm 0.5 N/μm 0.25 N/μm
12 Sensor Type Capacitive
13 Driving Voltage Max. 150 V
14 Working Temperature 15 ~ 40 °C
15 Cable D-Sub 3W3
16 Controller MC-Archimedes.N
* For detail drawing and 3D model please contact us.
Specifications subject to change without notice.
➡ Feature •Piezo Stack Driving
• Direct Metrology
• Flexure Guiding
• Sub-nanometer
Resolution
• CAP Sensor, Close-loop
Control
• Compact Serial Structure
➡ Photo & Drawing
55.0
55.0 45.0 26.0
26.0
13.0
13.0
12 x M2.5
55.0
39.7
21
20
19
18
17
16
15
14
13
12
11
10
9
8
7
6
555.0
55.0 45.0 26.0
26.0
13.0
13.0
12 x M2.5
55.0
39.7
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21
20
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17
16
15
14
13
12
11
10
Zolix Instruments Co.,Ltd.
TEL: +86 10 5637 0168 Email: info@zolix.com.cn
